JPS6129499Y2 - - Google Patents

Info

Publication number
JPS6129499Y2
JPS6129499Y2 JP1981004610U JP461081U JPS6129499Y2 JP S6129499 Y2 JPS6129499 Y2 JP S6129499Y2 JP 1981004610 U JP1981004610 U JP 1981004610U JP 461081 U JP461081 U JP 461081U JP S6129499 Y2 JPS6129499 Y2 JP S6129499Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
air introduction
photoresist
head
spinner head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981004610U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57119774U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981004610U priority Critical patent/JPS6129499Y2/ja
Publication of JPS57119774U publication Critical patent/JPS57119774U/ja
Application granted granted Critical
Publication of JPS6129499Y2 publication Critical patent/JPS6129499Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1981004610U 1981-01-16 1981-01-16 Expired JPS6129499Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981004610U JPS6129499Y2 (enExample) 1981-01-16 1981-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981004610U JPS6129499Y2 (enExample) 1981-01-16 1981-01-16

Publications (2)

Publication Number Publication Date
JPS57119774U JPS57119774U (enExample) 1982-07-24
JPS6129499Y2 true JPS6129499Y2 (enExample) 1986-08-30

Family

ID=29803023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981004610U Expired JPS6129499Y2 (enExample) 1981-01-16 1981-01-16

Country Status (1)

Country Link
JP (1) JPS6129499Y2 (enExample)

Also Published As

Publication number Publication date
JPS57119774U (enExample) 1982-07-24

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