JPS5937363U - サブストレ−トの導入装置 - Google Patents

サブストレ−トの導入装置

Info

Publication number
JPS5937363U
JPS5937363U JP12920182U JP12920182U JPS5937363U JP S5937363 U JPS5937363 U JP S5937363U JP 12920182 U JP12920182 U JP 12920182U JP 12920182 U JP12920182 U JP 12920182U JP S5937363 U JPS5937363 U JP S5937363U
Authority
JP
Japan
Prior art keywords
guide hole
support frame
substrate
forth
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12920182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135560Y2 (enrdf_load_stackoverflow
Inventor
市原　藤三郎
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP12920182U priority Critical patent/JPS5937363U/ja
Publication of JPS5937363U publication Critical patent/JPS5937363U/ja
Application granted granted Critical
Publication of JPS6135560Y2 publication Critical patent/JPS6135560Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12920182U 1982-08-28 1982-08-28 サブストレ−トの導入装置 Granted JPS5937363U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12920182U JPS5937363U (ja) 1982-08-28 1982-08-28 サブストレ−トの導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12920182U JPS5937363U (ja) 1982-08-28 1982-08-28 サブストレ−トの導入装置

Publications (2)

Publication Number Publication Date
JPS5937363U true JPS5937363U (ja) 1984-03-09
JPS6135560Y2 JPS6135560Y2 (enrdf_load_stackoverflow) 1986-10-16

Family

ID=30292823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12920182U Granted JPS5937363U (ja) 1982-08-28 1982-08-28 サブストレ−トの導入装置

Country Status (1)

Country Link
JP (1) JPS5937363U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6135560Y2 (enrdf_load_stackoverflow) 1986-10-16

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