JPS5433673A - Automatic etching unit for semiconductor composite - Google Patents
Automatic etching unit for semiconductor compositeInfo
- Publication number
- JPS5433673A JPS5433673A JP9949377A JP9949377A JPS5433673A JP S5433673 A JPS5433673 A JP S5433673A JP 9949377 A JP9949377 A JP 9949377A JP 9949377 A JP9949377 A JP 9949377A JP S5433673 A JPS5433673 A JP S5433673A
- Authority
- JP
- Japan
- Prior art keywords
- etching unit
- semiconductor composite
- automatic etching
- hydrazine
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5433673A true JPS5433673A (en) | 1979-03-12 |
JPS6136377B2 JPS6136377B2 (ja) | 1986-08-18 |
Family
ID=14248814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9949377A Granted JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5433673A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62184737U (ja) * | 1986-05-15 | 1987-11-24 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7741257B2 (en) | 2005-03-15 | 2010-06-22 | Ecolab Inc. | Dry lubricant for conveying containers |
US7745381B2 (en) | 2005-03-15 | 2010-06-29 | Ecolab Inc. | Lubricant for conveying containers |
ES2776135T3 (es) | 2010-09-24 | 2020-07-29 | Ecolab Usa Inc | Método para lubricar un transportador |
BR112015022512B1 (pt) | 2013-03-11 | 2022-09-13 | Ecolab Usa Inc | Métodos para lubrificar uma placa de transferência estacionária |
-
1977
- 1977-08-22 JP JP9949377A patent/JPS5433673A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62184737U (ja) * | 1986-05-15 | 1987-11-24 | ||
JPH0451474Y2 (ja) * | 1986-05-15 | 1992-12-03 |
Also Published As
Publication number | Publication date |
---|---|
JPS6136377B2 (ja) | 1986-08-18 |
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