JPS6126921Y2 - - Google Patents

Info

Publication number
JPS6126921Y2
JPS6126921Y2 JP1977114210U JP11421077U JPS6126921Y2 JP S6126921 Y2 JPS6126921 Y2 JP S6126921Y2 JP 1977114210 U JP1977114210 U JP 1977114210U JP 11421077 U JP11421077 U JP 11421077U JP S6126921 Y2 JPS6126921 Y2 JP S6126921Y2
Authority
JP
Japan
Prior art keywords
sample
electron beam
sample surface
focus detection
optical microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977114210U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440132U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977114210U priority Critical patent/JPS6126921Y2/ja
Publication of JPS5440132U publication Critical patent/JPS5440132U/ja
Application granted granted Critical
Publication of JPS6126921Y2 publication Critical patent/JPS6126921Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
JP1977114210U 1977-08-25 1977-08-25 Expired JPS6126921Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977114210U JPS6126921Y2 (OSRAM) 1977-08-25 1977-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977114210U JPS6126921Y2 (OSRAM) 1977-08-25 1977-08-25

Publications (2)

Publication Number Publication Date
JPS5440132U JPS5440132U (OSRAM) 1979-03-16
JPS6126921Y2 true JPS6126921Y2 (OSRAM) 1986-08-12

Family

ID=29064729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977114210U Expired JPS6126921Y2 (OSRAM) 1977-08-25 1977-08-25

Country Status (1)

Country Link
JP (1) JPS6126921Y2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582726A (ja) * 1981-06-30 1983-01-08 Rigaku Denki Kogyo Kk 液体螢光ｘ線分析装置における試料面決定方法
JP3303916B2 (ja) * 1987-11-30 2002-07-22 株式会社島津製作所 電子線マイクロアナライザの原理を用いた試料面マッピング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237785B2 (OSRAM) * 1973-02-16 1977-09-24

Also Published As

Publication number Publication date
JPS5440132U (OSRAM) 1979-03-16

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