JPS54127090A - Polishing machine - Google Patents
Polishing machineInfo
- Publication number
- JPS54127090A JPS54127090A JP3476478A JP3476478A JPS54127090A JP S54127090 A JPS54127090 A JP S54127090A JP 3476478 A JP3476478 A JP 3476478A JP 3476478 A JP3476478 A JP 3476478A JP S54127090 A JPS54127090 A JP S54127090A
- Authority
- JP
- Japan
- Prior art keywords
- polishing machine
- polishing
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Turning (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3476478A JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3476478A JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54127090A true JPS54127090A (en) | 1979-10-02 |
JPS6144631B2 JPS6144631B2 (en) | 1986-10-03 |
Family
ID=12423366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3476478A Granted JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54127090A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9156122B2 (en) | 2011-06-02 | 2015-10-13 | Ebara Corporation | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus |
-
1978
- 1978-03-25 JP JP3476478A patent/JPS54127090A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9156122B2 (en) | 2011-06-02 | 2015-10-13 | Ebara Corporation | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus |
US9302366B2 (en) | 2011-06-02 | 2016-04-05 | Ebara Corporation | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus |
US9943943B2 (en) | 2011-06-02 | 2018-04-17 | Ebara Corporation | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6144631B2 (en) | 1986-10-03 |
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