JPS61281866A - 超微粒子ビ−ムを用いた膜形成法及び装置 - Google Patents

超微粒子ビ−ムを用いた膜形成法及び装置

Info

Publication number
JPS61281866A
JPS61281866A JP12271785A JP12271785A JPS61281866A JP S61281866 A JPS61281866 A JP S61281866A JP 12271785 A JP12271785 A JP 12271785A JP 12271785 A JP12271785 A JP 12271785A JP S61281866 A JPS61281866 A JP S61281866A
Authority
JP
Japan
Prior art keywords
ultrafine particle
film
particle beam
chamber
film formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12271785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250985B2 (enExample
Inventor
Toshiya Ichihashi
鋭也 市橋
Sumio Iijima
澄男 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP12271785A priority Critical patent/JPS61281866A/ja
Publication of JPS61281866A publication Critical patent/JPS61281866A/ja
Publication of JPH0250985B2 publication Critical patent/JPH0250985B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12271785A 1985-06-07 1985-06-07 超微粒子ビ−ムを用いた膜形成法及び装置 Granted JPS61281866A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12271785A JPS61281866A (ja) 1985-06-07 1985-06-07 超微粒子ビ−ムを用いた膜形成法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12271785A JPS61281866A (ja) 1985-06-07 1985-06-07 超微粒子ビ−ムを用いた膜形成法及び装置

Publications (2)

Publication Number Publication Date
JPS61281866A true JPS61281866A (ja) 1986-12-12
JPH0250985B2 JPH0250985B2 (enExample) 1990-11-06

Family

ID=14842848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12271785A Granted JPS61281866A (ja) 1985-06-07 1985-06-07 超微粒子ビ−ムを用いた膜形成法及び装置

Country Status (1)

Country Link
JP (1) JPS61281866A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425175U (enExample) * 1990-06-25 1992-02-28

Also Published As

Publication number Publication date
JPH0250985B2 (enExample) 1990-11-06

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