JPS6136180A - セラミックスの加工方法 - Google Patents
セラミックスの加工方法Info
- Publication number
- JPS6136180A JPS6136180A JP15560184A JP15560184A JPS6136180A JP S6136180 A JPS6136180 A JP S6136180A JP 15560184 A JP15560184 A JP 15560184A JP 15560184 A JP15560184 A JP 15560184A JP S6136180 A JPS6136180 A JP S6136180A
- Authority
- JP
- Japan
- Prior art keywords
- molded body
- ceramic molded
- heating
- conductive
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 96
- 238000010438 heat treatment Methods 0.000 claims description 54
- 230000006698 induction Effects 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 238000004381 surface treatment Methods 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 description 10
- 238000005304 joining Methods 0.000 description 8
- 230000005611 electricity Effects 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000000280 densification Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000003763 carbonization Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000501667 Etroplus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 238000004814 ceramic processing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560184A JPS6136180A (ja) | 1984-07-27 | 1984-07-27 | セラミックスの加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15560184A JPS6136180A (ja) | 1984-07-27 | 1984-07-27 | セラミックスの加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6136180A true JPS6136180A (ja) | 1986-02-20 |
| JPH0454633B2 JPH0454633B2 (enrdf_load_html_response) | 1992-08-31 |
Family
ID=15609586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15560184A Granted JPS6136180A (ja) | 1984-07-27 | 1984-07-27 | セラミックスの加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6136180A (enrdf_load_html_response) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307172A (ja) * | 1987-06-05 | 1988-12-14 | Daihen Corp | セラミックスの電気接合方法 |
| JPH01226775A (ja) * | 1988-03-04 | 1989-09-11 | Daihen Corp | セラミックスの電気接合方法および接合用発熱部材 |
| WO1992006054A1 (en) * | 1990-10-03 | 1992-04-16 | Daihen Corporation | Method of electrically joining objects to be joined including ceramics |
| WO1995012557A1 (de) * | 1993-11-02 | 1995-05-11 | Roland Emmrich | Verfahren zur herstellung eines verbundkörpers, der die erzeugung geometrisch sehr genau abgegrenzter elektrischer felder erlaubt, und verbundkörper |
| US5534091A (en) * | 1991-02-26 | 1996-07-09 | Daihen Corporation | Joining method of ceramics and insertion member for heating and joining for use in the method |
| JP2006086013A (ja) * | 2004-09-16 | 2006-03-30 | Riken Corp | 二珪化モリブデン系セラミックス発熱体及びその製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5232008A (en) * | 1975-09-04 | 1977-03-10 | Kagaku Gijutsucho Mukizai | Manufacture of welded article of lanthanum boronide with graphite |
| JPS534734A (en) * | 1976-07-05 | 1978-01-17 | Denki Kagaku Kogyo Kk | Joint method of conductive ceramic and metal having high melting point |
| JPS54141351A (en) * | 1978-04-27 | 1979-11-02 | Maruchi Giken Kk | Butt welding |
-
1984
- 1984-07-27 JP JP15560184A patent/JPS6136180A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5232008A (en) * | 1975-09-04 | 1977-03-10 | Kagaku Gijutsucho Mukizai | Manufacture of welded article of lanthanum boronide with graphite |
| JPS534734A (en) * | 1976-07-05 | 1978-01-17 | Denki Kagaku Kogyo Kk | Joint method of conductive ceramic and metal having high melting point |
| JPS54141351A (en) * | 1978-04-27 | 1979-11-02 | Maruchi Giken Kk | Butt welding |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307172A (ja) * | 1987-06-05 | 1988-12-14 | Daihen Corp | セラミックスの電気接合方法 |
| JPH01226775A (ja) * | 1988-03-04 | 1989-09-11 | Daihen Corp | セラミックスの電気接合方法および接合用発熱部材 |
| WO1992006054A1 (en) * | 1990-10-03 | 1992-04-16 | Daihen Corporation | Method of electrically joining objects to be joined including ceramics |
| US5294769A (en) * | 1990-10-03 | 1994-03-15 | Daihen Corporation | Electric joining method of material including ceramics |
| US5534091A (en) * | 1991-02-26 | 1996-07-09 | Daihen Corporation | Joining method of ceramics and insertion member for heating and joining for use in the method |
| WO1995012557A1 (de) * | 1993-11-02 | 1995-05-11 | Roland Emmrich | Verfahren zur herstellung eines verbundkörpers, der die erzeugung geometrisch sehr genau abgegrenzter elektrischer felder erlaubt, und verbundkörper |
| JP2006086013A (ja) * | 2004-09-16 | 2006-03-30 | Riken Corp | 二珪化モリブデン系セラミックス発熱体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0454633B2 (enrdf_load_html_response) | 1992-08-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2002160974A (ja) | 窒化アルミニウム焼結体、窒化アルミニウム焼結体の製造方法、セラミック基板およびセラミック基板の製造方法 | |
| KR100368627B1 (ko) | 반도체 지지 장치 및 그 제조 방법과, 접합체 및 그 제조 방법 | |
| JPS6136180A (ja) | セラミックスの加工方法 | |
| JPS599887A (ja) | セラミツク発熱体 | |
| EP0806488A1 (en) | Aluminum-chromium alloy, method for its production and its applications | |
| JP2000277592A (ja) | 基板保持装置 | |
| JPH01273691A (ja) | Ｎｉ―Ｚｒハンダ箔 | |
| JP4023944B2 (ja) | 窒化アルミニウム焼結体の製造方法並びにプレートヒーター又は静電チャック | |
| CN102065647A (zh) | 厚膜陶瓷复合基板的制造方法 | |
| CN103342584B (zh) | 一种超声波辅助陶瓷表面局部金属化的方法 | |
| JPH09172057A (ja) | 静電チャック | |
| JPH0424312B2 (enrdf_load_html_response) | ||
| JP2002016005A (ja) | 半導体製造装置用電極端子接合セラミックス部材及びその製造方法 | |
| JPS6215512B2 (enrdf_load_html_response) | ||
| RU2219145C1 (ru) | Способ металлизации керамики под пайку | |
| JPH059396B2 (enrdf_load_html_response) | ||
| JPH059395B2 (enrdf_load_html_response) | ||
| JPS61291481A (ja) | セラミツクスの処理方法 | |
| JPS6337587A (ja) | セラミツクヒ−タ | |
| CN119526839A (zh) | 在陶瓷的相对表面覆有异种金属或合金的复合结构 | |
| JP2004351491A (ja) | タングステンの接合方法およびこれを用いたセラミックヒータ | |
| JP2005019067A (ja) | 窒化アルミニウムのセラミックスヒータ | |
| CN119528598A (zh) | 用于对陶瓷基板表面进行金属化加工的方法 | |
| JPS5946728B2 (ja) | 放電加工による炭化珪素焼結体の加工方法 | |
| JPS63318759A (ja) | セラミックス回路基板 |