JPS6135560Y2 - - Google Patents
Info
- Publication number
- JPS6135560Y2 JPS6135560Y2 JP12920182U JP12920182U JPS6135560Y2 JP S6135560 Y2 JPS6135560 Y2 JP S6135560Y2 JP 12920182 U JP12920182 U JP 12920182U JP 12920182 U JP12920182 U JP 12920182U JP S6135560 Y2 JPS6135560 Y2 JP S6135560Y2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- guide hole
- pair
- root
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12920182U JPS5937363U (ja) | 1982-08-28 | 1982-08-28 | サブストレ−トの導入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12920182U JPS5937363U (ja) | 1982-08-28 | 1982-08-28 | サブストレ−トの導入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5937363U JPS5937363U (ja) | 1984-03-09 |
| JPS6135560Y2 true JPS6135560Y2 (enrdf_load_stackoverflow) | 1986-10-16 |
Family
ID=30292823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12920182U Granted JPS5937363U (ja) | 1982-08-28 | 1982-08-28 | サブストレ−トの導入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5937363U (enrdf_load_stackoverflow) |
-
1982
- 1982-08-28 JP JP12920182U patent/JPS5937363U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5937363U (ja) | 1984-03-09 |
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