JPS6128226B2 - - Google Patents
Info
- Publication number
- JPS6128226B2 JPS6128226B2 JP49079658A JP7965874A JPS6128226B2 JP S6128226 B2 JPS6128226 B2 JP S6128226B2 JP 49079658 A JP49079658 A JP 49079658A JP 7965874 A JP7965874 A JP 7965874A JP S6128226 B2 JPS6128226 B2 JP S6128226B2
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- region
- acoustic wave
- integrated circuit
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 description 18
- 239000010409 thin film Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- KWLSQQRRSAWBOQ-UHFFFAOYSA-N dipotassioarsanylpotassium Chemical compound [K][As]([K])[K] KWLSQQRRSAWBOQ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079658A JPS519386A (en) | 1974-07-10 | 1974-07-10 | Handotaishusekikairosochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079658A JPS519386A (en) | 1974-07-10 | 1974-07-10 | Handotaishusekikairosochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS519386A JPS519386A (en) | 1976-01-26 |
| JPS6128226B2 true JPS6128226B2 (enrdf_load_stackoverflow) | 1986-06-28 |
Family
ID=13696231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49079658A Granted JPS519386A (en) | 1974-07-10 | 1974-07-10 | Handotaishusekikairosochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS519386A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7832604B2 (en) | 2006-02-21 | 2010-11-16 | Spotless Plastics Pty. Ltd. | Variable length coordinate set hanger |
-
1974
- 1974-07-10 JP JP49079658A patent/JPS519386A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS519386A (en) | 1976-01-26 |
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