JPS6126605B2 - - Google Patents
Info
- Publication number
- JPS6126605B2 JPS6126605B2 JP1008079A JP1008079A JPS6126605B2 JP S6126605 B2 JPS6126605 B2 JP S6126605B2 JP 1008079 A JP1008079 A JP 1008079A JP 1008079 A JP1008079 A JP 1008079A JP S6126605 B2 JPS6126605 B2 JP S6126605B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- diffraction gratings
- diffraction
- diffracted light
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001427 coherent effect Effects 0.000 claims description 11
- 238000009499 grossing Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001015 X-ray lithography Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1008079A JPS55101804A (en) | 1979-01-31 | 1979-01-31 | Positioning apparatus |
US06/114,354 US4332473A (en) | 1979-01-31 | 1980-01-22 | Apparatus for detecting a mutual positional relationship of two sample members |
DE3003533A DE3003533C2 (de) | 1979-01-31 | 1980-01-31 | Vorrichtung zur Bestimmung der gegenseitigen Lagebeziehung zwischen zwei Prüflingen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1008079A JPS55101804A (en) | 1979-01-31 | 1979-01-31 | Positioning apparatus |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16536685A Division JPS61116605A (ja) | 1985-07-26 | 1985-07-26 | 位置合せ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55101804A JPS55101804A (en) | 1980-08-04 |
JPS6126605B2 true JPS6126605B2 (de) | 1986-06-21 |
Family
ID=11740363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1008079A Granted JPS55101804A (en) | 1979-01-31 | 1979-01-31 | Positioning apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55101804A (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4588899A (en) * | 1984-06-07 | 1986-05-13 | Rca Corporation | Alignment method |
JPS6167512U (de) * | 1984-10-09 | 1986-05-09 | ||
JPH01232214A (ja) * | 1988-03-11 | 1989-09-18 | Canon Inc | エンコーダ |
JP2734004B2 (ja) * | 1988-09-30 | 1998-03-30 | キヤノン株式会社 | 位置合わせ装置 |
US7433018B2 (en) * | 2005-12-27 | 2008-10-07 | Asml Netherlands B.V. | Pattern alignment method and lithographic apparatus |
JP6231297B2 (ja) * | 2013-05-24 | 2017-11-15 | 太陽誘電株式会社 | 変位計測装置及び変位計測方法 |
-
1979
- 1979-01-31 JP JP1008079A patent/JPS55101804A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS55101804A (en) | 1980-08-04 |
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