JPS61266939A - 走査型電子顕微鏡を用いた微粒子測定装置 - Google Patents

走査型電子顕微鏡を用いた微粒子測定装置

Info

Publication number
JPS61266939A
JPS61266939A JP60108098A JP10809885A JPS61266939A JP S61266939 A JPS61266939 A JP S61266939A JP 60108098 A JP60108098 A JP 60108098A JP 10809885 A JP10809885 A JP 10809885A JP S61266939 A JPS61266939 A JP S61266939A
Authority
JP
Japan
Prior art keywords
electron microscope
sample
center point
sample stage
measurement positions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60108098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518052B2 (enExample
Inventor
Tei Saito
斉藤　禎
Akio Hayashi
林　堯夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Japan Organo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp, Japan Organo Co Ltd filed Critical Organo Corp
Priority to JP60108098A priority Critical patent/JPS61266939A/ja
Publication of JPS61266939A publication Critical patent/JPS61266939A/ja
Publication of JPH0518052B2 publication Critical patent/JPH0518052B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP60108098A 1985-05-22 1985-05-22 走査型電子顕微鏡を用いた微粒子測定装置 Granted JPS61266939A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60108098A JPS61266939A (ja) 1985-05-22 1985-05-22 走査型電子顕微鏡を用いた微粒子測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60108098A JPS61266939A (ja) 1985-05-22 1985-05-22 走査型電子顕微鏡を用いた微粒子測定装置

Publications (2)

Publication Number Publication Date
JPS61266939A true JPS61266939A (ja) 1986-11-26
JPH0518052B2 JPH0518052B2 (enExample) 1993-03-10

Family

ID=14475822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60108098A Granted JPS61266939A (ja) 1985-05-22 1985-05-22 走査型電子顕微鏡を用いた微粒子測定装置

Country Status (1)

Country Link
JP (1) JPS61266939A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007207683A (ja) * 2006-02-03 2007-08-16 Tokyo Seimitsu Co Ltd 電子顕微鏡
JP2009528580A (ja) * 2006-03-03 2009-08-06 ３ディーヒステック ケイエフティー． スライドをディジタル撮影する方法及びそのための自動ディジタル画像記録システム
JP2019020154A (ja) * 2017-07-12 2019-02-07 オルガノ株式会社 超純水の評価方法、超純水製造用膜モジュールの評価方法及び超純水製造用イオン交換樹脂の評価方法
CN119164842A (zh) * 2024-09-23 2024-12-20 南开大学 基于高低加速电压耦合分析的大气颗粒物分析方法及装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007207683A (ja) * 2006-02-03 2007-08-16 Tokyo Seimitsu Co Ltd 電子顕微鏡
JP2009528580A (ja) * 2006-03-03 2009-08-06 ３ディーヒステック ケイエフティー． スライドをディジタル撮影する方法及びそのための自動ディジタル画像記録システム
JP2019020154A (ja) * 2017-07-12 2019-02-07 オルガノ株式会社 超純水の評価方法、超純水製造用膜モジュールの評価方法及び超純水製造用イオン交換樹脂の評価方法
CN119164842A (zh) * 2024-09-23 2024-12-20 南开大学 基于高低加速电压耦合分析的大气颗粒物分析方法及装置

Also Published As

Publication number Publication date
JPH0518052B2 (enExample) 1993-03-10

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