JPS61296521A - Multitrack magnetic head and its production - Google Patents

Abstract

PURPOSE:To eliminate a crosstalk by forming plural lower magnetic layers and a nonmagnetic metallic film to embed the circumference of these lower magnetic layers on a nonmagnetic substrate by making flushes the surface with each other and successively forming a nonmagnetic insulating layer, winding wire film and an upper magnetic layer thereon. CONSTITUTION:The space around the winding wire film 5 is coated with an insulating material 6 and the upper magnetic film 7 is formed thereon by magnet ically coupling part thereto to the lower magnetic film 2. A surface 2a to face a recording medium in contact therewith is formed on the end face of the film 2 and the end faces of the nonmagnetic substrate 1, the nonmagnetic metallic film 3, the nonmagnetic insulating layer 4 and the upper magnetic film 7 are so formed as to be flush with the surface 2a. Since the films 2 are cir cumferentially enclosed with the film 3, there is no magnetic flux leakage be tween the adjacent films 2 and the exact recording and reproduction are execut ed. Since the surfaces of the films 2 and the film 3 are flush with each other, the winding wire film 5 is formed to a uniform thickness over the same plane. The disconnection of the winding wire film 5 is thereby prevented and the efficiency of current conduction is improved as well.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention This invention relates to a multi-track magnetic head and a method for manufacturing the same.

BACKGROUND ART As shown in FIGS. 5 and 6, a plurality of lower magnetic films 51 are formed on the surface of a non-magnetic substrate 5°. There is a multi-track magnetic head in which a winding film 52 is formed on a non-magnetic substrate 5o, and an upper magnetic layer H (not shown), a part of which is magnetically coupled to the lower magnetic film 51, is formed thereon.

Next, the steps for forming the lower magnetic film 51 on the non-magnetic substrate 5o are shown in the order of steps in FIG. (b) is a step of forming a pattern frame 54 with resist on both sides of the lower magnetic film 51 to be formed, (C) is a step of plating a magnetic film 55 on the electrode 53, and (d) is a magnetic film to be left. Resist 56 above 55
(e) is a step of removing the magnetic film 55 by chemical etching, (f) is a step of removing the resist 56, (g) is a step of removing the protruding electrode 53,
This remaining magnetic film 55 is the lower magnetic film 51.

Problems to be Solved by the Invention However, crosstalk between the lower magnetic films 51 becomes a problem, making accurate recording and reproduction difficult. If the interval between the lower magnetic films 51 is widened, the device becomes larger. As shown in FIG. 7, there is a structure in which the lower magnetic films 51 are tilted inward from each other, but this causes an extremely serious problem of crosstalk. Further, since only the lower magnetic film 51 protrudes from the non-magnetic substrate 50, a step is created, and a disconnection occurs at the step portion of the winding film 52, resulting in a poor yield in the manufacturing process. Since the thickness of the winding film 52 is thinner at the step portion, the recording current must be smaller than that for the winding film formed on the same plane. Along with this, the playback output becomes smaller.

Furthermore, the steps up to the formation of the lower magnetic film 51 on the nonmagnetic substrate 5o are complicated and the number of manufacturing steps increases.

The present invention has been made in view of these points, and it is an object of the present invention to provide a multi-track magnetic head and its manufacturing method that can eliminate the problem of crosstalk and shorten the manufacturing process.

Means for Solving the Problems The first invention, as shown in FIG. and are formed by matching the surfaces. A nonmagnetic insulating layer 4, a winding film 5, and an upper magnetic film 7 are sequentially formed thereon.

The second invention is an invention of a manufacturing method, and Fig. 4 (a) without (
Shown in h).

(a) shows a non-magnetic metal film forming step of forming a non-magnetic metal film 3 on a non-magnetic substrate 1.

(b) is a resist processing step in which a part 8 of the nonmagnetic metal film 3 is left and covered with a resist 9.

(c) is a groove 1 formed by etching a part 8 of the non-magnetic metal film 3.
Etching process to form 0.

(d) is a lower magnetic film forming step in which the groove 10 is plated with the lower magnetic film 2.

(e) is a resist removal step in which the resist 9 is removed.

(f) is a nonmagnetic insulating layer forming step in which a nonmagnetic insulating layer 4 is formed on the same plane of the nonmagnetic metal film 3 and the lower magnetic film 2.

(g) is a winding film forming step in which a winding film 5 is formed on the nonmagnetic insulating layer 4.

(h) is an upper magnetic film forming step in which a portion of the upper magnetic film 7 is magnetically coupled to the lower magnetic film 2.

In the first aspect of the invention, leakage of magnetic flux between adjacent lower magnetic films 2 is prevented by the nonmagnetic metal film 3. The winding film 5 can be formed on the same plane, improving current conduction efficiency and preventing wire breakage.

In the second invention, as shown in FIGS. 4(a) to 4(e), the number of steps for forming the lower magnetic film 2 is reduced compared to the conventional technique shown in FIG. 8.

Embodiment An embodiment of the present invention will be described with reference to FIGS. 1 to 4. To explain the manufacturing steps in the order shown in FIG. 4, first, as shown in FIG. 4(a), the lower magnetic film 3 is formed on the surface of the nonmagnetic substrate 1 by a thin film technique such as sputtering.

Next, as shown in FIG. 4(b), a resist 9 film is formed on the non-magnetic metal film 3, and a part of the resist 9 is removed by photo-etching, and a part 8 of the non-magnetic metal film 3 is removed. Exposure in multiple locations.

Next, as shown in FIG. 4(c), a plurality of grooves 1o are formed in the nonmagnetic metal film 3 by chemical etching in areas where the resist 9 is not present.

Next, as shown in FIG. 4(d), these grooves 10 are plated with the lower magnetic film 2. At this time, the surfaces of the nonmagnetic metal film 3 and the lower magnetic film 3 are made to coincide with each other.

Next, as shown in FIG. 4(e), the resist 9 is removed.

Next, as shown in FIG. 4(f), a nonmagnetic insulating layer 4 is formed on the surfaces of the lower magnetic film 2 and the magnetic metal film 3.

Next, as shown in FIG. 4(g), a plurality of conductive winding films 5 swirling on the same plane are formed by thin film technology or the like. This state is as shown in FIG. Lower magnetic film 2
The thickness of the non-magnetic metal film 3 is the same as that of the lower magnetic film 2, but as shown in FIG. good.

Next, as shown in FIG. 4(h), the space around the first winding film 5 is covered with an insulating material 6, and a portion of the upper magnetic film 7 is magnetically coupled (bonded) to the lower magnetic film 2. Let it form. A medium contacting surface 2 that contacts the recording medium is provided on the end surface of the lower magnetic film 2.
a, a nonmagnetic substrate 1, a nonmagnetic metal film 3, a nonmagnetic insulating layer 4. The end surface of the upper magnetic film 7 is also finished to match the medium contacting surface 2a.

In such a configuration, the medium contacting surface 2a is brought into contact with the
Recording is performed on a running recording medium by passing a current based on a recording signal through the winding film 5, or reproduction is performed by extracting a current in the winding film 5 that changes based on information on the recording medium. Since each lower magnetic film 2 is surrounded by a nonmagnetic metal film 3, there is no magnetic flux leakage between adjacent lower magnetic films 2, and accurate recording or reproduction is performed. Furthermore, since the surfaces of the lower magnetic film 2 and the non-magnetic metal film 3 are the same, the winding film 5 can be formed with a uniform thickness on the same plane.
It is possible to prevent disconnection of the wire, and the current conduction efficiency is also improved. Accordingly, the reproduction voltage and reproduction output can be increased, and the current can be reduced to obtain the same reproduction output.

Furthermore, as can be seen by comparing FIGS. 8(a) to 8(g) with FIGS. 4(a) to e), the number of steps for forming the lower magnetic film 2 on the nonmagnetic substrate 1 can be reduced. I can do it.

Moreover, in this process, the periphery of the lower magnetic film 2 can be covered with the non-magnetic metal film 3.

Effects of the Invention Since the present invention is configured as described above, leakage of magnetic flux between adjacent lower magnetic films can be prevented by the non-magnetic metal film, and the winding films can be formed on the same plane. As a result, it is possible to improve the current conduction efficiency and prevent the occurrence of wire breakage, and furthermore, it has effects such as being able to shorten the number of steps required to form the lower magnetic film on the nonmagnetic substrate.

[Brief explanation of the drawing]

1 to 4 show an embodiment of the present invention, in which FIG. 1 is a vertical side view, and FIG. 2 is a non-magnetic substrate with a non-magnetic metal film, a lower magnetic film, and a non-magnetic insulating layer. FIG. 3 is a partially cutaway perspective view showing a modified example of the semifinished product, and FIGS. 4(a) to (h)
Figures 5 to 8 show a conventional example, and Figure 5 shows a semi-finished product in which a lower magnetic film and a winding film are formed on a non-magnetic substrate. Partially cutaway perspective view, Figures 6 and 7 are plan views, Figure 8(a)
- (g) are longitudinal sectional front views showing the process up to forming a lower magnetic film on a nonmagnetic substrate. DESCRIPTION OF SYMBOLS 1...Nonmagnetic substrate, 2...Lower magnetic film, 2a...
Medium contact surface, 3... Nonmagnetic metal film, 4... Nonmagnetic insulating layer, 5... Winding film, 7... Upper layer magnetic film, 9...
Resist, 10... groove

Claims (1)

[Scope of Claims] 1. A plurality of lower magnetic films are formed on the surface of a non-magnetic substrate, one end of which is a medium-contacting surface, corresponding to the tracks of the recording medium, and a non-magnetic film is formed to fill the periphery of these lower magnetic films. A magnetic metal film is formed with its surface flush with the surface of the lower magnetic film, and a nonmagnetic insulating layer is provided on the surfaces of the lower magnetic film and the non-magnetic metal film, facing the lower magnetic film. A multi-track magnetic head characterized in that it is formed by sequentially laminating a conductive winding film swirling on a plane and an upper magnetic film partially magnetically coupled to the lower magnetic film. 2. A non-magnetic metal film forming step of forming a non-magnetic metal film on the surface of a non-magnetic substrate, a resist treatment step of covering a portion of the surface of the non-magnetic metal film with a resist, and a portion where the resist does not exist. an etching step for forming grooves on the surface of the non-magnetic metal film; a lower magnetic film forming step for plating a lower magnetic film in the grooves; a resist removal step for removing the resist; A non-magnetic insulating layer forming step of laminating a non-magnetic insulating layer on the surface of the lower magnetic film, and laminating a conductive winding film swirling on a plane facing the lower magnetic film on the surface of the non-magnetic insulating layer. a winding film forming step, and an upper magnetic film forming step of forming an upper magnetic film covering the winding film by magnetically coupling a portion of the upper magnetic film to the lower magnetic film. manufacturing method.