JPS6134670B2 - - Google Patents

Info

Publication number
JPS6134670B2
JPS6134670B2 JP13141879A JP13141879A JPS6134670B2 JP S6134670 B2 JPS6134670 B2 JP S6134670B2 JP 13141879 A JP13141879 A JP 13141879A JP 13141879 A JP13141879 A JP 13141879A JP S6134670 B2 JPS6134670 B2 JP S6134670B2
Authority
JP
Japan
Prior art keywords
glass substrate
photomask
quartz glass
mask
ultraviolet rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13141879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5655947A (en
Inventor
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13141879A priority Critical patent/JPS5655947A/ja
Publication of JPS5655947A publication Critical patent/JPS5655947A/ja
Publication of JPS6134670B2 publication Critical patent/JPS6134670B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging
    • G03F1/78—Patterning of masks by imaging by charged particle beam [CPB], e.g. electron beam patterning of masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Surface Treatment Of Glass (AREA)
JP13141879A 1979-10-12 1979-10-12 Photomask for far ultraviolet rays Granted JPS5655947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13141879A JPS5655947A (en) 1979-10-12 1979-10-12 Photomask for far ultraviolet rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13141879A JPS5655947A (en) 1979-10-12 1979-10-12 Photomask for far ultraviolet rays

Publications (2)

Publication Number Publication Date
JPS5655947A JPS5655947A (en) 1981-05-16
JPS6134670B2 true JPS6134670B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-08-08

Family

ID=15057493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13141879A Granted JPS5655947A (en) 1979-10-12 1979-10-12 Photomask for far ultraviolet rays

Country Status (1)

Country Link
JP (1) JPS5655947A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10394114B2 (en) * 2016-08-25 2019-08-27 Taiwan Semiconductor Manufacturing Co., Ltd. Chromeless phase shift mask structure and process

Also Published As

Publication number Publication date
JPS5655947A (en) 1981-05-16

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