JPS6136703B2 - - Google Patents
Info
- Publication number
- JPS6136703B2 JPS6136703B2 JP3111180A JP3111180A JPS6136703B2 JP S6136703 B2 JPS6136703 B2 JP S6136703B2 JP 3111180 A JP3111180 A JP 3111180A JP 3111180 A JP3111180 A JP 3111180A JP S6136703 B2 JPS6136703 B2 JP S6136703B2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- pellets
- microscope
- defective
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 89
- 230000002950 deficient Effects 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 9
- 238000011179 visual inspection Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3111180A JPS56126934A (en) | 1980-03-12 | 1980-03-12 | Appearance inspecting apparatus for semiconductor pellet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3111180A JPS56126934A (en) | 1980-03-12 | 1980-03-12 | Appearance inspecting apparatus for semiconductor pellet |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56126934A JPS56126934A (en) | 1981-10-05 |
JPS6136703B2 true JPS6136703B2 (xx) | 1986-08-20 |
Family
ID=12322281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3111180A Granted JPS56126934A (en) | 1980-03-12 | 1980-03-12 | Appearance inspecting apparatus for semiconductor pellet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56126934A (xx) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114130693A (zh) * | 2021-11-26 | 2022-03-04 | 远通五金塑胶制品(深圳)有限公司 | 一种自动喷码检测机 |
-
1980
- 1980-03-12 JP JP3111180A patent/JPS56126934A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56126934A (en) | 1981-10-05 |
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