JPS6129815A - 反射縮小投影光学系 - Google Patents

反射縮小投影光学系

Info

Publication number
JPS6129815A
JPS6129815A JP15250284A JP15250284A JPS6129815A JP S6129815 A JPS6129815 A JP S6129815A JP 15250284 A JP15250284 A JP 15250284A JP 15250284 A JP15250284 A JP 15250284A JP S6129815 A JPS6129815 A JP S6129815A
Authority
JP
Japan
Prior art keywords
optical system
partial optical
image
plane
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15250284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562721B2 (cg-RX-API-DMAC7.html
Inventor
Koichi Matsumoto
宏一 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP15250284A priority Critical patent/JPS6129815A/ja
Publication of JPS6129815A publication Critical patent/JPS6129815A/ja
Priority to US07/171,169 priority patent/US4812028A/en
Publication of JPH0562721B2 publication Critical patent/JPH0562721B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP15250284A 1984-07-23 1984-07-23 反射縮小投影光学系 Granted JPS6129815A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15250284A JPS6129815A (ja) 1984-07-23 1984-07-23 反射縮小投影光学系
US07/171,169 US4812028A (en) 1984-07-23 1988-03-21 Reflection type reduction projection optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15250284A JPS6129815A (ja) 1984-07-23 1984-07-23 反射縮小投影光学系

Publications (2)

Publication Number Publication Date
JPS6129815A true JPS6129815A (ja) 1986-02-10
JPH0562721B2 JPH0562721B2 (cg-RX-API-DMAC7.html) 1993-09-09

Family

ID=15541861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15250284A Granted JPS6129815A (ja) 1984-07-23 1984-07-23 反射縮小投影光学系

Country Status (1)

Country Link
JP (1) JPS6129815A (cg-RX-API-DMAC7.html)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61156737A (ja) * 1984-12-27 1986-07-16 Canon Inc 回路の製造方法及び露光装置
JPS61204935A (ja) * 1985-03-07 1986-09-11 Seiko Epson Corp 反射縮小投影露光装置
JPS63106739A (ja) * 1986-10-24 1988-05-11 Canon Inc ミラ−光学系
JPS63163319A (ja) * 1986-12-17 1988-07-06 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 光学系
JPH04234722A (ja) * 1990-08-28 1992-08-24 Internatl Business Mach Corp <Ibm> 補償型光学システム
JPH04317995A (ja) * 1991-04-15 1992-11-09 Kito Corp 巻上機支持兼長尺物支持用旋回アームを有するトラッククレーン
JPH08139012A (ja) * 1995-04-05 1996-05-31 Canon Inc 回路の製造方法及び露光装置
US5592329A (en) * 1993-02-03 1997-01-07 Nikon Corporation Catadioptric optical system
JP2005345582A (ja) * 2004-06-01 2005-12-15 Dainippon Screen Mfg Co Ltd 投影光学系およびパターン描画装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61156737A (ja) * 1984-12-27 1986-07-16 Canon Inc 回路の製造方法及び露光装置
JPS61204935A (ja) * 1985-03-07 1986-09-11 Seiko Epson Corp 反射縮小投影露光装置
JPS63106739A (ja) * 1986-10-24 1988-05-11 Canon Inc ミラ−光学系
JPS63163319A (ja) * 1986-12-17 1988-07-06 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 光学系
JPH04234722A (ja) * 1990-08-28 1992-08-24 Internatl Business Mach Corp <Ibm> 補償型光学システム
JPH04317995A (ja) * 1991-04-15 1992-11-09 Kito Corp 巻上機支持兼長尺物支持用旋回アームを有するトラッククレーン
US5592329A (en) * 1993-02-03 1997-01-07 Nikon Corporation Catadioptric optical system
JPH08139012A (ja) * 1995-04-05 1996-05-31 Canon Inc 回路の製造方法及び露光装置
JP2005345582A (ja) * 2004-06-01 2005-12-15 Dainippon Screen Mfg Co Ltd 投影光学系およびパターン描画装置

Also Published As

Publication number Publication date
JPH0562721B2 (cg-RX-API-DMAC7.html) 1993-09-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term