JPS5693003A - Measuring device for plane degree - Google Patents

Measuring device for plane degree

Info

Publication number
JPS5693003A
JPS5693003A JP17084879A JP17084879A JPS5693003A JP S5693003 A JPS5693003 A JP S5693003A JP 17084879 A JP17084879 A JP 17084879A JP 17084879 A JP17084879 A JP 17084879A JP S5693003 A JPS5693003 A JP S5693003A
Authority
JP
Japan
Prior art keywords
plane
camera
interference fringe
checked
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17084879A
Other languages
Japanese (ja)
Other versions
JPS6131402B2 (en
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17084879A priority Critical patent/JPS5693003A/en
Publication of JPS5693003A publication Critical patent/JPS5693003A/en
Publication of JPS6131402B2 publication Critical patent/JPS6131402B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To enable automation of a plane checking process, by a method wherein a rotation system for a camera, which can scan an interference fringe through rotation of the camera for photographing the interference fringe on a screen of a plane degree measuring device.
CONSTITUTION: Light from a laser tube 1 is formed into a parallel light through the working of reflecting mirrors 2, 4, 6, and 8, a filter 3, an objective 5, and a collimator lens 7, and irradiates an object 13 to be checked which is superposed with a half mirror 9. Through reflection of the light by the reference plane of the half mirror 9 and by the plane to be checked of the object 13 to be checked, an interference fringe is produced on a screen 12. A picture signal, which is obtained by photographing the interference fringe by the use of a movie camera 21, is stored in a memory 25 as the number of the interference fringes after passing through a digitalizing device 23 and a CPU24. According to a command from the CPU24, the camera 21 is then spinned by a given angle through the working of a drive controller 27 and a pulse motor 22 for scanning, and the results are stored in the measurement data memory 25 for indicating a plane degree after 180° rotation. This permits the automation of inspection.
COPYRIGHT: (C)1981,JPO&Japio
JP17084879A 1979-12-27 1979-12-27 Measuring device for plane degree Granted JPS5693003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17084879A JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17084879A JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Publications (2)

Publication Number Publication Date
JPS5693003A true JPS5693003A (en) 1981-07-28
JPS6131402B2 JPS6131402B2 (en) 1986-07-19

Family

ID=15912440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17084879A Granted JPS5693003A (en) 1979-12-27 1979-12-27 Measuring device for plane degree

Country Status (1)

Country Link
JP (1) JPS5693003A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111709A (en) * 1981-12-25 1983-07-02 Sumitomo Special Metals Co Ltd Flatness measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111709A (en) * 1981-12-25 1983-07-02 Sumitomo Special Metals Co Ltd Flatness measuring device

Also Published As

Publication number Publication date
JPS6131402B2 (en) 1986-07-19

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