JPS54127090A - Polishing machine - Google Patents

Polishing machine

Info

Publication number
JPS54127090A
JPS54127090A JP3476478A JP3476478A JPS54127090A JP S54127090 A JPS54127090 A JP S54127090A JP 3476478 A JP3476478 A JP 3476478A JP 3476478 A JP3476478 A JP 3476478A JP S54127090 A JPS54127090 A JP S54127090A
Authority
JP
Japan
Prior art keywords
polishing machine
polishing
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3476478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144631B2 (enrdf_load_stackoverflow
Inventor
Katsuyuki Ichihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UINGOO KK
Original Assignee
UINGOO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UINGOO KK filed Critical UINGOO KK
Priority to JP3476478A priority Critical patent/JPS54127090A/ja
Publication of JPS54127090A publication Critical patent/JPS54127090A/ja
Publication of JPS6144631B2 publication Critical patent/JPS6144631B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Turning (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP3476478A 1978-03-25 1978-03-25 Polishing machine Granted JPS54127090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3476478A JPS54127090A (en) 1978-03-25 1978-03-25 Polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3476478A JPS54127090A (en) 1978-03-25 1978-03-25 Polishing machine

Publications (2)

Publication Number Publication Date
JPS54127090A true JPS54127090A (en) 1979-10-02
JPS6144631B2 JPS6144631B2 (enrdf_load_stackoverflow) 1986-10-03

Family

ID=12423366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3476478A Granted JPS54127090A (en) 1978-03-25 1978-03-25 Polishing machine

Country Status (1)

Country Link
JP (1) JPS54127090A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9156122B2 (en) 2011-06-02 2015-10-13 Ebara Corporation Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9156122B2 (en) 2011-06-02 2015-10-13 Ebara Corporation Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
US9302366B2 (en) 2011-06-02 2016-04-05 Ebara Corporation Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
US9943943B2 (en) 2011-06-02 2018-04-17 Ebara Corporation Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus

Also Published As

Publication number Publication date
JPS6144631B2 (enrdf_load_stackoverflow) 1986-10-03

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