JPS6144428Y2 - - Google Patents
Info
- Publication number
- JPS6144428Y2 JPS6144428Y2 JP1980062942U JP6294280U JPS6144428Y2 JP S6144428 Y2 JPS6144428 Y2 JP S6144428Y2 JP 1980062942 U JP1980062942 U JP 1980062942U JP 6294280 U JP6294280 U JP 6294280U JP S6144428 Y2 JPS6144428 Y2 JP S6144428Y2
- Authority
- JP
- Japan
- Prior art keywords
- tubes
- air pressure
- inclination angle
- column
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980062942U JPS6144428Y2 (no) | 1980-05-08 | 1980-05-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980062942U JPS6144428Y2 (no) | 1980-05-08 | 1980-05-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56164550U JPS56164550U (no) | 1981-12-07 |
JPS6144428Y2 true JPS6144428Y2 (no) | 1986-12-15 |
Family
ID=29657217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980062942U Expired JPS6144428Y2 (no) | 1980-05-08 | 1980-05-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6144428Y2 (no) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60167771A (ja) * | 1984-02-10 | 1985-08-31 | 日産車体株式会社 | 作業台 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237966U (no) * | 1975-09-10 | 1977-03-17 | ||
JPS5243553U (no) * | 1975-09-19 | 1977-03-28 | ||
JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51109513U (no) * | 1975-02-28 | 1976-09-03 |
-
1980
- 1980-05-08 JP JP1980062942U patent/JPS6144428Y2/ja not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5237966U (no) * | 1975-09-10 | 1977-03-17 | ||
JPS5243553U (no) * | 1975-09-19 | 1977-03-28 | ||
JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Also Published As
Publication number | Publication date |
---|---|
JPS56164550U (no) | 1981-12-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5081795A (en) | Polishing apparatus | |
KR960014142B1 (ko) | 영상표시기의 각도조절장치 | |
JP2002139661A (ja) | 光学要素用の取付装置 | |
JPH06211482A (ja) | 真空リフト装置 | |
JPS6144428Y2 (no) | ||
JP2911173B2 (ja) | 分子線エピタキシー装置噴出セル内にるつぼを備えた装置 | |
US4118869A (en) | Device for positioning an object | |
JPS6144427Y2 (no) | ||
JP4628192B2 (ja) | レーザー墨出し器およびその三脚用傾き調整アタッチメント | |
JPS6052230A (ja) | 微動ステ−ジ機構 | |
US4947554A (en) | Cloth cutting apparatus | |
JP2879709B2 (ja) | 大型基板露光装置 | |
JPH0548948B2 (no) | ||
US786093A (en) | Ditching and terracing level. | |
JPS6043618A (ja) | レンズの結像を調節するための装置 | |
JP2006170957A (ja) | チルトステージ | |
JPH07245259A (ja) | 露光装置 | |
JPH045659A (ja) | フォトマスク基板支持装置 | |
JPH0497209A (ja) | 物体の保持機構 | |
JPS6218033Y2 (no) | ||
JP2000015569A (ja) | ウェーハ研磨ヘッド | |
US4525060A (en) | Exposure apparatus | |
JPS59224124A (ja) | 微粗動機構 | |
JPH06110603A (ja) | マウス及び角度調整方法 | |
JPH02195082A (ja) | ダイヤフラムバルブ |