JPS6127175Y2 - - Google Patents
Info
- Publication number
- JPS6127175Y2 JPS6127175Y2 JP17024778U JP17024778U JPS6127175Y2 JP S6127175 Y2 JPS6127175 Y2 JP S6127175Y2 JP 17024778 U JP17024778 U JP 17024778U JP 17024778 U JP17024778 U JP 17024778U JP S6127175 Y2 JPS6127175 Y2 JP S6127175Y2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- wafer
- lever
- motor
- vertical shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17024778U JPS6127175Y2 (enrdf_load_stackoverflow) | 1978-12-13 | 1978-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17024778U JPS6127175Y2 (enrdf_load_stackoverflow) | 1978-12-13 | 1978-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5588239U JPS5588239U (enrdf_load_stackoverflow) | 1980-06-18 |
| JPS6127175Y2 true JPS6127175Y2 (enrdf_load_stackoverflow) | 1986-08-13 |
Family
ID=29173062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17024778U Expired JPS6127175Y2 (enrdf_load_stackoverflow) | 1978-12-13 | 1978-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127175Y2 (enrdf_load_stackoverflow) |
-
1978
- 1978-12-13 JP JP17024778U patent/JPS6127175Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5588239U (enrdf_load_stackoverflow) | 1980-06-18 |
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