JPH0370178B2 - - Google Patents
Info
- Publication number
- JPH0370178B2 JPH0370178B2 JP10933085A JP10933085A JPH0370178B2 JP H0370178 B2 JPH0370178 B2 JP H0370178B2 JP 10933085 A JP10933085 A JP 10933085A JP 10933085 A JP10933085 A JP 10933085A JP H0370178 B2 JPH0370178 B2 JP H0370178B2
- Authority
- JP
- Japan
- Prior art keywords
- area
- transmitted light
- optical axis
- laser beam
- pinhole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 16
- 238000007689 inspection Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 230000007547 defect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/894—Pinholes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10933085A JPS61269045A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ式の透過光形表面検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10933085A JPS61269045A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ式の透過光形表面検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61269045A JPS61269045A (ja) | 1986-11-28 |
JPH0370178B2 true JPH0370178B2 (un) | 1991-11-06 |
Family
ID=14507486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10933085A Granted JPS61269045A (ja) | 1985-05-23 | 1985-05-23 | レ−ザ式の透過光形表面検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61269045A (un) |
-
1985
- 1985-05-23 JP JP10933085A patent/JPS61269045A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61269045A (ja) | 1986-11-28 |
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Legal Events
Date | Code | Title | Description |
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S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
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R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
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S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |