JPS6136700B2 - - Google Patents

Info

Publication number
JPS6136700B2
JPS6136700B2 JP13715479A JP13715479A JPS6136700B2 JP S6136700 B2 JPS6136700 B2 JP S6136700B2 JP 13715479 A JP13715479 A JP 13715479A JP 13715479 A JP13715479 A JP 13715479A JP S6136700 B2 JPS6136700 B2 JP S6136700B2
Authority
JP
Japan
Prior art keywords
turntable
workpiece support
balance weight
workpiece
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13715479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5660596A (en
Inventor
Seiji Imanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13715479A priority Critical patent/JPS5660596A/ja
Publication of JPS5660596A publication Critical patent/JPS5660596A/ja
Publication of JPS6136700B2 publication Critical patent/JPS6136700B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP13715479A 1979-10-23 1979-10-23 Centrifugal hydroextractor Granted JPS5660596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13715479A JPS5660596A (en) 1979-10-23 1979-10-23 Centrifugal hydroextractor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13715479A JPS5660596A (en) 1979-10-23 1979-10-23 Centrifugal hydroextractor

Publications (2)

Publication Number Publication Date
JPS5660596A JPS5660596A (en) 1981-05-25
JPS6136700B2 true JPS6136700B2 (enrdf_load_stackoverflow) 1986-08-20

Family

ID=15192077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13715479A Granted JPS5660596A (en) 1979-10-23 1979-10-23 Centrifugal hydroextractor

Country Status (1)

Country Link
JP (1) JPS5660596A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58135644A (ja) * 1982-01-14 1983-08-12 Seiko Epson Corp ウエツト処理装置
JPH0452993Y2 (enrdf_load_stackoverflow) * 1984-10-30 1992-12-14

Also Published As

Publication number Publication date
JPS5660596A (en) 1981-05-25

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