JPS6127878B2 - - Google Patents

Info

Publication number
JPS6127878B2
JPS6127878B2 JP56068539A JP6853981A JPS6127878B2 JP S6127878 B2 JPS6127878 B2 JP S6127878B2 JP 56068539 A JP56068539 A JP 56068539A JP 6853981 A JP6853981 A JP 6853981A JP S6127878 B2 JPS6127878 B2 JP S6127878B2
Authority
JP
Japan
Prior art keywords
heating chamber
frequency
reception port
heating
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56068539A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57182994A (en
Inventor
Shozo Kobayashi
Mitsuo Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6853981A priority Critical patent/JPS57182994A/ja
Publication of JPS57182994A publication Critical patent/JPS57182994A/ja
Publication of JPS6127878B2 publication Critical patent/JPS6127878B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
JP6853981A 1981-05-07 1981-05-07 High frequency heater Granted JPS57182994A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6853981A JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6853981A JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Publications (2)

Publication Number Publication Date
JPS57182994A JPS57182994A (en) 1982-11-11
JPS6127878B2 true JPS6127878B2 (enEXAMPLES) 1986-06-27

Family

ID=13376642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6853981A Granted JPS57182994A (en) 1981-05-07 1981-05-07 High frequency heater

Country Status (1)

Country Link
JP (1) JPS57182994A (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225129A (ja) * 1988-03-03 1989-09-08 Nec Corp 半導体ウェーハ用容器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5344065B2 (enEXAMPLES) * 1974-04-17 1978-11-25
JPS5821868B2 (ja) * 1976-07-26 1983-05-04 株式会社日立製作所 テレビ受像管画面水平度調整装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01225129A (ja) * 1988-03-03 1989-09-08 Nec Corp 半導体ウェーハ用容器

Also Published As

Publication number Publication date
JPS57182994A (en) 1982-11-11

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