JPS6138851B2 - - Google Patents

Info

Publication number
JPS6138851B2
JPS6138851B2 JP16245278A JP16245278A JPS6138851B2 JP S6138851 B2 JPS6138851 B2 JP S6138851B2 JP 16245278 A JP16245278 A JP 16245278A JP 16245278 A JP16245278 A JP 16245278A JP S6138851 B2 JPS6138851 B2 JP S6138851B2
Authority
JP
Japan
Prior art keywords
electron beam
rectangular
particles
image
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16245278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5588329A (en
Inventor
Junichi Kai
Nobuyuki Yasutake
Tooru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP16245278A priority Critical patent/JPS5588329A/ja
Publication of JPS5588329A publication Critical patent/JPS5588329A/ja
Publication of JPS6138851B2 publication Critical patent/JPS6138851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
JP16245278A 1978-12-27 1978-12-27 Exposing method for electron beam Granted JPS5588329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16245278A JPS5588329A (en) 1978-12-27 1978-12-27 Exposing method for electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16245278A JPS5588329A (en) 1978-12-27 1978-12-27 Exposing method for electron beam

Publications (2)

Publication Number Publication Date
JPS5588329A JPS5588329A (en) 1980-07-04
JPS6138851B2 true JPS6138851B2 (zh) 1986-09-01

Family

ID=15754872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16245278A Granted JPS5588329A (en) 1978-12-27 1978-12-27 Exposing method for electron beam

Country Status (1)

Country Link
JP (1) JPS5588329A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1293532C (zh) * 2003-02-28 2007-01-03 夏普株式会社 显示装置及其驱动方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1293532C (zh) * 2003-02-28 2007-01-03 夏普株式会社 显示装置及其驱动方法

Also Published As

Publication number Publication date
JPS5588329A (en) 1980-07-04

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