JPS6132816B2 - - Google Patents

Info

Publication number
JPS6132816B2
JPS6132816B2 JP51060032A JP6003276A JPS6132816B2 JP S6132816 B2 JPS6132816 B2 JP S6132816B2 JP 51060032 A JP51060032 A JP 51060032A JP 6003276 A JP6003276 A JP 6003276A JP S6132816 B2 JPS6132816 B2 JP S6132816B2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
dry plate
objective lens
optical system
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51060032A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52143775A (en
Inventor
Kyoshi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6003276A priority Critical patent/JPS52143775A/ja
Publication of JPS52143775A publication Critical patent/JPS52143775A/ja
Publication of JPS6132816B2 publication Critical patent/JPS6132816B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6003276A 1976-05-26 1976-05-26 Reduction projecting and printing method and reduction projecting and printing apparatus used in this method Granted JPS52143775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6003276A JPS52143775A (en) 1976-05-26 1976-05-26 Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6003276A JPS52143775A (en) 1976-05-26 1976-05-26 Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Publications (2)

Publication Number Publication Date
JPS52143775A JPS52143775A (en) 1977-11-30
JPS6132816B2 true JPS6132816B2 (enExample) 1986-07-29

Family

ID=13130313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6003276A Granted JPS52143775A (en) 1976-05-26 1976-05-26 Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Country Status (1)

Country Link
JP (1) JPS52143775A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256621A (ja) * 1985-09-04 1987-03-12 Ngk Spark Plug Co Ltd セラミツク軸と金属軸の接合構造

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169134A (ja) * 1983-03-16 1984-09-25 Hitachi Ltd 縮小投影露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256621A (ja) * 1985-09-04 1987-03-12 Ngk Spark Plug Co Ltd セラミツク軸と金属軸の接合構造

Also Published As

Publication number Publication date
JPS52143775A (en) 1977-11-30

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