JPS6144628A - マイクロフレネルレンズの製造方法 - Google Patents

マイクロフレネルレンズの製造方法

Info

Publication number
JPS6144628A
JPS6144628A JP16705484A JP16705484A JPS6144628A JP S6144628 A JPS6144628 A JP S6144628A JP 16705484 A JP16705484 A JP 16705484A JP 16705484 A JP16705484 A JP 16705484A JP S6144628 A JPS6144628 A JP S6144628A
Authority
JP
Japan
Prior art keywords
resist
pattern
stage
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16705484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226851B2 (enrdf_load_stackoverflow
Inventor
Takashi Nirigi
二里木　孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP16705484A priority Critical patent/JPS6144628A/ja
Publication of JPS6144628A publication Critical patent/JPS6144628A/ja
Publication of JPH0226851B2 publication Critical patent/JPH0226851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00269—Fresnel lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Surface Treatment Of Glass (AREA)
JP16705484A 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法 Granted JPS6144628A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16705484A JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16705484A JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Publications (2)

Publication Number Publication Date
JPS6144628A true JPS6144628A (ja) 1986-03-04
JPH0226851B2 JPH0226851B2 (enrdf_load_stackoverflow) 1990-06-13

Family

ID=15842539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16705484A Granted JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Country Status (1)

Country Link
JP (1) JPS6144628A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475704B1 (en) 1997-09-12 2002-11-05 Canon Kabushiki Kaisha Method for forming fine structure
US6569608B2 (en) 1998-09-18 2003-05-27 Canon Kabushiki Kaisha Method of manufacturing an element with multiple-level surface
JP2005517996A (ja) * 2002-02-20 2005-06-16 ユーシーエルティ リミテッド 欠陥フォトマスクを修理するための方法およびシステム
JP2006114882A (ja) * 2004-09-16 2006-04-27 Asahi Glass Co Ltd パターンの形成方法およびパターンを有する物品
JP2006310678A (ja) * 2005-05-02 2006-11-09 Ricoh Opt Ind Co Ltd 微細表面構造形成用基板、微細表面構造物品の製造方法及びその製造方法で製造された微細表面構造物品
JP2008145509A (ja) * 2006-12-06 2008-06-26 Three M Innovative Properties Co フレネルレンズ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475704B1 (en) 1997-09-12 2002-11-05 Canon Kabushiki Kaisha Method for forming fine structure
US7018783B2 (en) 1997-09-12 2006-03-28 Canon Kabushiki Kaisha Fine structure and devices employing it
US6569608B2 (en) 1998-09-18 2003-05-27 Canon Kabushiki Kaisha Method of manufacturing an element with multiple-level surface
JP2005517996A (ja) * 2002-02-20 2005-06-16 ユーシーエルティ リミテッド 欠陥フォトマスクを修理するための方法およびシステム
JP2006114882A (ja) * 2004-09-16 2006-04-27 Asahi Glass Co Ltd パターンの形成方法およびパターンを有する物品
JP2006310678A (ja) * 2005-05-02 2006-11-09 Ricoh Opt Ind Co Ltd 微細表面構造形成用基板、微細表面構造物品の製造方法及びその製造方法で製造された微細表面構造物品
JP2008145509A (ja) * 2006-12-06 2008-06-26 Three M Innovative Properties Co フレネルレンズ

Also Published As

Publication number Publication date
JPH0226851B2 (enrdf_load_stackoverflow) 1990-06-13

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