JPS61269045A - レ−ザ式の透過光形表面検査装置 - Google Patents

レ−ザ式の透過光形表面検査装置

Info

Publication number
JPS61269045A
JPS61269045A JP10933085A JP10933085A JPS61269045A JP S61269045 A JPS61269045 A JP S61269045A JP 10933085 A JP10933085 A JP 10933085A JP 10933085 A JP10933085 A JP 10933085A JP S61269045 A JPS61269045 A JP S61269045A
Authority
JP
Japan
Prior art keywords
region
mirror
optical axis
pinhole
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10933085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370178B2 (un
Inventor
Yasuo Hachikake
保夫 八掛
Noboru Kato
昇 加藤
Makoto Ito
誠 伊藤
Yoshiaki Ueno
上野　善旦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP10933085A priority Critical patent/JPS61269045A/ja
Publication of JPS61269045A publication Critical patent/JPS61269045A/ja
Publication of JPH0370178B2 publication Critical patent/JPH0370178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/894—Pinholes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10933085A 1985-05-23 1985-05-23 レ−ザ式の透過光形表面検査装置 Granted JPS61269045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10933085A JPS61269045A (ja) 1985-05-23 1985-05-23 レ−ザ式の透過光形表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10933085A JPS61269045A (ja) 1985-05-23 1985-05-23 レ−ザ式の透過光形表面検査装置

Publications (2)

Publication Number Publication Date
JPS61269045A true JPS61269045A (ja) 1986-11-28
JPH0370178B2 JPH0370178B2 (un) 1991-11-06

Family

ID=14507486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10933085A Granted JPS61269045A (ja) 1985-05-23 1985-05-23 レ−ザ式の透過光形表面検査装置

Country Status (1)

Country Link
JP (1) JPS61269045A (un)

Also Published As

Publication number Publication date
JPH0370178B2 (un) 1991-11-06

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