JPS61246381A - Vacuum treatment device - Google Patents

Abstract

PURPOSE:To make system constitution possible by the constitution consisting in carrying a sample carried into a buffer chamber into a treatment chamber, treating the same therein, transferring the treated sample into the other buffer chamber provided successively therewith and treating further the sample thereby changing freely the number of the treatment chambers. CONSTITUTION:The sample 60 placed in a cassette 90 and carried into a vacuum preliminary chamber 50 of a vacuum treatment unit 10 is carried by a conveying belt 70 into the buffer chamber 20 the inside of which is made evacuatable through a gate valve 40. The above-mentioned sample 60 is then carried into the treatment chamber 30 provided with a sample electrode 31 by a rotary arm conveyor 80 consisting of an arm 82 and a holder 84 so that the sample is subjected to the prescribed vacuum treatment. The sample 60 after the treatment is transferred onto the conveying belt 110 by using the other arm 83 and holder 85 of the conveyor 80 and is carried into the buffer chamber 20 of the other vacuum treatment unit 10 provided successively therewith via a gate valve 100. The sample is further treated in the treatment chamber 30 in said chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a vacuum processing apparatus, and particularly to a vacuum processing apparatus used in a semiconductor manufacturing process such as a dry etching apparatus or a plasma CVD apparatus.

[Background of the invention]

Recent advances in semiconductor manufacturing process technology have been remarkable, and even dry etching devices that can process 1 μm patterns have appeared and are attracting attention. As such miniaturization progresses, samples are becoming larger in size, and as a result, it is necessary to improve the throughput (number of samples processed per hour) per 8 Il of occupied floor space of semiconductor manufacturing equipment and respond to the diversification of manufacturing process technology. This has become a major issue. In order to meet these demands, it is necessary to downsize the equipment and perform multi-purpose processing using a variety of processing chambers.Moreover, it is necessary to reduce the number of processing chambers in response to process changes and line changes. A need has arisen for vacuum processing modules that can be configured or organized into systems. In contrast, conventional methods such as JP-A-57-12
In the type disclosed in Publication No. 8928, in which a module can be added that combines a processing chamber and a sample transport line in the atmosphere, the sample is transported to the next processing chamber through an atmosphere with poor cleanliness. It is not suitable for application to process steps where processing is handed over to the next processing chamber midway through. In addition, in the type disclosed in Japanese Utility Model Application Publication No. 57-39430, in which a sample is transported between several processing chambers and one buffer chamber and is continuously processed, the number of processing chambers increases. The problem is that it is fixed and there is no flexibility to change the number of processing chambers in response to process changes or line changes, making it difficult to use.

[Purpose of the invention]

An object of the present invention is to freely change the number of processing chambers in response to process changes or line changes, and to configure or organize the system.

Our goal is to provide a vacuum processing device that can.

[Summary of the invention]

The present invention provides a buffer chamber that can be evacuated, a processing chamber provided in the chamber, a vacuum preliminary chamber provided in the buffer chamber via a vacuum opening/closing means, and a connection between the chamber and the buffer chamber. A first sample transport means for transporting the sample between the means and the processing chamber via the vacuum space opening/closing means, and a second sample transport means for transporting the sample through the buffer chamber between the means and the processing chamber. a third sample transport means for transporting the sample between the buffer spaces or the vacuum preparatory chambers, in which at least two vacuum processing units are connected as one unit so that the buffer spaces or the vacuum preparatory chambers can communicate with each other; This system is characterized by the provision of a vacuum processing apparatus, which allows the system configuration or organization to be configured by freely changing the number of processing chambers in response to process changes or line changes.

[Embodiments of the invention]

An embodiment of the present invention will be described with reference to FIGS. 1 and 2.

115th! In II, the vacuum processing unit 10 includes a buffer chamber m to which a vacuum exhaust system (not shown) is connected, and a
.

The processing room (capital) and buffer room (9
) between a vacuum preliminary chamber 50 and 51 provided via a vacuum space opening/closing means, such as a gate valve 41, and a vacuum preliminary chamber 50,51,
51 and the buffer chamber (9), a first sample transport means for transporting the sample ω, for example, a transport belt 70.71 and a transport belt 70. A second tube transports the sample ω through the buffer chamber between n and the treated bacteria.
The apparatus is equipped with a sample transport means, for example, a rotary arm transport device t8o.

In FIG. 1, in the processing chamber (9), in this case, there is a facing type f!
(not shown) is installed substantially horizontally. The counter electrode is grounded. A sample electrode 31 is provided below the counter electrode to face it. The sample electrode m has a buffer ■
An external power source, for example, a high frequency power source (not shown) is connected. In this case, the sample electrode 31 is provided so as to be movable up and down, and has the function of airtightly isolating the inside of the processing chamber (9) from the buffer S. marcescens by rising.
)for.

A vacuum exhaust system that evacuates the inside of the hermetically sealed processing chamber (
(not shown) is connected to a gas supply system (not shown) that supplies processing gas into the hermetically sealed processing chamber (9). In this case, the sample electrode 31 is a refrigerant.

For example, it is cooled with cooling water, thereby having the function of cooling the sample ω being processed. A table n is provided at the center of the sample electrode 31 so as to be movable up and down between a height level above the sample installation surface of the sample electrode m and a height level below or equivalent to the sample installation surface. The size of the table (is smaller than the size of the sample ω.

In FIG. 1, the gate valve 41 is provided on the side wall of the buffer chamber (9) corresponding to the processing chamber. Vacuum preliminary chamber 5
0.51 are separated and independent in this case. That is, the vacuum preliminary chamber 51 is connected to the buffer chamber through the gate valve 41, and the vacuum preliminary chamber 51 is connected to the buffer chamber through the gate valve 41. Vacuum preliminary chamber 50.51
In this case, they are arranged horizontally. A vacuum exhaust system (not shown) is connected to the vacuum preparatory chamber 51, and a leak gas supply system (not shown) is connected to return the inside of the vacuum preparatory chamber 51 to atmospheric pressure. The volume of the vacuum preliminary chamber 51 is large enough to accommodate a cassette 90.91 and to allow the cassette 90.91 to be moved up and down intermittently. The vacuum preliminary chamber 50, 51 is provided with a door (not shown) for loading and unloading the cassette.

In FIG. 1, conveyor belts 70 and 71 are placed side by side with their belt surfaces substantially horizontal. One end of the conveyor belt 70 is in a position where it can receive and pass the sample ω between it and the cassette cassette in the vacuum preliminary chamber, and one end of the conveyor belt n is located in the vacuum preliminary chamber 51.
The sample ω can be transferred between the sample ω and the cassette 91 within the cassette 91. At the other end of the conveyor belt 70.71 and at the inner end of the buffer chamber, a table n, 73 is attached to the conveyor belt 70.7.
It is provided so as to be movable up and down between a height level above the first belt surface and a height level below it. table n, 7
The size of 3 is smaller than the size of salary ω. Tables 72, 73 and table n are arranged on the same circumference in this case.

In FIG. 1, the rotary arm transport device so is composed of a drive device (not shown), a rotating shaft 81, an arm wing 0, and a holding red sea bream 85. The rotation axis 81 is connected to the table 32.72.
．． Two rotatable chambers are provided in the buffer chamber (9) with the center of the cast 73 as the axis. In this case, the rotary shaft 81 is rotatably provided in an airtight manner on the bottom wall of the buffer chamber (9) with its lower part protruding one step outside the buffer chamber (9). The driving device is installed outside the buffer S. marcescens, and the lower end of the rotating shaft 81 is connected to the driving device. Arm 82.83 is
It is supported in a cantilever manner on the upper part of the rotating shaft 81 so that it can rotate within the same plane. In this case, the holding red sea bream 85 holds the sample ω from the back side, and is attached to the arm 82. &l is provided at the rotating end. Arm wing, rotation axis 81 of 83
The mounting distance is in this case table 32.72.7
The spacing is such that the holders 84 and 85 correspond to any two of the tables.

For the second reason, two vacuum processing units 10 are used, and in this case, the buffer chambers are connected to each other via a vacuum space opening/closing means 10G such as a gate valve or a partition to enable communication between the buffer chambers. The vacuum space opening/closing means 100 is provided on a side wall of the buffer chamber, which in this case is approximately perpendicular to the side wall on which the vacuum preliminary chamber 51 is provided.

The sample ω is passed through the vacuum space opening/closing means 100 in the buffer chamber.
A third sample transport means is provided for transporting the sample. Third
The sample transport means is, for example, a transport bell 110.

At the end of the conveyor belt 110, which is located inside the buffer on the left side in FIG. It is provided. The table 111 is disposed on the same circumference as the tables 32, 72, and 73, and between the table 73 and the table 73. Conveyor belt 110
In Figure 2, there is a table 112 at each end of the buffer chamber on the right that moves up and down between the height level above the belt surface of the conveyor belt 1) and the height level below. possible. Table 112 is table 32
, 72° and table 7 on the same circumference as 73.
It is located between 3 and 3. Note that the same devices and the like in Figure 2 for men and Figure 1 for others are designated by the same reference numerals and their explanations will be omitted.

In FIG. 2, for example, a cassette is carried into the vacuum preliminary chamber barrier of the vacuum processing unit 10 on the left, and a cassette 91 is carried into the vacuum preliminary chamber 51 of the vacuum processing unit 10 on the right. A predetermined number of samples (a) are stored in the cassette holder, and the cassette 91 is empty.

The vacuum preliminary chambers 50 and 51 are evacuated to the same pressure as the pressure of each buffer S. marcescens. Thereafter, the gate valve φ of the left vacuum processing unit 10 is opened, and the cassette cassette is lowered one pitch, thereby transferring the sample ω to one end of the conveyor belt 70. By operating the conveyor belt 70, this sample ω is conveyed from the vacuum preliminary chamber to the buffer chamber (9) via the gate valve, and its conveyance is stopped at a position corresponding to the table 72. After that, this sample ω is
By raising the table 72, the material is transferred from the conveyor belt 70 to the table n. Thereafter, by operating the rotary arm transport device 1lf80, the sample ω is transferred from the table 72 to, for example, a holder δ, and is conveyed to a position corresponding to the table while being scooped and held by the holder. .Then, this sample ω is passed to the holder okara table (sacerco) and the table is raised.Sample ω
The holder δ of the rotary arm transfer device (equipment), which has passed the sample electrode 31 onto the table, is placed on standby at a position where it does not inhibit the rise of the sample electrode 31. After receiving the sample ω, by lowering the table β, the sample ω is transferred from the table to the sample type [i
31, and as a result, the sample ω is placed on the sample installation surface of the sample electrode 31 with the surface to be processed facing upward. Thereafter, when the sample electrode 31 is raised, the inside of the processing chamber (9) is hermetically sealed off from the front of the processing chamber. In this state, the surface of the sample ω to be processed is subjected to, for example, a dry etching process (rough processing) using gas plasma. After this process is completed, the sample electrode is lowered, thereby bringing the inside of the process chamber into communication with the inside of the buffer chamber I again. after that,
By raising the table (), - next processed sample ω
is removed from the sample electrode 31 and passed to the table. Thereafter, this next-processed sample ω is transferred from the table &1, for example, to a holding Sanada, by the operation of the rotary arm transfer device aI80 and transferred to the table 111. The next-processed sample ω is then transferred from the holder δ to the table Ill by raising the table 111, and by lowering the table 111,
It is passed from the table 111 to the conveyor belt 11G. Thereafter, this next-processed sample (2) is transferred to the opened vacuum space opening/closing means 100 by operating the conveyor belt 11G.
It is transported from the buffer chamber 1 of the left vacuum processing unit 10 to the buffer chamber m of the right vacuum processing unit 10 through the buffer chamber 10, and the transport is stopped at a position corresponding to the table 112.

In this way, the sample ω that has undergone the primary processing and has been transported into the buffer of the vacuum processing unit 10 on the right side is transferred to the table 1.
12 is raised, the paper is transferred from the conveyor belt 110 to the table 112. After that, this next processed sample mark is transported by the rotating arm g! ! By activating (capital), the fish is transferred from the table 112 to, for example, a holder, and transported to a position corresponding to the table n while being scooped and held by the holding red sea bream.

Thereafter, this next-processed sample ω is transferred from the holder net to the table by raising the table.

- The holder of the rotary arm transfer device (equipment) to which the next processed sample ω was delivered is kept on standby at a position that does not inhibit the rise of the sample electrode 31. On the other hand, by lowering the table 1-pull, the -next-processed sample button is transferred from the table n to the sample electrode block, and as a result, the -next-processed sample ω is placed in an upward position on the surface to be processed. The inside of the processing chamber (9) is airtightly isolated from the inside of the buffer chambers by raising the sample electrodes that are installed on the sample installation surface of the sample electrode 31. In this state, the surface of the sample ω that has been subjected to the subsequent treatment is subjected to finishing treatment using gas plasma. After completing this process, the sample voltage f! 31 is lowered, thereby
The inside of the processing chamber (9) is brought into communication with the inside of the buffer chamber again. Thereafter, by raising the table, the finished sample mark is removed from the sample electrodes and transferred to the table. After that, this finished sample ω is
By the operation of the rotary arm conveyance device (equipment), the table is transferred to, for example, a holder U and conveyed to a position corresponding to table n.

After that, by raising table n, this finished sample ω is passed from the holding red sea bream to table n,
By lowering table n, it is passed from table n to conveyor belt n. After that, the gate valve 41 is opened,
By operating the conveyor belt 71, the finished sample ω is conveyed from the buffer chamber (9) to the vacuum preliminary chamber 51 via the gate valve 41. The finished sample ω carried into the vacuum preliminary chamber 51 is transferred from the conveyor belt n to the cassette 91 and collected.

In this embodiment, the following effects can be obtained.

(1) The system can be configured or organized by freely changing the number of processing chambers in response to process changes or line changes.

(2) Since the sample is transported to the next processing chamber via the evacuated buffer chamber, it can be applied without any problem to process steps where the processing is taken over to the next processing chamber midway through processing.

(3) Since the sample can be transported between each transport belt and the processing chamber by providing only one rotary arm transport device, the device configuration can be simplified and the cost of the device can be reduced.

Figure 1E3 shows another embodiment of the present invention, and Figure 1E3 shows the above embodiment. What is different from Figure 2 is that two vacuum processing units IO are used, and in the case of Figure 2, the vacuum preliminary chamber 5 is used.
1.50mm can be communicated between the vacuum chamber and the vacuum preliminary chamber.

51, a third sample transport means, for example, a transport belt 110', is provided to transport the sample ω via the vacuum space opening/closing means 100'. Therefore, in this case, the sample ω that has been subjected to the primary treatment is transferred to the left vacuum processing unit l-
The 10 vacuum preparatory chambers 51 are also transferred between the vacuum preparatory chambers of the right vacuum processing unit 1o via the vacuum space opening/closing means 100'. The sample ω that has undergone the primary processing and is carried between the vacuum preliminary chambers is carried between the processing chambers through the buffer room temperature, where it is subjected to finishing treatment, and then carried into the vacuum preliminary chamber 51 through the buffer chamber □□□. It is collected into a cassette 91. Note that in FIG. 3, the same devices as those in FIG. 2 are designated by the same reference numerals, and the explanation thereof will be omitted.

In this embodiment, the same effects as those in the above embodiments can be obtained.

Note that the tape n and the table 111, the table 72, and the table 112 in the above embodiment may be made into one table, and the conveyor belt 110 may be provided to be movable up and down, for example.

Further, the vacuum processing unit shown in FIG. 1 can be used as is as one vacuum processing apparatus. In such a case, for example, a cassette 90 containing a predetermined number of samples ω is carried between the vacuum preliminary chambers, an empty cassette for collection is carried into the vacuum preliminary chamber 51, and the conveyor belt 7
0 is used as a sample transport means for loading,
A conveyor belt n is used as a sample conveyor for unmeading.

Furthermore, the first sample transport means for transporting the sample between the buffer chamber and the vacuum preparatory chamber and the transport means of gJ3 for transporting the sample between the buffer chambers or the vacuum preparatory chamber are similar to the transport belt in the above embodiment. Alternatively, a means for reciprocating the holder by moving it straight or by partially rotating it may be used. Also,
The holder may be one that mechanically grips and holds the sample, or one that grips and holds the sample by electromagnetic force or holds it by suction.

〔Effect of the invention〕

As explained above, the present invention has the advantage of providing a vacuum processing apparatus that can freely change the number of processing chambers and configure or organize the system in response to process changes or line changes.

[Brief explanation of drawings]

1 and 2 show an embodiment of the vacuum processing apparatus according to the present invention. FIG. 1 is a plan view of the vacuum processing unit, and FIG. A plan view of a vacuum processing apparatus in which units are connected in series, FIG. 3 is a plan view showing another embodiment of the vacuum processing apparatus according to the present invention. Add...Buffer room, (fund)...Processing room, 41...Curved gate valve, (fund), 51...
Vacuum preliminary chamber, 70.71. 110°110'...
...Transport belt, ω...Rotating arm transport *f,
Fang Ikuni 11O-・-1-・Yeieisako (Pekreto Sai 3rd figure)

Claims (1)

[Claims] 1. A buffer chamber that can be evacuated, a processing chamber provided in the chamber, a vacuum preliminary chamber provided in the buffer chamber via a vacuum opening/closing means, and a A vacuum processing unit comprising a first sample transport means for transporting a sample via a vacuum opening/closing means, and a second sample transport means for transporting the sample through the buffer chamber between the means and the processing chamber. At least two units are connected as one unit so that the buffer chambers or the vacuum preparatory chambers can communicate with each other, and a third sample transport means for transporting the sample between the buffer chambers or the vacuum preparatory chambers is provided. A vacuum processing device characterized by: