JPS6138448B2 - - Google Patents

Info

Publication number
JPS6138448B2
JPS6138448B2 JP11509879A JP11509879A JPS6138448B2 JP S6138448 B2 JPS6138448 B2 JP S6138448B2 JP 11509879 A JP11509879 A JP 11509879A JP 11509879 A JP11509879 A JP 11509879A JP S6138448 B2 JPS6138448 B2 JP S6138448B2
Authority
JP
Japan
Prior art keywords
photomask
pattern
reticle
inspection
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11509879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5639516A (en
Inventor
Takao Furukawa
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11509879A priority Critical patent/JPS5639516A/ja
Publication of JPS5639516A publication Critical patent/JPS5639516A/ja
Publication of JPS6138448B2 publication Critical patent/JPS6138448B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11509879A 1979-09-10 1979-09-10 Comparative inspecting mechanism of photomask Granted JPS5639516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11509879A JPS5639516A (en) 1979-09-10 1979-09-10 Comparative inspecting mechanism of photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11509879A JPS5639516A (en) 1979-09-10 1979-09-10 Comparative inspecting mechanism of photomask

Publications (2)

Publication Number Publication Date
JPS5639516A JPS5639516A (en) 1981-04-15
JPS6138448B2 true JPS6138448B2 (enrdf_load_stackoverflow) 1986-08-29

Family

ID=14654153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11509879A Granted JPS5639516A (en) 1979-09-10 1979-09-10 Comparative inspecting mechanism of photomask

Country Status (1)

Country Link
JP (1) JPS5639516A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01263435A (ja) * 1988-04-13 1989-10-19 Harman Co Ltd 風呂用給湯装置の施設工法
JPH0579353U (ja) * 1992-03-23 1993-10-29 日本ユプロ株式会社 風呂アダプタへの配管接続構造

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212404A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Comparison type inspector
JPS58168228A (ja) * 1982-08-24 1983-10-04 Fujitsu Ltd フオトマスクの比較検査方法と装置
JP2015014756A (ja) * 2013-07-08 2015-01-22 株式会社東芝 マスク歪計測装置および方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01263435A (ja) * 1988-04-13 1989-10-19 Harman Co Ltd 風呂用給湯装置の施設工法
JPH0579353U (ja) * 1992-03-23 1993-10-29 日本ユプロ株式会社 風呂アダプタへの配管接続構造

Also Published As

Publication number Publication date
JPS5639516A (en) 1981-04-15

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