JPS61247893A - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JPS61247893A
JPS61247893A JP60088624A JP8862485A JPS61247893A JP S61247893 A JPS61247893 A JP S61247893A JP 60088624 A JP60088624 A JP 60088624A JP 8862485 A JP8862485 A JP 8862485A JP S61247893 A JPS61247893 A JP S61247893A
Authority
JP
Japan
Prior art keywords
pump stage
housing
pump
blades
compression pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60088624A
Other languages
English (en)
Japanese (ja)
Other versions
JPH037039B2 (enEXAMPLES
Inventor
Takashi Nagaoka
隆司 長岡
Masahiro Mase
正弘 真瀬
Yoshiaki Tsutsumi
芳紹 堤
Minoru Taniyama
実 谷山
Makoto Terajima
寺島　信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60088624A priority Critical patent/JPS61247893A/ja
Priority to DE19863613198 priority patent/DE3613198A1/de
Priority to US06/855,432 priority patent/US4668160A/en
Publication of JPS61247893A publication Critical patent/JPS61247893A/ja
Priority to US07/090,044 priority patent/USRE33129E/en
Publication of JPH037039B2 publication Critical patent/JPH037039B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP60088624A 1985-04-26 1985-04-26 真空ポンプ Granted JPS61247893A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60088624A JPS61247893A (ja) 1985-04-26 1985-04-26 真空ポンプ
DE19863613198 DE3613198A1 (de) 1985-04-26 1986-04-18 Vakuumpumpe
US06/855,432 US4668160A (en) 1985-04-26 1986-04-24 Vacuum pump
US07/090,044 USRE33129E (en) 1985-04-26 1987-08-26 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60088624A JPS61247893A (ja) 1985-04-26 1985-04-26 真空ポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2032548A Division JP2680156B2 (ja) 1990-02-15 1990-02-15 真空ポンプ

Publications (2)

Publication Number Publication Date
JPS61247893A true JPS61247893A (ja) 1986-11-05
JPH037039B2 JPH037039B2 (enEXAMPLES) 1991-01-31

Family

ID=13947960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60088624A Granted JPS61247893A (ja) 1985-04-26 1985-04-26 真空ポンプ

Country Status (3)

Country Link
US (1) US4668160A (enEXAMPLES)
JP (1) JPS61247893A (enEXAMPLES)
DE (1) DE3613198A1 (enEXAMPLES)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648039U (enEXAMPLES) * 1987-06-29 1989-01-17
JPH0264296A (ja) * 1988-08-31 1990-03-05 Hitachi Ltd ターボ形真空ポンプ
JPH0291499A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd 多段円周流形真空ポンプ
US5062771A (en) * 1986-02-19 1991-11-05 Hitachi, Ltd. Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber
US5160250A (en) * 1988-07-13 1992-11-03 Osaka Vacuum, Ltd. Vacuum pump with a peripheral groove pump unit
US5190438A (en) * 1990-04-06 1993-03-02 Hitachi, Ltd. Vacuum pump
US5221179A (en) * 1988-07-13 1993-06-22 Osaka Vacuum, Ltd. Vacuum pump
US7645126B2 (en) 2003-07-10 2010-01-12 Ebara Corporation Vacuum pump and semiconductor manufacturing apparatus
JP2012520961A (ja) * 2009-03-19 2012-09-10 オーリコン レイボルド バキューム ゲーエムベーハー 複数入口式真空ポンプ

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE33129E (en) * 1985-04-26 1989-12-12 Hitachi, Ltd. Vacuum pump
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
IT1218076B (it) * 1988-06-15 1990-04-12 Fimac Spa Pompa per impianti frigoriferi,in particolare per impieghi aeronautici
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP2998441B2 (ja) * 1992-08-19 2000-01-11 株式会社日立製作所 ターボ真空ポンプ
CN1110376A (zh) * 1994-04-16 1995-10-18 储继国 拖动分子泵
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US6394747B1 (en) 2000-06-21 2002-05-28 Varian, Inc. Molecular drag vacuum pumps
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US20070059156A1 (en) * 2003-09-04 2007-03-15 University Of Utah Research Foundation Rotary centrifugal and viscous pumps
DE10357546A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Seitenkanalpumpstufe
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE879452C (de) * 1942-12-31 1953-06-11 Siemens Ag Als Ringpumpe ausgebildete trockene Gaspumpe
US3045428A (en) * 1960-07-06 1962-07-24 Walter G Finch Vortex gas turbine
JPS4733447B1 (enEXAMPLES) * 1969-05-07 1972-08-25
DE2405890A1 (de) * 1974-02-07 1975-08-14 Siemens Ag Seitenkanal-ringverdichter
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE7441311U (de) * 1974-12-11 1976-07-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verdichteranordnung
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5062771A (en) * 1986-02-19 1991-11-05 Hitachi, Ltd. Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber
JPS648039U (enEXAMPLES) * 1987-06-29 1989-01-17
US5160250A (en) * 1988-07-13 1992-11-03 Osaka Vacuum, Ltd. Vacuum pump with a peripheral groove pump unit
US5221179A (en) * 1988-07-13 1993-06-22 Osaka Vacuum, Ltd. Vacuum pump
JPH0264296A (ja) * 1988-08-31 1990-03-05 Hitachi Ltd ターボ形真空ポンプ
JPH0291499A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd 多段円周流形真空ポンプ
US5190438A (en) * 1990-04-06 1993-03-02 Hitachi, Ltd. Vacuum pump
US7645126B2 (en) 2003-07-10 2010-01-12 Ebara Corporation Vacuum pump and semiconductor manufacturing apparatus
JP2012520961A (ja) * 2009-03-19 2012-09-10 オーリコン レイボルド バキューム ゲーエムベーハー 複数入口式真空ポンプ

Also Published As

Publication number Publication date
US4668160A (en) 1987-05-26
JPH037039B2 (enEXAMPLES) 1991-01-31
DE3613198C2 (enEXAMPLES) 1988-12-22
DE3613198A1 (de) 1986-10-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term