JPS61290641A - 試料像のスケール目盛表示装置 - Google Patents

試料像のスケール目盛表示装置

Info

Publication number
JPS61290641A
JPS61290641A JP60130902A JP13090285A JPS61290641A JP S61290641 A JPS61290641 A JP S61290641A JP 60130902 A JP60130902 A JP 60130902A JP 13090285 A JP13090285 A JP 13090285A JP S61290641 A JPS61290641 A JP S61290641A
Authority
JP
Japan
Prior art keywords
length
sample image
scale
display
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60130902A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548573B2 (enrdf_load_stackoverflow
Inventor
Takashi Kimura
隆志 木村
Tetsuo Koseki
哲郎 小関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP60130902A priority Critical patent/JPS61290641A/ja
Publication of JPS61290641A publication Critical patent/JPS61290641A/ja
Publication of JPH0548573B2 publication Critical patent/JPH0548573B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP60130902A 1985-06-18 1985-06-18 試料像のスケール目盛表示装置 Granted JPS61290641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60130902A JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60130902A JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Publications (2)

Publication Number Publication Date
JPS61290641A true JPS61290641A (ja) 1986-12-20
JPH0548573B2 JPH0548573B2 (enrdf_load_stackoverflow) 1993-07-21

Family

ID=15045392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60130902A Granted JPS61290641A (ja) 1985-06-18 1985-06-18 試料像のスケール目盛表示装置

Country Status (1)

Country Link
JP (1) JPS61290641A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001357812A (ja) * 2000-06-12 2001-12-26 Jeol Ltd 試料観察画像表示装置
US6388747B2 (en) 1998-11-30 2002-05-14 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
CN106643508A (zh) * 2017-02-28 2017-05-10 成都中科创达软件有限公司 一种用于规则三维对象体积测量的方法和系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166770A (enrdf_load_stackoverflow) * 1974-12-06 1976-06-09 Hitachi Ltd
JPS5347262A (en) * 1976-10-09 1978-04-27 Akashi Seisakusho Kk Device for indicating scale of scanning electron microscope
JPS55128241A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Sample image display device
JPS6086907U (ja) * 1983-11-18 1985-06-14 日本電子株式会社 電子線像表示装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166770A (enrdf_load_stackoverflow) * 1974-12-06 1976-06-09 Hitachi Ltd
JPS5347262A (en) * 1976-10-09 1978-04-27 Akashi Seisakusho Kk Device for indicating scale of scanning electron microscope
JPS55128241A (en) * 1979-03-28 1980-10-03 Hitachi Ltd Sample image display device
JPS6086907U (ja) * 1983-11-18 1985-06-14 日本電子株式会社 電子線像表示装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6388747B2 (en) 1998-11-30 2002-05-14 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6421122B2 (en) 1998-11-30 2002-07-16 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6476913B1 (en) 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6480279B2 (en) 1998-11-30 2002-11-12 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6493082B2 (en) * 1998-11-30 2002-12-10 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6504609B2 (en) 1998-11-30 2003-01-07 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6567168B2 (en) 1998-11-30 2003-05-20 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6759655B2 (en) 1998-11-30 2004-07-06 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6903821B2 (en) * 1998-11-30 2005-06-07 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
JP2001357812A (ja) * 2000-06-12 2001-12-26 Jeol Ltd 試料観察画像表示装置
CN106643508A (zh) * 2017-02-28 2017-05-10 成都中科创达软件有限公司 一种用于规则三维对象体积测量的方法和系统

Also Published As

Publication number Publication date
JPH0548573B2 (enrdf_load_stackoverflow) 1993-07-21

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