JPS6136382B2 - - Google Patents

Info

Publication number
JPS6136382B2
JPS6136382B2 JP53138676A JP13867678A JPS6136382B2 JP S6136382 B2 JPS6136382 B2 JP S6136382B2 JP 53138676 A JP53138676 A JP 53138676A JP 13867678 A JP13867678 A JP 13867678A JP S6136382 B2 JPS6136382 B2 JP S6136382B2
Authority
JP
Japan
Prior art keywords
layer
wiring
opening
contact
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53138676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5565446A (en
Inventor
Katsu Sanada
Shigehisa Wakamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP13867678A priority Critical patent/JPS5565446A/ja
Publication of JPS5565446A publication Critical patent/JPS5565446A/ja
Publication of JPS6136382B2 publication Critical patent/JPS6136382B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13867678A 1978-11-10 1978-11-10 Semiconductor device Granted JPS5565446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13867678A JPS5565446A (en) 1978-11-10 1978-11-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13867678A JPS5565446A (en) 1978-11-10 1978-11-10 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5565446A JPS5565446A (en) 1980-05-16
JPS6136382B2 true JPS6136382B2 (enExample) 1986-08-18

Family

ID=15227497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13867678A Granted JPS5565446A (en) 1978-11-10 1978-11-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5565446A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0422188U (enExample) * 1990-06-08 1992-02-24
JPH0498381U (enExample) * 1991-01-17 1992-08-25

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900005354B1 (ko) * 1987-12-31 1990-07-27 삼성전자 주식회사 Hct 반도체 장치의 제조방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53103383A (en) * 1977-02-22 1978-09-08 Toshiba Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0422188U (enExample) * 1990-06-08 1992-02-24
JPH0498381U (enExample) * 1991-01-17 1992-08-25

Also Published As

Publication number Publication date
JPS5565446A (en) 1980-05-16

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