JPS6133851A - Multi-face symultaneous machining device - Google Patents

Multi-face symultaneous machining device

Info

Publication number
JPS6133851A
JPS6133851A JP15539984A JP15539984A JPS6133851A JP S6133851 A JPS6133851 A JP S6133851A JP 15539984 A JP15539984 A JP 15539984A JP 15539984 A JP15539984 A JP 15539984A JP S6133851 A JPS6133851 A JP S6133851A
Authority
JP
Japan
Prior art keywords
workpiece
glass plate
polishing
roller
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15539984A
Other languages
Japanese (ja)
Inventor
Toru Imanari
徹 今成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15539984A priority Critical patent/JPS6133851A/en
Publication of JPS6133851A publication Critical patent/JPS6133851A/en
Pending legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To attempt both high efficiency and high precision of work with feasibility of simultaneous machining on both plane surfaces and side surface of a workpiece, by employing a pair of rollers arranged at an interval narrower than the diameter of the workpiece to machine the side surface thereof and a pair of rotary discs for machining parallel plane surfaces thereof in a direction suitable for pushing the workpiece toward said rollers. CONSTITUTION:When rotary discs 7, 8 are turned in directions (a) and (b) respectively, a glass plate 1 moves in C direction along a vertical bisector L due to the frictional force given from polishing cloth 11, 12 and reaches a position where it touches rollers 2, 3 and a supporting blade 13. Therefore, if the rollers 2, 3 are turned in directions (d) and (e) respectively, the glass plate 1 makes self-rotation in (f) direction. Hereat, the frictional force between the glass plate 1 and roller 3 is larger than that between the same plate 1 and roller 2, consequently the glass plate 1 makes no slip against the roller 3. Therefore, slipping takes place between polishing cloth 6 and the side surface of the glass plate 1 by setting the numbers of revolution of roller 2 and 3 respectively. Thus, polishing of the side surface can be carried out with high efficiency and high precision simultaneously with polishing of parallel planes with polishing cloth 11, and 12 by suppling polishing agent.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は多面同時加工装置に関し、特に1対の平行平面
を有する被加工体の平面と側面とを高能率に同時加工す
る多面同時加工装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a multi-surface simultaneous processing device, and more particularly to a multi-surface simultaneous processing device that simultaneously processes the flat surface and side surface of a workpiece having a pair of parallel planes with high efficiency.

〔従来技術〕[Prior art]

光学装置においては、1対の平行平面を有する、いわゆ
る平行平面ガラスがしばしば利用される。
In optical devices, so-called plane-parallel glasses, which have a pair of parallel planes, are often used.

この機力平行平面ガラスは、その使用目的からみて平行
平面のみを光学面に形成すれば十分であシ、側面を光学
面に形成する必要はない。しがし彦から、たとえば大出
力レーザー装置の光学部品として使用される場合等にお
いては、光学部品に歪やクラックがあると使用中に破損
することがある。
Considering the intended use of this mechanical parallel plane glass, it is sufficient to form only parallel planes as optical surfaces, and there is no need to form side surfaces as optical surfaces. From Shigashihiko, for example, when used as an optical component for a high-output laser device, if the optical component is distorted or cracked, it may break during use.

このため、レーザー装置等において使用される平行平面
ガラスは、その側面をも研摩加工することが必要である
For this reason, it is necessary to polish the side surfaces of parallel plane glass used in laser devices and the like.

従来は、この様な平行平面ガラスの側面研摩加工は平面
研摩加工とは別の工程で行々われていた。
Conventionally, such side surface polishing of parallel plane glass was performed in a separate process from plane polishing.

このため、複数の加工装置と複数の工程が必要であり加
工時間も長くカリ、コストアップの原因と力っていた。
For this reason, multiple processing devices and multiple processes are required, and the processing time is long, causing an increase in costs.

〔発明の目的〕[Purpose of the invention]

本発明は、以上の如き従来技術に鑑み、1対の平行平面
を有する被加工体の平面加工と側面加工とを同時に行彦
い得る多面同時加工装置を提供することを目的とする。
SUMMARY OF THE INVENTION In view of the above-mentioned prior art, it is an object of the present invention to provide a multi-face simultaneous processing device capable of simultaneously performing plane processing and side processing of a workpiece having a pair of parallel planes.

〔発明の要旨〕[Summary of the invention]

本発明によれば、以上の如き目的は、1対の平行平面を
有する被加工体の表面を加工するための装置において、
被加工体の直径よりも狭い間隔で1対の第1の駆動体が
配設されており、該駆動体は上記加工体のgA1面と当
接しつつ駆動回転せしめられ且つ少々くとも一方が被加
工体との当接部に該被加工体の側面を加工するための手
段を有しており、一方、上記被加工体の1対の平行平面
と摺接しつつ被加工体を上記1対の第1の駆動体に押付
ける方向に駆動回転せしめられる1対の第2の駆動体が
配設されており、該駆動体は上記被加工体との摺接部分
に被加工体の平行平面を加工するための加工手段を有す
ることを特徴とする、多面同時加工装置によυ達成され
る。
According to the present invention, the above objects are provided in an apparatus for processing the surface of a workpiece having a pair of parallel planes.
A pair of first driving bodies are arranged at an interval narrower than the diameter of the workpiece, and the driving bodies are driven and rotated while contacting the gA1 surface of the workpiece, and at least one of the first driving bodies is driven to rotate. A means for machining the side surface of the workpiece is provided at the contact portion with the workpiece, while the workpiece is brought into sliding contact with the pair of parallel planes of the workpiece. A pair of second driving bodies are arranged to be driven and rotated in the direction of pressing against the first driving body, and the driving bodies have a parallel plane of the workpiece in sliding contact with the workpiece. υ is achieved by a multi-face simultaneous processing device characterized by having a processing means for processing.

〔発明の実施例〕[Embodiments of the invention]

以下、図面を参照しつつ本発明の具体的実施例につき説
明する。
Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の多面同時加工装置の一実施例である多
面同時研摩加工装置の概略側面図(一部所面図)であシ
、第2図はその主要部の概略平面図である。図において
、1は被加工体である円形の平行平面ガラス板である。
Fig. 1 is a schematic side view (partial view) of a multi-surface simultaneous polishing device which is an embodiment of the multi-surface simultaneous processing device of the present invention, and Fig. 2 is a schematic plan view of the main parts thereof. . In the figure, 1 is a circular parallel plane glass plate which is a workpiece.

該ガラス板1は予め研摩加工しろを見込んだ寸法に形成
されている。
The glass plate 1 is previously formed to a size that allows for a polishing margin.

該ガラス板1の左右両側には第1の駆動体である1対の
ローラー2,3が配設されている。この一対のローラー
2,3はガラス板1の直径よりもやや狭い間隔に配設さ
れており、それぞれモークー4.5によって矢印方向に
駆動回転せしめられる様に力っている。一方のローラー
2の周囲にはガラス板1の側面を研摩加工するための手
段である研摩布6が取付けられている。また、他方のロ
ーラー3はガラス板1の側面を損傷せしめることの力い
様にガラス板1に当接している。該ローラー3としては
たとえば硬質イムから力るものが用いられる。
A pair of rollers 2 and 3, which are first driving bodies, are arranged on both the left and right sides of the glass plate 1. The pair of rollers 2 and 3 are arranged at a spacing slightly narrower than the diameter of the glass plate 1, and are each driven by a motor 4.5 to rotate in the direction of the arrow. A polishing cloth 6, which is a means for polishing the side surface of the glass plate 1, is attached around one roller 2. Further, the other roller 3 is in contact with the glass plate 1 in such a manner that it does not damage the side surface of the glass plate 1. As the roller 3, for example, one using a hard roller is used.

ガラス板1の上下両側には第2の駆動体である1対の回
転板7,8が配設されている。この1対の回転板7,8
はそれぞれの外周部の一部が互いに平行が状態にて対向
する様に配置されており、それぞれモーター9.10に
よって矢印方向に駆動回転せしめられる様に々つている
。回転板7゜8の外周部にはそれらが対向してガラス板
1に対面する部分に対応する適裏の幅に輪帯状に、ガラ
ス板1を研摩加工するための手段である研摩布11.1
2が取付けられている。また、ガラス板1の側面に対向
する位置に該ガラス板1の位置決め用支持刃13が配設
されている。該支持刃13としてはたとえば硬質ゴムか
らなるものを用いることができる。尚、14は研摩側供
給手段である。
A pair of rotating plates 7 and 8, which are second driving bodies, are arranged on both upper and lower sides of the glass plate 1. This pair of rotating plates 7, 8
are arranged so that a part of their outer peripheral parts are parallel to each other and face each other, and are driven and rotated in the direction of the arrow by motors 9 and 10, respectively. On the outer periphery of the rotary plate 7.8, a polishing cloth 11, which is a means for polishing the glass plate 1, is arranged in a ring shape with the width of the back corresponding to the portion facing the glass plate 1. 1
2 is installed. Further, a support blade 13 for positioning the glass plate 1 is disposed at a position facing the side surface of the glass plate 1. The supporting blade 13 may be made of, for example, hard rubber. In addition, 14 is a polishing side supply means.

以上の如き多面同時研摩加工装置の作用につき第3図を
参照し彦がら説明する。先ず、ローラー2及び3の中心
を結ぶ直線の垂直2等分線りに沿って、該ローラー2,
3及び支持刃13からやや離隔した位置(第3図におけ
るAの位置)において回転板7及び80間に被加工体で
あるガラス板1を配置する。次に、回転板7及び8をそ
れぞれ矢印a、b方向に回転させると、ガラス板1は研
摩布11及び12との摩擦力によって垂直2等分線り上
を矢印C方向に移動してローラー2.3及び支持刃13
に接する位置(第3図におけるBの位置)に到達する。
The operation of the multi-surface simultaneous polishing apparatus as described above will be briefly explained with reference to FIG. First, along the perpendicular bisector of a straight line connecting the centers of rollers 2 and 3,
3 and the support blade 13 (position A in FIG. 3), the glass plate 1, which is a workpiece, is placed between the rotary plates 7 and 80. Next, when the rotary plates 7 and 8 are rotated in the directions of arrows a and b, the glass plate 1 is moved along the perpendicular bisector in the direction of arrow C by the frictional force with the polishing cloths 11 and 12, and the roller 2.3 and support blade 13
(position B in FIG. 3).

そこで、ローラー2及び3をそれぞれ矢印d及びeの方
向に駆動回転せしめると、ガラス板1は矢印f方向に自
転する。ここで、支持刃13は図示される如く垂直2等
分線りに対し垂直では表しに斜めに配置されており、シ
かもローラー3とガラス板1との接点におけるローラー
3の外周の接線がちょうど支持刃13の刃先と垂直にな
る様に彦っておシ、このため、ガラス板1のローラー2
との摩擦力よりもガラス板1と四−ラー3との摩擦力の
方が大きく彦る。そこで、ガラス板1はローラー3とは
殆んど滑りを生じ彦いで回転する。従って、ローラー2
及び30回転数をそれぞれ適宜設定することによりロー
ラー2に取付けられた研摩布6とがラス板1の側面とは
滑シを生ずる。従って、第1図に示される様に、研摩剤
供給手段14から研摩剤を供給することにより、研摩布
11.12によシガラス板10面平面の研摩加工を行な
いながら、同時に研摩布6によシガ2ヌ板1の側面の研
摩加工を行力うことができる。
Therefore, when the rollers 2 and 3 are driven to rotate in the directions of arrows d and e, respectively, the glass plate 1 rotates in the direction of arrow f. Here, as shown in the figure, the support blade 13 is arranged obliquely to the perpendicular bisector line, and the tangent to the outer circumference of the roller 3 at the point of contact between the roller 3 and the glass plate 1 is exactly It is turned so that it is perpendicular to the cutting edge of the supporting blade 13, so that the roller 2 of the glass plate 1
The frictional force between the glass plate 1 and the four-layer 3 is greater than the frictional force between the glass plate 1 and the four-layer 3. Therefore, the glass plate 1 rotates with almost no slippage with respect to the roller 3. Therefore, roller 2
and 30 rotations, respectively, so that the abrasive cloth 6 attached to the roller 2 does not lubricate the side surface of the lath plate 1. Therefore, as shown in FIG. 1, by supplying the abrasive from the abrasive supply means 14, the flat surface of the glass plate 10 is polished by the polishing cloths 11 and 12, and at the same time, the polishing cloth 6 is It is possible to perform a polishing process on the side surface of the blade 2 plate 1.

以上の実施例においては研摩加工の場合の具体例が示さ
れているが、同様にして、研削加工またはラッピング加
工を打力うことかできる。研削加工の場合には研摩布の
かわυにたとえばダイヤモンド工具を取付は研摩剤のか
わシに研削液を供給すればよく、またラッピング加工の
場合には研摩布のかわυにたとえばラッピング板を取付
は研摩剤のかわシに砥粒を供給すればよい。
In the above embodiment, a specific example of polishing is shown, but grinding or lapping can be performed in the same manner. In the case of grinding, attach a diamond tool, for example, to the edge of the abrasive cloth by supplying grinding fluid to the edge of the abrasive, and in the case of lapping, attach a lapping plate, for example, to the edge of the abrasive cloth, υ. All you have to do is supply the abrasive grains to the abrasive.

また、以上の実施例においてはガラス板1の側面の形状
が円筒形である場合の具体例が示されているが、ローラ
ー2及び3の縦断面形状を適宜変形することによシ円錐
台形状等種々の側面形状をもつ製品を得ることができる
Further, in the above embodiments, a specific example is shown in which the shape of the side surface of the glass plate 1 is cylindrical, but by appropriately deforming the longitudinal cross-sectional shape of the rollers 2 and 3, Products with various side shapes can be obtained.

更に、以上の実施例においては被加工体がガラスの場合
を例示したが、本発明加工装置はセラミックその他の種
々の材料からなる被加工体をも加工し得ることはもちろ
んである。
Further, in the above embodiments, the case where the workpiece is glass is illustrated, but it goes without saying that the processing apparatus of the present invention can also process workpieces made of ceramic and various other materials.

〔発明の効果〕〔Effect of the invention〕

以上の如き本発明装置によれば、平面と側面とを同時に
加工するととができるため、加工工程の短縮化をはかる
ことができ、高精度の製品を高能率、低コストにて得る
ととができる。また、従来の側面加工装置の様に加工時
にチャッキングを行力わ力いため、チャック歪による悪
影響を防止できるという利点もある。
According to the apparatus of the present invention as described above, since it is possible to simultaneously process the plane surface and the side surface, it is possible to shorten the processing process and obtain high-precision products with high efficiency and low cost. can. In addition, since the chucking force is not applied during machining like in conventional side machining equipment, there is an advantage that the adverse effects caused by chuck distortion can be prevented.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による装置の側面図であシ、第2図はそ
の主要部分の平面図であり、第3図はその作用を説明す
るための平面図である。 1・・・ガラス板、2,3・・・ローラー、4 、5.
9゜10・・・モーター、6,11.12・・・研摩布
、7.8・・・回転板、13・・・位置決め用支持刃、
14・・・研摩剤供給手段。
FIG. 1 is a side view of the device according to the present invention, FIG. 2 is a plan view of its main parts, and FIG. 3 is a plan view for explaining its operation. 1... Glass plate, 2, 3... Roller, 4, 5.
9゜10...Motor, 6,11.12...Abrasive cloth, 7.8...Rotating plate, 13...Supporting blade for positioning,
14... Abrasive supply means.

Claims (3)

【特許請求の範囲】[Claims] (1)1対の平行平面を有する被加工体の表面を加工す
るための装置において、被加工体の直径よりも狭い間隔
で1対の第1の駆動体が配設されており、該駆動体は上
記被加工体の側面と当接しつつ駆動回転せしめられ且つ
少なくとも一方が被加工体との当接部に該被加工体の側
面を加工するための手段を有しており、一方、上記被加
工体の1対の平行平面と摺接しつつ被加工体を上記1対
の第1の駆動体に押付ける方向に駆動回転せしめられる
1対の第2の駆動体が配設されており、該駆動体は上記
被加工体との摺接部分に被加工体の平行平面を加工する
ための加工手段を有することを特徴とする、多面同時加
工装置。
(1) In an apparatus for processing the surface of a workpiece having a pair of parallel planes, a pair of first driving bodies are disposed at an interval narrower than the diameter of the workpiece, and the driving The body is driven to rotate while being in contact with the side surface of the workpiece, and at least one of the bodies has means for machining the side surface of the workpiece at the contact portion with the workpiece; A pair of second driving bodies are disposed that are driven and rotated in a direction that presses the workpiece against the pair of first drive bodies while slidingly contacting the pair of parallel planes of the workpiece, A multi-surface simultaneous machining device, characterized in that the driving body has processing means for machining parallel planes of the workpiece at a sliding contact portion with the workpiece.
(2)加工が研摩、研削またはラッピングである、第1
項の多面同時加工装置。
(2) The first process is polishing, grinding, or lapping.
Multi-face simultaneous processing equipment.
(3)研摩剤、研削液またはラッピング材を供給するた
めの手段を有する、第2項の多面同時加工装置。
(3) The multi-face simultaneous processing device according to item 2, which has means for supplying an abrasive, a grinding fluid, or a lapping material.
JP15539984A 1984-07-27 1984-07-27 Multi-face symultaneous machining device Pending JPS6133851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15539984A JPS6133851A (en) 1984-07-27 1984-07-27 Multi-face symultaneous machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15539984A JPS6133851A (en) 1984-07-27 1984-07-27 Multi-face symultaneous machining device

Publications (1)

Publication Number Publication Date
JPS6133851A true JPS6133851A (en) 1986-02-17

Family

ID=15605113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15539984A Pending JPS6133851A (en) 1984-07-27 1984-07-27 Multi-face symultaneous machining device

Country Status (1)

Country Link
JP (1) JPS6133851A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0940219A2 (en) * 1998-03-05 1999-09-08 Speedfam Co., Ltd. A wafer processing machine and a processing method thereby
CN104355169A (en) * 2014-10-30 2015-02-18 浙江久德不锈钢型材有限公司 Integrated driving and polishing steel belt conveying device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0940219A2 (en) * 1998-03-05 1999-09-08 Speedfam Co., Ltd. A wafer processing machine and a processing method thereby
EP0940219A3 (en) * 1998-03-05 2001-07-11 Speedfam Co., Ltd. A wafer processing machine and a processing method thereby
CN104355169A (en) * 2014-10-30 2015-02-18 浙江久德不锈钢型材有限公司 Integrated driving and polishing steel belt conveying device

Similar Documents

Publication Publication Date Title
US4934102A (en) System for mechanical planarization
JP2564214B2 (en) Uniform speed double-side polishing machine and method of using the same
US6261160B1 (en) Method and apparatus for specular-polishing of work edges
JP3909619B2 (en) Apparatus and method for mirror processing of magnetic disk substrate
JP2002144201A (en) Outer periphery polishing device and method for disc- shaped work
Li et al. Simultaneous double side grinding of silicon wafers: a literature review
JPH09168953A (en) Semiconductor wafer edge polishing method and device
JP2000218482A (en) Paper sheet type end face polsher
JPS6133851A (en) Multi-face symultaneous machining device
JP3133300B2 (en) Polishing method and polishing apparatus
JP4472694B2 (en) Straight type polishing method
JP6847484B1 (en) Work groove polishing method and polishing equipment
JPH1148109A (en) Mirror polishing method and device for work edge
JP2916028B2 (en) Mirror polishing method and apparatus for work edge
JP2001138230A (en) Method for grinding face side and reverse side of substrate, and grinding apparatus used therefor
JPH11320358A (en) Polishing device
JP2001062686A (en) Index type edge polisher
JP2000198068A (en) Sheet type polishing machine
CN215433160U (en) Grinding clamp for sheet workpiece and grinding device thereof
JP2003266304A (en) Multi grinding wheel for grinding base and grinding device using it
JPH05309535A (en) Machine tool
JPH04261768A (en) Double-side lapping device
JPS62259753A (en) Surface polishing device
JPS6125976Y2 (en)
JPH06339854A (en) Surface polishing method for ceramics