JPS6142345B2 - - Google Patents
Info
- Publication number
- JPS6142345B2 JPS6142345B2 JP1546577A JP1546577A JPS6142345B2 JP S6142345 B2 JPS6142345 B2 JP S6142345B2 JP 1546577 A JP1546577 A JP 1546577A JP 1546577 A JP1546577 A JP 1546577A JP S6142345 B2 JPS6142345 B2 JP S6142345B2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- thin film
- potassium nitrate
- forming
- silicon monoxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims description 36
- 239000010409 thin film Substances 0.000 claims description 23
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 21
- 235000010333 potassium nitrate Nutrition 0.000 claims description 18
- 239000004323 potassium nitrate Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000015654 memory Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
- H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Insulating Materials (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/658,199 US4195355A (en) | 1970-09-28 | 1976-02-17 | Process for manufacturing a ferroelectric device and devices manufactured thereby |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52125245A JPS52125245A (en) | 1977-10-20 |
| JPS6142345B2 true JPS6142345B2 (enrdf_load_stackoverflow) | 1986-09-20 |
Family
ID=24640306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1546577A Granted JPS52125245A (en) | 1976-02-17 | 1977-02-15 | Method of fabricating ferrodielectric device and device fabricated by said method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS52125245A (enrdf_load_stackoverflow) |
| AU (1) | AU2229577A (enrdf_load_stackoverflow) |
| GB (1) | GB1527341A (enrdf_load_stackoverflow) |
| IT (1) | IT1079574B (enrdf_load_stackoverflow) |
| NL (1) | NL7701683A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140460B (en) * | 1983-05-27 | 1986-06-25 | Dowty Electronics Ltd | Insulated metal substrates |
| US8519846B2 (en) | 2004-03-16 | 2013-08-27 | Newage Industries, Inc. | Tracking system for gamma radiation sterilized bags and disposable items |
| US8405508B2 (en) | 2006-08-09 | 2013-03-26 | Emd Millipore Corporation | Use of gamma hardened RFID tags in pharmaceutical devices |
| US8957778B2 (en) | 2007-08-02 | 2015-02-17 | Emd Millipore Corporation | Sampling system |
-
1977
- 1977-02-10 GB GB557977A patent/GB1527341A/en not_active Expired
- 1977-02-15 AU AU22295/77A patent/AU2229577A/en not_active Expired
- 1977-02-15 JP JP1546577A patent/JPS52125245A/ja active Granted
- 1977-02-16 IT IT2034677A patent/IT1079574B/it active
- 1977-02-17 NL NL7701683A patent/NL7701683A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52125245A (en) | 1977-10-20 |
| NL7701683A (nl) | 1977-08-19 |
| IT1079574B (it) | 1985-05-13 |
| AU2229577A (en) | 1978-08-24 |
| GB1527341A (en) | 1978-10-04 |
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