JPS6131402B2 - - Google Patents

Info

Publication number
JPS6131402B2
JPS6131402B2 JP17084879A JP17084879A JPS6131402B2 JP S6131402 B2 JPS6131402 B2 JP S6131402B2 JP 17084879 A JP17084879 A JP 17084879A JP 17084879 A JP17084879 A JP 17084879A JP S6131402 B2 JPS6131402 B2 JP S6131402B2
Authority
JP
Japan
Prior art keywords
imaging camera
interference fringes
flatness
control means
rotation mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17084879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5693003A (en
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17084879A priority Critical patent/JPS5693003A/ja
Publication of JPS5693003A publication Critical patent/JPS5693003A/ja
Publication of JPS6131402B2 publication Critical patent/JPS6131402B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP17084879A 1979-12-27 1979-12-27 Measuring device for plane degree Granted JPS5693003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17084879A JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17084879A JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Publications (2)

Publication Number Publication Date
JPS5693003A JPS5693003A (en) 1981-07-28
JPS6131402B2 true JPS6131402B2 (enrdf_load_stackoverflow) 1986-07-19

Family

ID=15912440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17084879A Granted JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Country Status (1)

Country Link
JP (1) JPS5693003A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111709A (ja) * 1981-12-25 1983-07-02 Sumitomo Special Metals Co Ltd 平面度測定装置

Also Published As

Publication number Publication date
JPS5693003A (en) 1981-07-28

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