JP2551749B2 - Method of manufacturing thin film magnetic head - Google Patents
Method of manufacturing thin film magnetic headInfo
- Publication number
- JP2551749B2 JP2551749B2 JP60020515A JP2051585A JP2551749B2 JP 2551749 B2 JP2551749 B2 JP 2551749B2 JP 60020515 A JP60020515 A JP 60020515A JP 2051585 A JP2051585 A JP 2051585A JP 2551749 B2 JP2551749 B2 JP 2551749B2
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- Prior art keywords
- magnetic
- film
- thin
- layer
- thin film
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Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は薄膜磁気ヘッドの製造方法に係り、特に磁性
基板と薄膜磁気コア（磁性薄膜コア）とにより磁気回路
を形成し、前記磁性薄膜コアに薄膜導体コイルを捲線し
てなる磁気誘導型薄膜磁気ヘッド、特にディジタル磁気
記録再生に用いる多トラック磁気ヘッドの製造方法に関
する。The present invention relates to a method for manufacturing a thin film magnetic head, and more particularly to a magnetic circuit formed by a magnetic substrate and a thin film magnetic core (magnetic thin film core). The present invention relates to a method for manufacturing a magnetic induction type thin film magnetic head formed by winding a thin film conductor coil, particularly a multi-track magnetic head used for digital magnetic recording / reproducing.
（従来の技術とその問題点） 近年、ディジタル磁気記録再生システムの高密度化の
要請に沿って、従来のICプロセス技術、特に蒸着，スパ
ッタリング,CVD（ケミカル・ペーパ・デポジション）な
どの薄膜作成技術とドライエッチングなどの微細加工技
術を用いた薄膜磁気ヘッドが注目され、一部には実用化
されている。(Conventional technology and its problems) In recent years, along with the demand for higher density of digital magnetic recording / reproducing system, conventional IC process technology, especially thin film formation such as vapor deposition, sputtering, CVD (chemical paper deposition), etc. A thin-film magnetic head using a technology and a microfabrication technology such as dry etching has attracted attention and has been put to practical use in part.
この薄膜磁気ヘッドには、従来のモノリシック型磁気
ヘッドに比して狭トラック化、多トラック化が可能であ
り、又記録漏洩磁束が急峻で、短波長の記録特性に優れ
ているので高密度化に適している。また更に、生産性に
おいても、ウェハー・プロセスをもちいるので量産性に
優れた均質な磁気ヘッド提供することができる。このよ
うな理由から、例えば、オーディオPCM録音用の磁気ヘ
ッドとして多素子磁気ヘッドが用いられており、記録用
として磁気誘導型薄膜磁気ヘッドを用い、又再生用とし
て磁気抵抗型薄膜磁気ヘッドが用いられている。Compared with conventional monolithic magnetic heads, this thin-film magnetic head can have narrower tracks and more tracks, and has a sharp recording leakage flux and excellent recording characteristics at short wavelengths. Suitable for Further, in terms of productivity, since the wafer process is used, it is possible to provide a homogeneous magnetic head excellent in mass productivity. For this reason, for example, a multi-element magnetic head is used as a magnetic head for audio PCM recording, a magnetic induction thin film magnetic head is used for recording, and a magnetoresistive thin film magnetic head is used for reproduction. Has been.
従来の記録用薄膜磁気ヘッドは、平面に１〜２層の金
属導体をスパイラル状にパターニングしたものであり、
トラック・ピッチと加工上の制限から、捲線数を多くす
ることが出来ず、従って、記録電流が大きくなり、放熱
が困難でIC回路との結合も難しく、同時に誘導起電圧も
小さいので、再生ヘッドは別の原理を用いた、全く別の
プロセスによる薄膜磁気ヘッドとなっていた。A conventional thin-film magnetic head for recording has one or two layers of metal conductors spirally patterned on a plane,
Due to the track pitch and processing restrictions, the number of windings cannot be increased. Therefore, the recording current becomes large, heat dissipation is difficult, it is difficult to combine with the IC circuit, and at the same time the induced electromotive force is small, so the reproducing head Was a thin-film magnetic head manufactured by a completely different process using another principle.
一方、捲線数を大とすることのできる捲線構造の薄膜
磁気ヘッドとしては、薄膜磁気コアの上部と下部に薄膜
導体コイルをそれぞれ電気絶縁膜を介してパターニング
するもので、この構造（以下、立体ヘリカル型と称す
る）では、平面スパイラル型の捲線構造に比して、捲線
数はトラック・ピッチに制限されないので、平面スパイ
ラル型が、約10巻（ターン）以下であったのに比し、数
10〜数1000ターンが可能であり、磁気誘導型で微小記録
電流で記録可能で、かつ再生出力も大きいので同一プロ
セスによって記録再生ヘッドができる。On the other hand, as a thin-film magnetic head having a winding structure capable of increasing the number of windings, a thin-film conductor coil is patterned on the upper and lower parts of a thin-film magnetic core through an electric insulating film, respectively. In the helical type), the number of windings is not limited by the track pitch as compared with the flat spiral type winding structure, so the flat spiral type has about 10 turns (turns) or less,
It is possible to make 10 to several thousand turns, is magnetic induction type, can record with a minute recording current, and has a large reproduction output, so a recording / reproducing head can be formed by the same process.
ところが、上記のような従来の薄膜磁気ヘッドは、次
のような問題点がある。However, the conventional thin film magnetic head as described above has the following problems.
薄膜磁気コアの断面積が小さいので、薄膜導体コイル
によって、記録ギャップに十分な磁束を与えることがで
きず、従って、記録レベルが小さい。Since the cross-sectional area of the thin-film magnetic core is small, the thin-film conductor coil cannot give a sufficient magnetic flux to the recording gap, and therefore the recording level is small.
また、同様に薄膜磁気コアの捲線部の磁気抵抗が高い
ので、十分な再生出力が得られない。Similarly, since the winding portion of the thin film magnetic core has a high magnetic resistance, a sufficient reproduction output cannot be obtained.
磁性膜のエッチング再現性が小さく、歩留りが小さ
い。The magnetic film has low etching reproducibility and low yield.
段差配線部で配線切れが生じ、歩留りが小さい。Wiring breaks occur in the step wiring portion, and the yield is small.
そこで、本発明は上記の従来の技術の問題点を解決し
て、薄膜磁気コアの捲線部の断面積が大になり、しかも
歩留りが大きく記録効率のよい薄膜磁気ヘッドの製造方
法を提供することを目的とする。Therefore, the present invention provides a method for manufacturing a thin film magnetic head in which the above-mentioned problems of the conventional technique are solved and the winding area of the thin film magnetic core is large, and the yield is large and the recording efficiency is good. With the goal.
（問題点を解決するための手段及び作用） 本発明は上記の目的を達成するために、磁性基板と薄
膜磁気コアとにより磁気回路を形成し、前記薄膜磁気コ
アに薄膜導体コイルを捲線してなる薄捲磁気ヘッドの製
造方法において、前記磁性基板の溝部に設けた非磁性電
気絶縁材料の表面に下部薄膜導体コイルを埋め込み、前
記磁性基板の上面を平坦化し、更に、この磁性基板の平
坦な上面に堆積させた第１層の非磁性電気絶縁膜のうち
前記下部薄膜導体コイルを埋め込んだコイル導体部分と
ヘッドの先端となるヘッド先端部分とを分離して除去し
た各除去部に、それぞれ金属磁性材料で構成した第１層
の薄膜磁気コアを埋め込み、前記第１層の非磁性電気絶
縁膜及び前記第１層の薄膜磁気コアの上面を同一の平坦
面とし、更に、前記第１層の薄膜磁気コアのうちの前記
ヘッド先端部分の上面にギャップとなる絶縁膜を堆積
し、このギャップとなる絶縁膜を含む前記第１層の非磁
性電気絶縁膜及び前記第１層の薄膜磁気コアの平坦な上
面に第２層あるいはそれ以上の薄膜磁気コア及び第２層
あるいはそれ以上の非磁性電気絶縁膜をそれぞれ形成
し、この第２層あるいはそれ以上の薄膜磁気コアの上に
上部薄膜導体コイルを形成するようにしたことを特徴と
する薄膜磁気ヘッドの製造方法により、膜堆積及び加工
面が常に段差の小さい平面にでき、従って、磁気コアの
多層化が容易な構造になり、それによって、磁気コア
の、特に捲線部の断面積が大になり記録効率の良い薄膜
磁気ヘッドの製造方法を提供するものである。(Means and Actions for Solving Problems) In order to achieve the above object, the present invention forms a magnetic circuit with a magnetic substrate and a thin film magnetic core, and winds a thin film conductor coil around the thin film magnetic core. In the method for manufacturing a thin wound magnetic head, the lower thin-film conductor coil is embedded in the surface of the non-magnetic electrically insulating material provided in the groove of the magnetic substrate, the upper surface of the magnetic substrate is flattened, and the flatness of the magnetic substrate is further flattened. Of the first layer of non-magnetic electrical insulation film deposited on the upper surface, the coil conductor portion in which the lower thin-film conductor coil is embedded and the head tip portion that is the tip of the head are separated and removed. A first-layer thin-film magnetic core made of a magnetic material is embedded, and the upper surfaces of the first-layer non-magnetic electrical insulating film and the first-layer thin-film magnetic core are the same flat surface. Thin film An insulating film serving as a gap is deposited on the upper surface of the head tip portion of the magnetic core, and the first layer non-magnetic electrical insulating film and the first layer thin film magnetic core including the insulating film serving as the gap are flattened. A second layer or more thin film magnetic cores and a second layer or more non-magnetic electrical insulating film respectively on the upper surface, and an upper thin film conductor coil is formed on the second layer or more thin film magnetic cores. According to the method for manufacturing a thin film magnetic head characterized by being formed, the film deposition and processed surface can always be a flat surface with a small step, thus providing a structure in which the magnetic core can be easily multi-layered. It is intended to provide a method of manufacturing a thin film magnetic head having a large recording area by increasing the cross-sectional area of a core, particularly a winding portion.
（実施例） 本発明になる薄膜磁気ヘッドの製造方法の第１の実施
例について、以下に図面と共に説明する。(Example) A first example of a method of manufacturing a thin-film magnetic head according to the present invention will be described below with reference to the drawings.
第１図は本発明になる薄膜磁気ヘッドの製造方法の第
１の実施例を説明するための図である。FIG. 1 is a diagram for explaining a first embodiment of a method of manufacturing a thin film magnetic head according to the present invention.
同図において、磁性基板１の溝部２にはガラス等の非
磁性電気絶縁材料３があり、その上面にはコイル導体４
が埋め込まれ、この基板１の上面が平坦化される。In the figure, a nonmagnetic electrically insulating material 3 such as glass is provided in the groove 2 of the magnetic substrate 1, and a coil conductor 4 is provided on the upper surface thereof.
Are embedded, and the upper surface of the substrate 1 is flattened.
次に、コイル導体４が埋め込まれた非磁性電気絶縁材
料３を覆うようにAl2O3,SiO2などの非磁性電気絶縁膜８
を堆積し、SiO2,SiNなどの非磁性電気絶縁膜５を、蒸
着，スパッタリング，あるいはCVD（ケミカル・ペーパ
ー・デポジション）などの形成手段により堆積させ、そ
の後、非磁性電気絶縁膜５の一部（前記のコイル導体４
を埋め込んだ部分）を、磁気コア部及びスルー・ホール
部７（後述の第３図参照）として、フォト・リソグリフ
ィ及びプラズマエッチング等のドライ・エッチングによ
り除去する。この時、磁気コア部６は、記録ギャップ部
61とコイル捲線部62とに分離除去される。Next, a non-magnetic electrical insulating film 8 such as Al 2 O 3 or SiO 2 is formed so as to cover the non-magnetic electrical insulating material 3 in which the coil conductor 4 is embedded.
Is deposited, and the non-magnetic electrical insulating film 5 such as SiO 2 or SiN is deposited by forming means such as vapor deposition, sputtering, or CVD (chemical paper deposition). Part (the above-mentioned coil conductor 4
Is removed as a magnetic core portion and a through hole portion 7 (see FIG. 3 described later) by photolithography and dry etching such as plasma etching. At this time, the magnetic core portion 6 is
61 and the coil winding portion 62 are separated and removed.
そして、その上に更に、パーマロイなどの飽和磁束密
度の大なる金属磁性膜を堆積し（すなわち、前記の磁気
コア部（61,62）として除去した部分に埋め込む）、上
面を平坦面にする。そして、第２層の磁気コア部63を堆
積する前に、記録ギャップとなる絶縁層15をヘッドの先
端となる記録ギャップ部（ヘッド先端部61の上面に）堆
積しておく。更に、前記と同様にして、この第２層
５′,6′及び第３層５″,6″を形成する。この時、SiO2
などよりなる非磁性電気絶縁膜5,5′,5″は、磁気コア
部6,6′,6″の部分の断面形状から明らかなように、磁
気コア部６となる部分を異方性プラズマ・エッチング等
の手段により適当なテーパ角（図では、磁気コア部６が
逆台形状になっている）をもって除去できる。このテー
パ角をもたせた方法に基づいて行なうことが重要であ
る。Then, a metal magnetic film having a high saturation magnetic flux density such as permalloy is further deposited thereon (that is, embedded in the portions removed as the magnetic core portions (61, 62)) to make the upper surface flat. Then, before depositing the magnetic core portion 63 of the second layer, the insulating layer 15 serving as the recording gap is deposited on the recording gap portion serving as the tip of the head (on the upper surface of the head tip 61). Further, similarly to the above, the second layers 5 ', 6'and the third layers 5 ", 6" are formed. At this time, SiO 2
The non-magnetic electric insulating film 5,5 ', 5 "made of, for example, the anisotropic core is formed in the magnetic core portion 6,6', 6" It can be removed with a suitable taper angle (in the figure, the magnetic core portion 6 has an inverted trapezoidal shape) by means such as etching. It is important to carry out the method based on this taper angle.
そして、第２図において、磁気コア部６のエッチング
底面幅W1は、常にエッチング上面幅W2に比して小さいの
で、磁気コア部６となるパーマロイなどの金属磁性膜の
層が、その研磨面10及び11において、非磁性電気絶縁膜
５′及び５″のストッパとなり、よって、エッチング
は、この面において完全に終了する。従って、オーバ・
エッチングによるウェハーの破壊は生じない。In FIG. 2, since the etching bottom surface width W 1 of the magnetic core portion 6 is always smaller than the etching upper surface width W 2 , the layer of the metal magnetic film such as permalloy that becomes the magnetic core portion 6 is polished. At surfaces 10 and 11, they serve as stoppers for the non-magnetic electrically insulating films 5'and 5 ", so that the etching is completely terminated at this surface.
No wafer destruction due to etching occurs.
第３図は、基板の上にコイル部及びリード部（引出
線）を形成したウェハーの一部を示す斜視図である。同
図に示すように、非磁性電気絶縁膜５（５′,5″）の上
に絶縁層12を介してコイル導体（上部コイル導体）13及
びリード部14を薄膜堆積し、更にパターニングして形成
する。そして、スルー・ホール部７によってコイル導体
（下部コイル導体）４とコイル導体（上部コイル導体）
13及びリード部14が電気的に接続（導通）される。FIG. 3 is a perspective view showing a part of a wafer having a coil portion and lead portions (leader lines) formed on a substrate. As shown in the figure, a coil conductor (upper coil conductor) 13 and a lead portion 14 are thinly deposited on the non-magnetic electric insulating film 5 (5 ′, 5 ″) via an insulating layer 12, and further patterned. The coil conductor (lower coil conductor) 4 and the coil conductor (upper coil conductor) are formed by the through holes 7.
13 and the lead portion 14 are electrically connected (conducted).
このように構成することにより、第１図のＤ−Ｄ′線
における断面図を示すと共に記録ギャップ部の近傍の断
面図でもある第２図のように、ギャップの上下の層とな
る磁気コア部61,63がともに飽和磁束密度の大なる金属
磁性膜となるため、ギャップ付近で記録時に磁気飽和し
にくくなる。そのため、このような薄膜磁気ヘッドを複
数並べて配置し多トラック磁気ヘッドを構成した場合
に、磁気テープなどの記録媒体上の隣接トラックまで記
録にじみが生じることがなく、隣接トラックに対し磁気
的に良く分離して記録できる多トラック磁気ヘッドを構
成することができる。With this structure, as shown in FIG. 2 which is a sectional view taken along the line DD ′ of FIG. 1 and is a sectional view in the vicinity of the recording gap portion, the magnetic core portion serving as the layers above and below the gap is formed. Since both 61 and 63 form a metal magnetic film having a high saturation magnetic flux density, magnetic saturation hardly occurs at the time of recording near the gap. Therefore, when a plurality of such thin-film magnetic heads are arranged side by side to form a multi-track magnetic head, recording bleeding does not occur up to an adjacent track on a recording medium such as a magnetic tape, and the adjacent track is magnetically improved. A multi-track magnetic head capable of recording separately can be constructed.
次に、第４図及び第５図は本発明の第２の実施例を説
明するための図である。なお、前出の図と同一部分には
同一符号を付して、その説明を省略する。Next, FIGS. 4 and 5 are views for explaining the second embodiment of the present invention. It should be noted that the same parts as those in the above-mentioned drawings are designated by the same reference numerals and the description thereof will be omitted.
この実施例では、前記の第２層及び第３層の非磁性電
気絶縁膜51,52を除去する際に、第４図に示すように、
磁気コア部となる部分の除去パターンを前記の実施例の
ものと変えて、磁気ヘッドのテープ摺動面（第４図のＥ
−Ｅ′線における断面）における磁気コア部の断面積を
小さくして、ギャップ付近の磁気コアを絞り、この部分
に磁束を集中させ、強い磁場を出し、これによって記録
効率を向上させた。In this embodiment, when removing the nonmagnetic electrical insulating films 51 and 52 of the second and third layers, as shown in FIG.
The removal pattern of the portion to be the magnetic core portion is changed from that of the above embodiment, and the tape sliding surface of the magnetic head (E in FIG. 4).
The cross-sectional area of the magnetic core portion along the line (E ') was reduced to narrow the magnetic core near the gap and concentrate the magnetic flux in this portion to generate a strong magnetic field, thereby improving the recording efficiency.
すなわち、第１層の磁気コア部61と第２層の磁気コア
部６′だけがテープ摺動面（Ｅ−Ｅ′線）となるように
し、第３層の磁気コア部６″はテープ摺動面にならない
よう第３層の磁気コア部６″の形成位置を変えている。
なお、第４図では寿命寸法を規定するために非磁性膜16
を付加してある。That is, only the magnetic core portion 61 of the first layer and the magnetic core portion 6'of the second layer serve as the tape sliding surface (EE 'line), and the magnetic core portion 6 "of the third layer is tape-sliding. The formation position of the magnetic core portion 6 ″ of the third layer is changed so as not to be the moving surface.
In FIG. 4, the non-magnetic film 16 is used to define the life size.
Is added.
また、第５図は第４図のＥ−Ｅ′線における断面図で
ある。FIG. 5 is a sectional view taken along the line EE 'in FIG.
なお、以上の説明は、金属磁性膜が捲線コイルの一部
を兼ねるような構成で行なったが、磁気的に、及びコイ
ル抵抗値の関係から別の製造プロセスによったものでも
良く、これらは本発明の内容を規定するものではない。In the above description, the metal magnetic film also serves as a part of the wound coil, but it may be manufactured by another manufacturing process magnetically and in view of the coil resistance value. It does not define the content of the present invention.
（発明の効果） 以上の如く、本発明の薄膜磁気ヘッドの製造方法によ
れば、次のような特長を有する。(Effects of the Invention) As described above, the method of manufacturing a thin film magnetic head of the present invention has the following features.
表面に段差のない平面の基板が得られるので、その上
に同様の製造プロセスを繰り返し多層の薄膜磁気コアを
形成することができ、薄膜磁気コアの捲線部の断面積を
大きくすることができるので、記録効率及び再生効率を
向上でき、磁気飽和しにくくなる。Since a flat substrate with no step on the surface can be obtained, the same manufacturing process can be repeated thereon to form a multilayer thin film magnetic core, and the cross-sectional area of the winding part of the thin film magnetic core can be increased. The recording efficiency and the reproducing efficiency can be improved, and the magnetic saturation hardly occurs.
また、多層構造の薄膜磁気コアを形成することによ
り、ギャップ付近の磁気コアを絞れ、磁束を集中させ、
強い磁場を出せるようになるので、記録効率を向上でき
る。Also, by forming a thin-film magnetic core with a multi-layer structure, the magnetic core near the gap can be squeezed to concentrate the magnetic flux,
Since a strong magnetic field can be generated, recording efficiency can be improved.
非磁性電気絶縁膜の磁気コアの部分やスルー・ホール
部を除去するためのフォト・リソグラフィ及びエッチン
グの処理は、段差の小さい平坦部（基板面）で行なわれ
るので、段差部での断線などの問題がなく、磁気的な歪
が生じにくく、精度向上が図れる。Since the photolithography and etching processes for removing the magnetic core part and the through hole part of the non-magnetic electric insulating film are performed on the flat part (substrate surface) with a small step, there is no disconnection at the step part. There is no problem, magnetic distortion is unlikely to occur, and accuracy can be improved.
磁気コアの形状を決めるのに、磁性膜のエッチングで
はなく、SiO2などの非磁性電気絶縁膜を精度の良いプラ
ズマ・エッチング等のドライ・エッチングにより除去し
ているので、磁気コアのエッチング時に生じる下地スト
ッパあるいは異常エッチングなどによるパターン乱れ，
欠損などの問題がなくなり歩留りが向上する。To determine the shape of the magnetic core, the non-magnetic electrical insulating film such as SiO 2 is removed by dry etching such as accurate plasma etching instead of etching the magnetic film. Distortion of pattern due to base stopper or abnormal etching,
The problems such as defects are eliminated and the yield is improved.
記録ギャップの上下の層となる磁気コア部がとに飽和
磁束密度の大なる金属磁性材料で構成しているので、キ
ャップ付近で記録時に磁気飽和しにくくなる。そのた
め、多トラック磁気ヘッドを構成した場合に、記録媒体
上の隣接トラックまで記録にじみが生じることがなく、
隣接トラックに対し磁気的に良く分離して記録できる等
の種々の効果が得られる。Since the magnetic core portions serving as the layers above and below the recording gap are made of a metallic magnetic material having a high saturation magnetic flux density, magnetic saturation hardly occurs at the time of recording near the cap. Therefore, when a multi-track magnetic head is constructed, recording bleeding does not occur up to adjacent tracks on the recording medium,
Various effects can be obtained such that magnetic recording can be magnetically separated from the adjacent tracks.
第１図及び第２図は本発明になる薄膜磁気ヘッドの製造
方法の第１実施例を説明するための図であり、第１図は
ヘッド要部の側断面図、第２図は第１図のＤ−Ｄ′線に
おける断面図、第３図は第１実施例の方法による最終的
なプロセス状態を示すヘッドの斜視図である。 第４図及び第５図は第２の実施例を説明するための図で
あり、第４図はヘッド要部の側断面図、第５図は第４図
のＥ−Ｅ′線における断面図である。 １……磁性基板、２……溝部、３……非磁性電気絶縁材
料、４……コイル導体、5,5′,5″,51,52……非磁性電
気絶縁膜、6,6′,6″,61,62,63……磁気コア部、７……
スルー・ホール部、８……非磁性電気絶縁膜、10,11…
…研磨面、12……絶縁層、13……コイル導体、14……リ
ード部、15,16……絶縁層。1 and 2 are views for explaining a first embodiment of a method of manufacturing a thin film magnetic head according to the present invention. FIG. 1 is a side sectional view of a main part of the head, and FIG. FIG. 3 is a sectional view taken along the line D-D 'in FIG. 3, and FIG. 3 is a perspective view of the head showing a final process state by the method of the first embodiment. FIGS. 4 and 5 are views for explaining the second embodiment. FIG. 4 is a side sectional view of the main part of the head, and FIG. 5 is a sectional view taken along the line EE 'of FIG. Is. 1 ... Magnetic substrate, 2 ... Groove part, 3 ... Non-magnetic electric insulating material, 4 ... Coil conductor, 5,5 ', 5 ", 51,52 ... Non-magnetic electric insulating film, 6,6', 6 ″, 61, 62, 63 …… Magnetic core, 7 ……
Through holes, 8 ... Non-magnetic electrical insulation film, 10, 11 ...
… Polished surface, 12… Insulating layer, 13… Coil conductor, 14… Lead part, 15,16… Insulating layer.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭57−113409（ＪＰ，Ａ) 特開 昭59−221819（ＪＰ，Ａ) 実開 昭55−128227（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-57-113409 (JP, A) JP-A-59-221819 (JP, A) Actual development Sho-55-128227 (JP, U)
Claims (1)
を形成し、前記薄膜磁気コアに薄膜導体コイルを捲線し
てなる薄捲磁気ヘッドの製造方法において、 前記磁性基板の溝部に設けた非磁性電気絶縁材料の表面
に下部薄膜導体コイルを埋め込み、前記磁性基板の上面
を平坦化し、 更に、この磁性基板の平坦な上面に堆積させた第１層の
非磁性電気絶縁膜のうち前記下部薄膜導体コイルを埋め
込んだコイル導体部分とヘッドの先端となるヘッド先端
部分とを分離して除去した各除去部に、それぞれ金属磁
性材料で構成した第１層の薄膜磁気コアを埋め込み、前
記第１層の非磁性電気絶縁膜及び前記第１層の薄膜磁気
コアの上面を同一の平坦面とし、 更に、前記第１層の薄膜磁気コアのうちの前記ヘッド先
端部分の上面にギャップとなる絶縁膜を堆積し、このギ
ャップとなる絶縁膜を含む前記第１層の非磁性電気絶縁
膜及び前記第１層の薄膜磁気コアの平坦な上面に第２層
あるいはそれ以上の薄膜磁気コア及び第２層あるいはそ
れ以上の非磁性電気絶縁膜をそれぞれ形成し、この第２
層あるいはそれ以上の薄膜磁気コアの上に上部薄膜導体
コイルを形成するようにしたことを特徴とする薄膜磁気
ヘッドの製造方法。1. A method for manufacturing a thin wound magnetic head, comprising a magnetic circuit formed by a magnetic substrate and a thin film magnetic core, and winding a thin film conductor coil around the thin film magnetic core. The lower thin film conductor coil is embedded in the surface of the magnetic electric insulating material, the upper surface of the magnetic substrate is flattened, and further, the lower thin film of the first layer of non-magnetic electric insulating film deposited on the flat upper surface of the magnetic substrate. A first-layer thin-film magnetic core made of a metal magnetic material is embedded in each of the removed portions obtained by separating and removing the coil conductor portion in which the conductor coil is embedded and the head tip portion that is the tip of the head. The non-magnetic electrical insulating film and the upper surface of the first-layer thin-film magnetic core are the same flat surface, and further, an insulating film that forms a gap on the upper surface of the head tip portion of the first-layer thin-film magnetic core. And a second layer or more thin film magnetic cores and a second layer on the flat upper surface of the first layer non-magnetic electrical insulating film and the first layer thin film magnetic core including the insulating film that becomes the gap. Alternatively, a non-magnetic electric insulation film of more than that is formed, and the second
A method of manufacturing a thin-film magnetic head, characterized in that an upper thin-film conductor coil is formed on a thin-film magnetic core of one or more layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60020515A JP2551749B2 (en) | 1985-02-05 | 1985-02-05 | Method of manufacturing thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60020515A JP2551749B2 (en) | 1985-02-05 | 1985-02-05 | Method of manufacturing thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61178711A JPS61178711A (en) | 1986-08-11 |
| JP2551749B2 true JP2551749B2 (en) | 1996-11-06 |
Family
ID=12029290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60020515A Expired - Lifetime JP2551749B2 (en) | 1985-02-05 | 1985-02-05 | Method of manufacturing thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2551749B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69424456T2 (en) * | 1993-03-02 | 2001-01-18 | Sony Corp | Magnetic head and method for its manufacture |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55128227U (en) * | 1979-03-05 | 1980-09-10 | ||
| JPS57113409A (en) * | 1980-12-30 | 1982-07-14 | Comput Basic Mach Technol Res Assoc | Thin-film head |
-
1985
- 1985-02-05 JP JP60020515A patent/JP2551749B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61178711A (en) | 1986-08-11 |
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