JPS6137474B2 - - Google Patents
Info
- Publication number
- JPS6137474B2 JPS6137474B2 JP13395176A JP13395176A JPS6137474B2 JP S6137474 B2 JPS6137474 B2 JP S6137474B2 JP 13395176 A JP13395176 A JP 13395176A JP 13395176 A JP13395176 A JP 13395176A JP S6137474 B2 JPS6137474 B2 JP S6137474B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- grooves
- rotating disk
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000005086 pumping Methods 0.000 description 32
- 230000006835 compression Effects 0.000 description 27
- 238000007906 compression Methods 0.000 description 27
- 230000006872 improvement Effects 0.000 description 17
- 239000003921 oil Substances 0.000 description 17
- 239000000498 cooling water Substances 0.000 description 10
- 230000009471 action Effects 0.000 description 9
- 239000011553 magnetic fluid Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 8
- 230000020169 heat generation Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13395176A JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13395176A JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5358810A JPS5358810A (en) | 1978-05-27 |
| JPS6137474B2 true JPS6137474B2 (enrdf_load_stackoverflow) | 1986-08-23 |
Family
ID=15116876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13395176A Granted JPS5358810A (en) | 1976-11-08 | 1976-11-08 | High vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5358810A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6238897A (ja) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | ねじ溝式真空ポンプ |
| JPS6238899A (ja) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | ねじ溝式真空ポンプ |
| JPH0778399B2 (ja) * | 1985-08-14 | 1995-08-23 | 株式会社大阪真空機器製作所 | ねじ溝式真空ポンプ |
| JPH0617036Y2 (ja) * | 1988-02-17 | 1994-05-02 | 株式会社島津製作所 | ターボ分子ポンプ |
-
1976
- 1976-11-08 JP JP13395176A patent/JPS5358810A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5358810A (en) | 1978-05-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4519755A (en) | Gerotor vacuum pump | |
| US5855473A (en) | High displacement rate,scroll-type, fluid handling apparatus | |
| KR101227033B1 (ko) | 다단식 드라이 펌프 | |
| EP0256234B1 (en) | Vacuum generating system | |
| TWI564484B (zh) | Pump | |
| US4090815A (en) | High vacuum pump | |
| MXPA01004909A (es) | Aparato de transferencia de energia de fluido. | |
| JPH08512379A (ja) | ロータリースクリューコンプレッサ | |
| JPH0133677B2 (enrdf_load_stackoverflow) | ||
| JP2010270765A (ja) | 偏心型ポンプ | |
| JPS6137474B2 (enrdf_load_stackoverflow) | ||
| JPH10184576A (ja) | 真空排気システム | |
| JP2000073976A (ja) | 真空ポンプの改良 | |
| WO2004083643A1 (en) | Positive-displacement vacuum pump | |
| CN101371044A (zh) | 真空泵 | |
| JPH11294358A (ja) | 複軸真空ポンプ | |
| USRE33129E (en) | Vacuum pump | |
| JPH0312236B2 (enrdf_load_stackoverflow) | ||
| JPS6332997B2 (enrdf_load_stackoverflow) | ||
| JP2007263122A (ja) | 真空排気装置 | |
| JP3203919B2 (ja) | スクロール圧縮機 | |
| US592237A (en) | Friedricii gloss | |
| GB190511378A (en) | Improvements in Rotary Pumps and Motors. | |
| US6672828B2 (en) | Vacuum pump | |
| JP3270257B2 (ja) | ルーツ式真空ポンプ |