JPS6136377B2 - - Google Patents
Info
- Publication number
- JPS6136377B2 JPS6136377B2 JP52099493A JP9949377A JPS6136377B2 JP S6136377 B2 JPS6136377 B2 JP S6136377B2 JP 52099493 A JP52099493 A JP 52099493A JP 9949377 A JP9949377 A JP 9949377A JP S6136377 B2 JPS6136377 B2 JP S6136377B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrazine
- etching solution
- concentration
- platinum electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5433673A JPS5433673A (en) | 1979-03-12 |
| JPS6136377B2 true JPS6136377B2 (enExample) | 1986-08-18 |
Family
ID=14248814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9949377A Granted JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5433673A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10793806B2 (en) | 2010-09-24 | 2020-10-06 | Ecolab Usa Inc. | Conveyor lubricants including emulsions and methods employing them |
| US10815448B2 (en) | 2005-03-15 | 2020-10-27 | Ecolab Usa Inc. | Lubricant for conveying containers |
| US10844314B2 (en) | 2013-03-11 | 2020-11-24 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
| US10851325B2 (en) | 2005-03-15 | 2020-12-01 | Ecolab Usa Inc. | Dry lubricant for conveying containers |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0451474Y2 (enExample) * | 1986-05-15 | 1992-12-03 |
-
1977
- 1977-08-22 JP JP9949377A patent/JPS5433673A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10815448B2 (en) | 2005-03-15 | 2020-10-27 | Ecolab Usa Inc. | Lubricant for conveying containers |
| US10851325B2 (en) | 2005-03-15 | 2020-12-01 | Ecolab Usa Inc. | Dry lubricant for conveying containers |
| US10793806B2 (en) | 2010-09-24 | 2020-10-06 | Ecolab Usa Inc. | Conveyor lubricants including emulsions and methods employing them |
| US10844314B2 (en) | 2013-03-11 | 2020-11-24 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
| US11312919B2 (en) | 2013-03-11 | 2022-04-26 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5433673A (en) | 1979-03-12 |
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