JPS6136382B2 - - Google Patents
Info
- Publication number
- JPS6136382B2 JPS6136382B2 JP53138676A JP13867678A JPS6136382B2 JP S6136382 B2 JPS6136382 B2 JP S6136382B2 JP 53138676 A JP53138676 A JP 53138676A JP 13867678 A JP13867678 A JP 13867678A JP S6136382 B2 JPS6136382 B2 JP S6136382B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- opening
- contact
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 46
- 238000009792 diffusion process Methods 0.000 description 15
- 230000006866 deterioration Effects 0.000 description 7
- 230000006378 damage Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13867678A JPS5565446A (en) | 1978-11-10 | 1978-11-10 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13867678A JPS5565446A (en) | 1978-11-10 | 1978-11-10 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5565446A JPS5565446A (en) | 1980-05-16 |
| JPS6136382B2 true JPS6136382B2 (US20100268047A1-20101021-C00003.png) | 1986-08-18 |
Family
ID=15227497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13867678A Granted JPS5565446A (en) | 1978-11-10 | 1978-11-10 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5565446A (US20100268047A1-20101021-C00003.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0422188U (US20100268047A1-20101021-C00003.png) * | 1990-06-08 | 1992-02-24 | ||
| JPH0498381U (US20100268047A1-20101021-C00003.png) * | 1991-01-17 | 1992-08-25 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR900005354B1 (ko) * | 1987-12-31 | 1990-07-27 | 삼성전자 주식회사 | Hct 반도체 장치의 제조방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103383A (en) * | 1977-02-22 | 1978-09-08 | Toshiba Corp | Semiconductor device |
-
1978
- 1978-11-10 JP JP13867678A patent/JPS5565446A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53103383A (en) * | 1977-02-22 | 1978-09-08 | Toshiba Corp | Semiconductor device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0422188U (US20100268047A1-20101021-C00003.png) * | 1990-06-08 | 1992-02-24 | ||
| JPH0498381U (US20100268047A1-20101021-C00003.png) * | 1991-01-17 | 1992-08-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5565446A (en) | 1980-05-16 |
