JPS6132515B2 - - Google Patents
Info
- Publication number
- JPS6132515B2 JPS6132515B2 JP51134115A JP13411576A JPS6132515B2 JP S6132515 B2 JPS6132515 B2 JP S6132515B2 JP 51134115 A JP51134115 A JP 51134115A JP 13411576 A JP13411576 A JP 13411576A JP S6132515 B2 JPS6132515 B2 JP S6132515B2
- Authority
- JP
- Japan
- Prior art keywords
- getter element
- getter
- temperature
- pump
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 28
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 108010083687 Ion Pumps Proteins 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005086 pumping Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13411576A JPS5359909A (en) | 1976-11-10 | 1976-11-10 | Non-vaporous getter pump device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13411576A JPS5359909A (en) | 1976-11-10 | 1976-11-10 | Non-vaporous getter pump device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5359909A JPS5359909A (en) | 1978-05-30 |
JPS6132515B2 true JPS6132515B2 (US06229276-20010508-P00022.png) | 1986-07-28 |
Family
ID=15120799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13411576A Granted JPS5359909A (en) | 1976-11-10 | 1976-11-10 | Non-vaporous getter pump device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5359909A (US06229276-20010508-P00022.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH021418U (US06229276-20010508-P00022.png) * | 1988-06-13 | 1990-01-08 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917764A (US06229276-20010508-P00022.png) * | 1972-06-05 | 1974-02-16 |
-
1976
- 1976-11-10 JP JP13411576A patent/JPS5359909A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917764A (US06229276-20010508-P00022.png) * | 1972-06-05 | 1974-02-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH021418U (US06229276-20010508-P00022.png) * | 1988-06-13 | 1990-01-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS5359909A (en) | 1978-05-30 |