JPS6137825A - 新規なレジスト用材料 - Google Patents

新規なレジスト用材料

Info

Publication number
JPS6137825A
JPS6137825A JP15862484A JP15862484A JPS6137825A JP S6137825 A JPS6137825 A JP S6137825A JP 15862484 A JP15862484 A JP 15862484A JP 15862484 A JP15862484 A JP 15862484A JP S6137825 A JPS6137825 A JP S6137825A
Authority
JP
Japan
Prior art keywords
resist material
formula
polymer
solvent
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15862484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548907B2 (enrdf_load_stackoverflow
Inventor
Shozo Tsuchiya
土屋　昇三
Nobuo Aoki
信雄 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Oil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Oil Corp filed Critical Nippon Oil Corp
Priority to JP15862484A priority Critical patent/JPS6137825A/ja
Priority to EP19850103038 priority patent/EP0157262B1/en
Priority to DE8585103038T priority patent/DE3563273D1/de
Publication of JPS6137825A publication Critical patent/JPS6137825A/ja
Priority to US06/852,198 priority patent/US4751168A/en
Publication of JPH0548907B2 publication Critical patent/JPH0548907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
JP15862484A 1984-03-19 1984-07-31 新規なレジスト用材料 Granted JPS6137825A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP15862484A JPS6137825A (ja) 1984-07-31 1984-07-31 新規なレジスト用材料
EP19850103038 EP0157262B1 (en) 1984-03-19 1985-03-15 Novel electron beam resist materials
DE8585103038T DE3563273D1 (en) 1984-03-19 1985-03-15 Novel electron beam resist materials
US06/852,198 US4751168A (en) 1984-03-19 1986-04-15 Novel electron beam resist materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15862484A JPS6137825A (ja) 1984-07-31 1984-07-31 新規なレジスト用材料

Publications (2)

Publication Number Publication Date
JPS6137825A true JPS6137825A (ja) 1986-02-22
JPH0548907B2 JPH0548907B2 (enrdf_load_stackoverflow) 1993-07-22

Family

ID=15675773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15862484A Granted JPS6137825A (ja) 1984-03-19 1984-07-31 新規なレジスト用材料

Country Status (1)

Country Link
JP (1) JPS6137825A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006342075A (ja) * 2005-06-07 2006-12-21 Asahi Glass Co Ltd 含フッ素ノルボルネニルエステル化合物、およびその重合体
JP2008308691A (ja) * 2001-07-12 2008-12-25 Daikin Ind Ltd 含フッ素ノルボルネン誘導体単位を有する含フッ素重合体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008308691A (ja) * 2001-07-12 2008-12-25 Daikin Ind Ltd 含フッ素ノルボルネン誘導体単位を有する含フッ素重合体
JP2006342075A (ja) * 2005-06-07 2006-12-21 Asahi Glass Co Ltd 含フッ素ノルボルネニルエステル化合物、およびその重合体

Also Published As

Publication number Publication date
JPH0548907B2 (enrdf_load_stackoverflow) 1993-07-22

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