JPS6131911A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS6131911A
JPS6131911A JP15317484A JP15317484A JPS6131911A JP S6131911 A JPS6131911 A JP S6131911A JP 15317484 A JP15317484 A JP 15317484A JP 15317484 A JP15317484 A JP 15317484A JP S6131911 A JPS6131911 A JP S6131911A
Authority
JP
Japan
Prior art keywords
light
optical path
lens
measured
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15317484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047807B2 (en, 2012
Inventor
Masahiko Mochizuki
望月　政彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15317484A priority Critical patent/JPS6131911A/ja
Publication of JPS6131911A publication Critical patent/JPS6131911A/ja
Publication of JPH047807B2 publication Critical patent/JPH047807B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP15317484A 1984-07-25 1984-07-25 表面検査装置 Granted JPS6131911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15317484A JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15317484A JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6131911A true JPS6131911A (ja) 1986-02-14
JPH047807B2 JPH047807B2 (en, 2012) 1992-02-13

Family

ID=15556668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15317484A Granted JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6131911A (en, 2012)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS5858740A (ja) * 1981-10-02 1983-04-07 Mitsubishi Electric Corp 半導体ウエハのそり測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS5858740A (ja) * 1981-10-02 1983-04-07 Mitsubishi Electric Corp 半導体ウエハのそり測定装置

Also Published As

Publication number Publication date
JPH047807B2 (en, 2012) 1992-02-13

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