JPS6138547A - 試料分解装置及びそれを用いた試料分解方法 - Google Patents

試料分解装置及びそれを用いた試料分解方法

Info

Publication number
JPS6138547A
JPS6138547A JP15904284A JP15904284A JPS6138547A JP S6138547 A JPS6138547 A JP S6138547A JP 15904284 A JP15904284 A JP 15904284A JP 15904284 A JP15904284 A JP 15904284A JP S6138547 A JPS6138547 A JP S6138547A
Authority
JP
Japan
Prior art keywords
sample
acid
vessel
container
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15904284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530209B2 (cs
Inventor
Hideki Matsunaga
秀樹 松永
Naoyuki Hirate
平手　直之
Akira Okada
章 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15904284A priority Critical patent/JPS6138547A/ja
Publication of JPS6138547A publication Critical patent/JPS6138547A/ja
Publication of JPH0530209B2 publication Critical patent/JPH0530209B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP15904284A 1984-07-31 1984-07-31 試料分解装置及びそれを用いた試料分解方法 Granted JPS6138547A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15904284A JPS6138547A (ja) 1984-07-31 1984-07-31 試料分解装置及びそれを用いた試料分解方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15904284A JPS6138547A (ja) 1984-07-31 1984-07-31 試料分解装置及びそれを用いた試料分解方法

Publications (2)

Publication Number Publication Date
JPS6138547A true JPS6138547A (ja) 1986-02-24
JPH0530209B2 JPH0530209B2 (cs) 1993-05-07

Family

ID=15684959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15904284A Granted JPS6138547A (ja) 1984-07-31 1984-07-31 試料分解装置及びそれを用いた試料分解方法

Country Status (1)

Country Link
JP (1) JPS6138547A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6439782B2 (ja) * 2016-12-27 2018-12-19 株式会社Sumco 石英試料の分解方法、石英試料の金属汚染分析方法および石英部材の製造方法

Also Published As

Publication number Publication date
JPH0530209B2 (cs) 1993-05-07

Similar Documents

Publication Publication Date Title
Birck et al. Re‐Os isotopic measurements at the femtomole level in natural samples
US4584886A (en) Resolution device for semiconductor thin films
Chakrabarti et al. Direct determination of traces of copper, zinc, lead, cobalt, iron and cadmium in bovine liver by graphite furnace atomic absorption spectrometry using the solid sampling and the platform techniques
US5877027A (en) Method for the analysis of impurity contents in silicon dioxide
JP3051023B2 (ja) 珪素質分析試料中の不純物高精度分析のための処理方法及びその装置
Fricke et al. Determination of Germanium, Arsenic, Tin, Selenium, and Antimony by Plasma Emission Spectrometry with Hydride Generation and Chromatographic Separation
JPS6138547A (ja) 試料分解装置及びそれを用いた試料分解方法
Dittrich et al. Molecule formation in electrothermal atomizers: Interferences and analytical possibilities by absorption, emission and fluorescence processes
JP2002368052A (ja) 珪素脱離方法及びシリコンウェーハの不純物分析方法
Takeda et al. Determination of ultra-trace impurities in semiconductor-grade water and chemicals by inductively coupled plasma mass spectrometry following a concentration step by boiling with mannitol
Hub et al. Application of ETV-ICPMS in semiconductor process control
Miron et al. Intravalence and extravalence excitations of the ethylene molecule in liquid and solid rare gas matrices
JP3753805B2 (ja) 半導体試料の分解装置および試料分解方法
JPH0357422B2 (cs)
Sahayam et al. Determination of ultra-trace impurities in high purity gallium arsenide by inductively coupled plasma mass spectrometry after volatilization of matrix
JP3477216B2 (ja) シリコンウェハ表面の超微量金属分析におけるエッチング方法
JPS61144545A (ja) 薄膜薄板溶解装置
JPH06160256A (ja) 試料分解方法及びその装置
Vandecasteele et al. Analysis of high-purity quartz sand by inductively coupled plasma mass spectrometry
JPH0525068B2 (cs)
Smith et al. Infrared study of oxygen adsorption on impure zinc oxide
Malyshev et al. Determination of impurity arsenic in high-purity sulfur by electrothermal atomic-absorption spectrometry with the use of solvent extraction
JPH07333116A (ja) 試料分解装置及び試料分解方法
Judelevich et al. Layer-by-layer and film analysis of semiconductor materials by atomic absorption with electrothermal atomization
Hood et al. Determination of arsenic, selenium, and antimony using metastable transfer emission spectrometry

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term