JPS6129134A - Mounting apparatus - Google Patents

Mounting apparatus

Info

Publication number
JPS6129134A
JPS6129134A JP14861784A JP14861784A JPS6129134A JP S6129134 A JPS6129134 A JP S6129134A JP 14861784 A JP14861784 A JP 14861784A JP 14861784 A JP14861784 A JP 14861784A JP S6129134 A JPS6129134 A JP S6129134A
Authority
JP
Japan
Prior art keywords
axis
mounting
dispensing
television camera
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14861784A
Other languages
Japanese (ja)
Inventor
Toshiya Nemoto
根本 俊哉
Masayoshi Yamaguchi
政義 山口
Koichi Chiba
宏一 千葉
Katsuhiko Kaneda
兼田 克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14861784A priority Critical patent/JPS6129134A/en
Publication of JPS6129134A publication Critical patent/JPS6129134A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To simultaneously proceed in both dispensing and mounting steps by providing position recognizing steps in the both dispensing and mounting steps to accurately recognize the positions. CONSTITUTION:A mounting apparatus has the first X-axis-Y-axis drive table provided movably in X-axis and Y-axis directions integrally with a television camera 6 and a dispensing head 5, and the second X-axis-Y-axis drive table provided movably in X-axis and Y-axis directions integrally with a television camera 6 and a mounting head 8. When the dispensing position is detected, the image output of the camera 6 is reproduced, and when the mounting position is detected, the image output of the camera 9 is reproduced by a computer control.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は多種の部品を一つの部品上に自動的にマウン
トすることが可能なマウント装置に開方る。。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention is directed to a mounting device that can automatically mount a variety of components onto one component. .

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

印刷された回路を有する厚膜回路の半導体−ツブ取着位
置にディスペンスヘッドで接着剤を点滴し、この点滴さ
れた接着剤上に半導体チップを載置してマウントする装
置は公知である。このエリカマラント装置での自動マウ
ントの要求される厚膜回路が急激に増加してハる。例え
ば厚膜回路の大形化が進み、マウントされる半導体チッ
プの数や種類が増加し、例えば1基板に40種類位の部
品を挿入するものの自動マウントが要望されている。
An apparatus is known in which a dispense head drips adhesive onto a semiconductor-tube attachment location of a thick film circuit having a printed circuit, and a semiconductor chip is placed and mounted on the dripped adhesive. The number of thick film circuits that require automatic mounting with this Erica Marant device is rapidly increasing. For example, thick film circuits are becoming larger and the number and types of semiconductor chips to be mounted are increasing, and there is a demand for automatic mounting of, for example, about 40 types of components inserted onto one board.

〔発明の目的〕[Purpose of the invention]

この4発明は上記点に鑑みなされたもので多品種の電子
部品°も高速で自動的に組み込むことができるマウント
方法を提供するものであ・る。
These four inventions have been made in view of the above points, and provide a mounting method that can automatically mount a wide variety of electronic components at high speed.

(発明、の概要〕 移送された第1の部品を第1のテレビカメラで撮像して
位置検出し、この第1の部品にディスペンスヘッドによ
り接着性材料を取着したのち、マウント位置に移送し、
第2のテレビカメラで撮像して位置検出したのち、上記
接着性材料上に第2の部品をマウントヘッドにより移送
して取着する装置において、上記第1のテレビカメラお
よびディスペンスヘッドが一体にX軸方向Y軸方向に移
動可能な如く設けられた第1のX軸−Y軸駆動テーブル
と、上記第2のテレビカメラおよびマウントヘッドが一
体にX軸方向Y軸方向に移動可能な如く設けられた第2
のX軸−Y軸駆動テーブルとを具備しディスペンス作業
およびマウント作業を同時に実行可能ならしめたマウン
ト装置を得るものである。
(Summary of the Invention) The transferred first component is imaged by a first television camera to detect its position, an adhesive material is attached to the first component by a dispensing head, and then the first component is transferred to a mounting position. ,
In the apparatus for capturing an image with a second television camera and detecting its position, the second component is transferred and attached onto the adhesive material by a mount head, in which the first television camera and the dispensing head are integrally mounted on the adhesive material. A first X-axis-Y-axis driving table is provided so as to be movable in the axial direction and the Y-axis direction, and the second television camera and the mount head are provided so as to be movable together in the X-axis direction and the Y-axis direction. second
The present invention provides a mounting device which is equipped with an X-axis and Y-axis drive table and is capable of performing dispensing work and mounting work at the same time.

〔発明の実施例〕[Embodiments of the invention]

次に本発明装置を半導体チップのマウントに適用した実
施例を図面を参照して説明する。
Next, an embodiment in which the device of the present invention is applied to mounting a semiconductor chip will be described with reference to the drawings.

第1の部品例えば厚膜回路基板例えばセラミック基板上
に配線パターンが形成された大きさ例えば横3cm長さ
5 CITLのセラミック回路基板(図示せず)が、キ
ャリア(1)に載置されてマガジン(2)内に多段に積
載される。このマガジン(2)は装着されると、下段か
ら1段づつ抜き取られるようにマガジン(2)がローダ
(3)の下方への移動駆動により制御を受ける。即ち、
マガジン(2)の下段に位11工して一定間隔に配置さ
れたベルト(4)が搬送状態にドライブされておシ、マ
ガジン(2)がローダ(3)の下方への移動駆動でキャ
リア(1)が上記ベルト(4)上に載置された状態にな
るとマガジン(2)の下方移動は停止し。
A first component, such as a thick film circuit board, such as a ceramic circuit board, on which a wiring pattern is formed. A CITL ceramic circuit board (not shown) having a size of, for example, 3 cm in width and 5 cm in length, is placed on a carrier (1) and placed in a magazine. (2) Loaded in multiple stages inside. When this magazine (2) is loaded, the magazine (2) is controlled by the loader (3) to move it downward so that it is pulled out one by one from the lower stage. That is,
Belts (4) placed at regular intervals on the lower stage of the magazine (2) are driven into a conveying state, and the magazine (2) is driven by the downward movement of the loader (3) to carry the carrier ( 1) is placed on the belt (4), the downward movement of the magazine (2) stops.

キャリヤ(])はディスペンスヘット責5)下方のディ
スペンス位置に直線的に搬送され停止する。この位置で
キャリヤ(])上に載置された回路基板幻:デイスベン
スヘット責5)上に搭載されたテレビカメラ例えば白黒
テレビカメラ(6)により撮像され、半導体チップ(力
を取着するための部分を自動的に検出する。
The carrier ( ) is linearly conveyed to the dispensing position below the dispensing head 5) and stopped there. In this position, the circuit board mounted on the carrier () is imaged by a television camera, for example a black and white television camera (6) mounted on the semiconductor chip automatically detect the part.

即ち上記回路基板の第2の部品例えば半導体チップ(7
)取着位置の標準パターンは手動で予めメモリ(図示せ
ず)に記憶されている。従って、その都度到来する回路
基板の半導体チップ(7)の取着位置を上記テレビカメ
ラ(6)で撮像し、この担像出力を2値化した信号と上
記標準パターンと照合して位置ずれ量を算出し、この位
置ずれ量から実際の半導体チップ取着位置を認識して、
との部分に半導体チップ(力を固着するための材料例え
ば接着性を有する銀ペーストを取着例えば点滴する。こ
のような工程を実行するためディスペンスヘット責5)
はX−Y軸駆動テーブル(図示せず)上に載置される。
That is, the second component of the circuit board, for example, a semiconductor chip (7
) A standard pattern of attachment positions is manually stored in advance in a memory (not shown). Therefore, the mounting position of the semiconductor chip (7) on the circuit board arriving each time is imaged by the television camera (6), and the binarized signal of this image carrier output is compared with the standard pattern to determine the positional deviation amount. is calculated, and the actual mounting position of the semiconductor chip is recognized from this positional deviation amount.
Attach a material such as adhesive silver paste to the part of the semiconductor chip (for example, inject a material for fixing the force, for example, silver paste with adhesive properties.To carry out such a process, dispense head 5)
is placed on an X-Y axis drive table (not shown).

とれて自動化されたディスペンス工程を終了する。この
後、キャリヤ(1)はベルト(4)により搬送されてマ
ウント位置で停止する。このマウント位置への搬送と同
時に次のキャリヤをマガジン(2)下方に駆動してディ
スペンス位置に搬送する。このディスペンス位置への到
来とマウント位置への到来は同期されてもよいし、タイ
ムシフトされてもよい。
This completes the automated dispensing process. After this, the carrier (1) is conveyed by the belt (4) and stops at the mounting position. Simultaneously with the conveyance to this mounting position, the next carrier is driven below the magazine (2) and conveyed to the dispensing position. The arrival at the dispense position and the arrival at the mount position may be synchronized or time-shifted.

マウント位置では、マウントヘッド(8)上に搭載され
ているテレビカメラ(9)によ)撮像し、上記半導体チ
ップ(7)の取着位置を自動的に検知する。検知手段は
上記ディスペンス作業位置の検知と同様にパターン認識
技術で自動的に行う。
At the mounting position, an image is taken by a television camera (9) mounted on the mounting head (8), and the mounting position of the semiconductor chip (7) is automatically detected. The detection means automatically detects the dispensing work position using pattern recognition technology, similar to the above-mentioned detection of the dispensing work position.

>の白I+ih I’hh Iff 1.’r m 棟
k 1羽−A: mマ+スト −y h 7 kヘッド
(d)により、θテープ/L/(taiから取り挙は例
えば吸着手段により取多挙は上記位置検出した半導体チ
ップ(7)の取着位置に載’nし、上記ヘッド(8)に
引き続き押圧力を与えて押圧し1回路基板に半導体チッ
プ(7)を取着する。このような作業を実行するためV
ラントヘッド(8)はX−Y4Q[動テーブル(図示せ
ず)上に載置される。これでマウント工程を終了する。
>White I+ih I'hh Iff 1. 'r m building k 1 bird - A: m ma + strike -y h 7 k The head (d) picks up the θ tape /L/ Place the semiconductor chip (7) on the mounting position of the circuit board 1, and continue applying pressure to the head (8) to attach the semiconductor chip (7) to the circuit board.
The runt head (8) is placed on an X-Y4Q moving table (not shown). This completes the mounting process.

このマウント工程とディスペンス工程は同時に通行され
、各工程の終了は同時でもよい。ディスペンスエ穐の方
が所要時間が長い場即ちマウント工程を終了したキャリ
ヤ(1)を搬送し受取り用マガジン(至)内に挿入され
る。この受取〕用マガジンは上段から挿入されるように
、最初一番深い位置に設置され、1役人る毎にアンロー
ダ収→で駆動して上方に持ち挙げfly、wJする。頂
度一段目毎の位置で停止する間欠駆動が行なわれる。
The mounting process and the dispensing process may be performed at the same time, and each process may be completed at the same time. The dispensing machine requires a longer time, that is, the carrier (1) that has completed the mounting process is transported and inserted into the receiving magazine (toward). This receiving magazine is first installed at the deepest position so that it is inserted from the top, and every time an operator is inserted, it is driven by the unloader and lifted upward to fly and wj. Intermittent driving is performed in which the motor stops at every first step of the apex position.

このローダ、アンローダ(3)Iの間欠動作は総てコン
ビ島−夕の制御によル婁行され、さらにキャリヤ(1)
の搬送についても、ディスペンス位置、マウント位置 
e、−、J−一での停止、夫々の動作開始、終了、そし
て搬送などの制御プログラムも総てコンビエータによ多
制御される。
All intermittent operations of the loader and unloader (3)I are carried out under the control of the combination carrier (1).
Regarding transportation, dispense position, mounting position
Control programs such as stopping at e, -, and J-1, starting and ending each operation, and conveyance are all controlled by the combiator.

他方、上記θテーブルαQに載置される半導体チップは
次のようにして搬送される。即ち半導体チップ(7)例
えばICチップの大きさに凹部を多数予め定められた配
列で設けられるトレイa9が多数、収納容器α0に予め
定められた状態に配列される。夫々のトレイ0内に収容
されるICは同一種類でもよいが異なる種類でもよい。
On the other hand, the semiconductor chips placed on the θ table αQ are transported in the following manner. That is, a large number of trays a9 each having a large number of recesses arranged in a predetermined arrangement according to the size of semiconductor chips (7), for example, IC chips, are arranged in a predetermined manner in the storage container α0. The ICs accommodated in each tray 0 may be of the same type or may be of different types.

また、他のトレイ←9に収容されるICとは大きさ種類
が異なってもよいようにストッカ方式で構成されている
。上記収納容器aeにはマークが付されておシ、このマ
ークを予め手動検知してメモリに記憶する(ティーチン
グ)ととにより、収納容器(16)の位置ズレ量として
記憶される。とのズレ量の基にX−Y方向に駆動するピ
ックアップヘッドαηにより一つのトレイαつ内から順
次ICチップ(7)を取シ出す。例えばピックアップヘ
ッド卸により吸着して上記θテーブルQl上に載置され
る。θテーブル(10)は多数吸着孔の設けられた回転
位置調整可能な円板である。このθテーブル(101は
回転円板(I8に固定され、独立して回転制御されるよ
うに設けられている。従って、収納容器Hが移送された
ICチップはθテーブル(10)を回転駆動することに
よJ ICチップ(力の方向を修正する。
Further, the IC is configured in a stocker manner so that the size and type of ICs may be different from those of the ICs accommodated in other trays←9. A mark is attached to the storage container ae, and by manually detecting this mark in advance and storing it in a memory (teaching), it is stored as the amount of positional deviation of the storage container (16). IC chips (7) are sequentially taken out from one tray α by a pickup head αη driven in the X-Y direction based on the amount of deviation from the tray. For example, it is attracted by a pickup head and placed on the θ table Ql. The θ table (10) is a circular plate provided with a large number of suction holes and whose rotational position can be adjusted. This θ table (101) is fixed to a rotating disk (I8) and is provided so as to be independently rotationally controlled. Therefore, the IC chip to which the storage container H is transferred rotates the θ table (10). Especially the JIC chip (which corrects the direction of force).

この修正操作後、回転円板Uをマウントヘッド方向に回
転移送する例えば180度回転する。この180度回転
の場合にはθテーブル顛は円板Hの中心を通る直線上に
2個設けられる。これはマウント位置への逅送位置によ
って決定される。120度回軸回転合にはθテープ、/
I/(10)は3個となる。−上記ICチップの方向修
正手段はテレビカメラ(1!Jよりの撮像出力と予め記
憶された標準位置情報との比較手段によって位置ずれ量
を算出し、この位置ずれ量に基づき、θテーブル鵠の回
転量を算出して修正する。またとの位置ずれ量の算出の
他の手段はカメラ←1出力を2値化したのち、水平方向
に走査し     1て被検出体の出現を検出し、検出
後当該検出位置で垂直方向に走査し、この垂直走査によ
る被検出体の中央位置を検出し、この中央位置で水平走
査する手順を繰シ返えすことにより被検出体の中心位置
を求め、予め記憶された位置との位置ずれ量を検出する
方法でもよい。またテレビモニタ(21+2])が設置
され、モニタ(20)はテレビカメラ(11の撮像出力
を表示し、モニタ(財)はテレビカメラ(6) (9)
の撮像出力を切シ換えて表示する。即ちディスペンス位
置の検出時はテレビカメラ(6)の撮像出力を再生し。
After this correction operation, the rotary disk U is rotationally transferred toward the mount head, for example, rotated by 180 degrees. In the case of this 180 degree rotation, two θ table frames are provided on a straight line passing through the center of the disk H. This is determined by the delivery position to the mounting position. θ tape for 120 degree rotation, /
I/(10) becomes 3 pieces. - The direction correction means for the IC chip calculates the amount of positional deviation by means of comparing the imaging output from the television camera (1!J) with pre-stored standard position information, and based on this amount of positional deviation, the The amount of rotation is calculated and corrected.Another way to calculate the amount of positional deviation is to binarize the output of the camera, scan it in the horizontal direction, and then detect the appearance of the object to be detected. After that, scan in the vertical direction at the detection position, detect the center position of the detected object by this vertical scanning, and repeat the procedure of horizontal scanning at this central position to find the center position of the detected object in advance. A method of detecting the amount of positional deviation from the stored position may also be used.Also, a television monitor (21+2) is installed, and the monitor (20) displays the imaging output of the television camera (11). (6) (9)
Switch and display the imaging output. That is, when detecting the dispense position, the imaging output of the television camera (6) is reproduced.

マウント位置の検出時はテレビカメラ(9)の撮像出力
を再生するようにコンピュータでコントロールする。
When the mount position is detected, the computer controls the camera to play back the image output from the television camera (9).

このようにして、ディスペンス作業、マウント作業が回
路基板の搬送路にて自動的に実施されるため総て自動的
に実施でき、省人化に効果がある。
In this way, the dispensing work and the mounting work are automatically performed on the circuit board conveyance path, so that they can all be performed automatically, which is effective in reducing labor.

上記実施例では半導体チップのマウントについて説明し
たが、半導体チップに限らず抵抗、コンデンサ、ダイオ
ードなどの電子部品などのマウントもできることは説明
するまでもないことである。
In the above embodiment, mounting of a semiconductor chip has been described, but it goes without saying that it is possible to mount not only semiconductor chips but also electronic components such as resistors, capacitors, and diodes.

〔発明の効果〕〔Effect of the invention〕

LJ l−雪φEII3+、+−t−らr大益日旦1/
41七−dディスペンス工程およびマウント工程に夫々
位置認識手段を設けているので、正確に位置認識して両
工程同時に進行でき、高速マウント化に大きな効果があ
る。
LJ l-snow φEII3+, +-t-ra r great profit day 1/
417-d Since a position recognition means is provided in each of the dispensing process and the mounting process, the position can be accurately recognized and both processes can be performed simultaneously, which is highly effective in achieving high-speed mounting.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明装置の実施例を説明するための斜視図
である。 1・・・キャリヤ    4・・・ベルト6.9.19
・・・TVカメラ    7・・・半導体チップ代理人
 弁理士  則 近 憲 佑 ほか1名
FIG. 1 is a perspective view for explaining an embodiment of the device of the present invention. 1...Carrier 4...Belt 6.9.19
...TV camera 7...Semiconductor chip agent Patent attorney Kensuke Chika and 1 other person

Claims (1)

【特許請求の範囲】[Claims] (1)移送された第1の部品を第1のテレビカメラで撮
像して位置検出し、この第1の部品にディスペンスヘッ
ドにより接着性材料を取着したのち、マウント位置に移
送し、第2のテレビカメラで撮像して位置検出したのち
、上記接着性材料上に第2の部品をマウントヘッドによ
り移送して取着する装置において、上記第1のテレビカ
メラおよびディスペンスヘッドが一体にX軸方向Y軸方
向に移動可能な如く設けられた第1のX軸−Y軸駆動テ
ーブルと、上記第2のテレビカメラおよびマウントヘッ
ドが一体にX軸方向Y軸方向に移動可能な如く設けられ
た第2のX軸−Y軸駆動テーブルとを具備しディスペン
ス作業およびマウント作業を同時に実行可能ならしめた
ことを特徴とするマウント装置。
(1) The transferred first component is imaged with a first television camera to detect its position, adhesive material is attached to this first component by a dispensing head, and then transferred to the mounting position, and the second component is In the device, the first television camera and the dispensing head are integrally mounted in the X-axis direction, in which the first television camera and the dispensing head are integrally moved in the X-axis direction. A first X-axis-Y-axis driving table is provided so as to be movable in the Y-axis direction, and a first X-axis-Y-axis drive table is provided so as to be movable in the X-axis direction and the Y-axis direction. 1. A mounting device comprising two X-axis and Y-axis drive tables, which enables dispensing work and mounting work to be performed simultaneously.
JP14861784A 1984-07-19 1984-07-19 Mounting apparatus Pending JPS6129134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14861784A JPS6129134A (en) 1984-07-19 1984-07-19 Mounting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14861784A JPS6129134A (en) 1984-07-19 1984-07-19 Mounting apparatus

Publications (1)

Publication Number Publication Date
JPS6129134A true JPS6129134A (en) 1986-02-10

Family

ID=15456786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14861784A Pending JPS6129134A (en) 1984-07-19 1984-07-19 Mounting apparatus

Country Status (1)

Country Link
JP (1) JPS6129134A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04151804A (en) * 1990-10-15 1992-05-25 Nec Corp Fuse containing varistor
JPH04162411A (en) * 1990-10-24 1992-06-05 Nec Corp Electric double layer capacitor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763836A (en) * 1980-10-04 1982-04-17 Shinkawa Ltd Die bonding apparatus
JPS57169250A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Bonding method for pellet

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5763836A (en) * 1980-10-04 1982-04-17 Shinkawa Ltd Die bonding apparatus
JPS57169250A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Bonding method for pellet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04151804A (en) * 1990-10-15 1992-05-25 Nec Corp Fuse containing varistor
JPH04162411A (en) * 1990-10-24 1992-06-05 Nec Corp Electric double layer capacitor

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