JPS61259170A - 超音波顕微鏡における試料の傾き調整装置 - Google Patents

超音波顕微鏡における試料の傾き調整装置

Info

Publication number
JPS61259170A
JPS61259170A JP60102041A JP10204185A JPS61259170A JP S61259170 A JPS61259170 A JP S61259170A JP 60102041 A JP60102041 A JP 60102041A JP 10204185 A JP10204185 A JP 10204185A JP S61259170 A JPS61259170 A JP S61259170A
Authority
JP
Japan
Prior art keywords
sample
acoustic lens
specimen
distance
points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60102041A
Other languages
English (en)
Japanese (ja)
Inventor
Shinichi Imaide
慎一 今出
Koichi Karaki
幸一 唐木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP60102041A priority Critical patent/JPS61259170A/ja
Priority to US06/861,802 priority patent/US4683751A/en
Priority to DE19863616283 priority patent/DE3616283A1/de
Publication of JPS61259170A publication Critical patent/JPS61259170A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/35—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Multimedia (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP60102041A 1985-05-14 1985-05-14 超音波顕微鏡における試料の傾き調整装置 Pending JPS61259170A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60102041A JPS61259170A (ja) 1985-05-14 1985-05-14 超音波顕微鏡における試料の傾き調整装置
US06/861,802 US4683751A (en) 1985-05-14 1986-05-12 Sample stand adjusting device in an ultrasonic microscope
DE19863616283 DE3616283A1 (de) 1985-05-14 1986-05-14 Probenhalter-einstelleinrichtung in einem ultraschallmikroskop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60102041A JPS61259170A (ja) 1985-05-14 1985-05-14 超音波顕微鏡における試料の傾き調整装置

Publications (1)

Publication Number Publication Date
JPS61259170A true JPS61259170A (ja) 1986-11-17

Family

ID=14316685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60102041A Pending JPS61259170A (ja) 1985-05-14 1985-05-14 超音波顕微鏡における試料の傾き調整装置

Country Status (3)

Country Link
US (1) US4683751A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS61259170A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3616283A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111122711A (zh) * 2020-01-16 2020-05-08 武汉工程大学 一种用于超声扫描显微镜的样品台

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5627320A (en) * 1988-03-23 1997-05-06 Texas Instruments Incorporated Apparatus and method for automated non-destructive inspection of integrated circuit packages
JPH0213849A (ja) * 1988-07-01 1990-01-18 Olympus Optical Co Ltd 超音波顕微鏡
JPH0255949A (ja) * 1988-08-19 1990-02-26 Olympus Optical Co Ltd 超音波顕微鏡
JPH0266449A (ja) * 1988-09-01 1990-03-06 Olympus Optical Co Ltd 超音波顕微鏡
JPH0295860U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-01-19 1990-07-31
JPH04116458A (ja) * 1990-09-07 1992-04-16 Olympus Optical Co Ltd 超音波顕微鏡
US5922961A (en) * 1996-05-10 1999-07-13 The United States Of America As Represented By The Secretary Of Commerce Time and polarization resolved acoustic microscope
DE102016211126A1 (de) * 2016-06-22 2017-12-28 Osram Opto Semiconductors Gmbh Messeinrichtung für flächige Proben und Verfahren zum Messen
CN111381355B (zh) * 2018-12-29 2022-08-02 北京雅谱光仪科技有限公司 光学成像装置和方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59120858A (ja) * 1982-12-27 1984-07-12 Olympus Optical Co Ltd 超音波顕微鏡の試料面傾斜検出装置
JPS59225349A (ja) * 1983-06-07 1984-12-18 Olympus Optical Co Ltd 超音波顕微鏡の試料台傾斜調整方法
JPS61223551A (ja) * 1985-03-29 1986-10-04 Hitachi Ltd 超音波顕微鏡

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2051363B (en) * 1979-05-24 1983-08-24 Nat Res Dev Scanning acoustic microscope
US4344160A (en) * 1980-05-02 1982-08-10 The Perkin-Elmer Corporation Automatic wafer focusing and flattening system
JPS589063A (ja) * 1981-07-08 1983-01-19 Noritoshi Nakabachi 超音波顕微鏡
JPS5883257A (ja) * 1981-11-13 1983-05-19 Noritoshi Nakabachi 超音波顕微鏡

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59120858A (ja) * 1982-12-27 1984-07-12 Olympus Optical Co Ltd 超音波顕微鏡の試料面傾斜検出装置
JPS59225349A (ja) * 1983-06-07 1984-12-18 Olympus Optical Co Ltd 超音波顕微鏡の試料台傾斜調整方法
JPS61223551A (ja) * 1985-03-29 1986-10-04 Hitachi Ltd 超音波顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111122711A (zh) * 2020-01-16 2020-05-08 武汉工程大学 一种用于超声扫描显微镜的样品台

Also Published As

Publication number Publication date
US4683751A (en) 1987-08-04
DE3616283C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-25
DE3616283A1 (de) 1986-11-27

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