JPS58153345A - Specimen feeding device - Google Patents

Abstract

PURPOSE:To rationalize the manufacturing steps and to improve the quality of a specimen feeding device by rotating a rotor having a specimen container in a casing which is connected to different atmosphere, thereby continuously feeding the specimen between different atmospheres. CONSTITUTION:A casing 1 is obliquely disposed, and a guide passage 2 is connected to atmospheric pressure and a discharge passage 3 is connected to a high vacuum. A rotor 5 is disposed in a space 4, a container 6 having holes corresponding to the passages 2, 3 is provided, supported via bearings 7, and driven by a driver 8 around a shaft 9. The rotor 5 is formed in a disc shape, and a hollow specimen container 6 is circumferentially opened laterally symmetrically. Sufficient exhaust resistance gap 10 is formed to maintain different atmospheres between the space 4 and the rotor 5. A specimen 11 is guided by a guide 2, and fed to the passage 3 of different atmosphere. According to this structure, the disconnection of automation due to batch process can be avoided, thereby rationalizing the steps and improving the quality.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample transfer device for transferring a sample such as an IC sample between different atmospheres.

When performing various processing on IC wafers under vacuum,
It is necessary to transfer the sample from the atmosphere to the high vacuum chamber, and after processing, transfer the sample from the high vacuum chamber to the atmosphere again. In addition, when a sample is processed in a special gas, transfer between different gases is similarly required.

Until now, there was no effective device for continuously transferring samples between different atmospheres such as vacuum pressure and different gases, so it was difficult to insert and transfer samples through an aerodynamic chamber using so-called batch processing. The drawback was that the chain of automation was broken there.

This invention was made to eliminate these conventional drawbacks, and it is possible to store a sample by rotating a rotating body with a sample storage section in a revolving door type or turret type within a casing connected to a different atmosphere. The object of the present invention is to provide a sample transfer device that can continuously transfer samples between different atmospheres.

The present invention includes a casing in which a sample introduction path and a sample delivery path each connected to a different atmosphere are opened, a rotating body that rotates within the casing while maintaining sufficient exhaust resistance, and a rotating body that rotates the sample from the sample introduction path as it rotates. The sample transfer device is characterized by comprising a sample storage section provided on the rotating body so as to receive the sample and send the sample to the sample sending path.

Hereinafter, this invention will be explained with reference to the drawings. Fig. 1 is a vertical sectional view showing an embodiment of the present invention, Fig. 2 is a sectional view taken along the line A-A, Fig. 3 (a) is a plan view of the rotating body, lbl is a front view, and (C) is a side view. It is a diagram. In the figure, reference numeral 1 denotes a casing, which is installed at an angle and has a rotating space 4 in which a sample introduction path 2 and a sample delivery path 6 are opened, which are connected to a different atmosphere. A rotating body 5 is provided in the rotating space 4 , and the rotating body 5 has a sample storage section 6 that opens corresponding to the sample introducing path 2 and the sample sending path 6 , is supported by a bearing 7 , and is supported by a rotating device 8 . Rotation II that allows you to rotate! 1
It has lI9. The rotating body 5 is disk-shaped, and has a sample storage section 6 that is symmetrically opened in the circumferential direction and has a hollow shape bV. A gap 10 is formed between the inner wall of the rotating space 4 of the casing 1 and the rotating body 5, which provides one minute of exhaust resistance to maintain a different atmosphere.

In the sample transfer device configured as described above, for example, the sample introduction path 2 is maintained at atmospheric pressure, the sample delivery path 6 is maintained at high vacuum, and the sample 11 is transferred from the sample introduction path 2 to the rotating body 5 by using the slope. When the sample 11 is introduced into the sample storage section 6 and the rotating body 5 is rotated by half a rotation by the rotator 8, the sample 11 is delivered from the sample storage section 6 to the sample delivery path 6 using the slope. On the other hand, sample introduction path 2
From then on, a new sample 11 is introduced into the sample storage section 6 in the same way as the previous time.

By repeating the above operations, the sample 11 is transferred from the sample introduction path 2 to the sample delivery path 6 in a different atmosphere. The rotation of the rotating body 5 by the rotating device 8 may be continuous rotation, or may be rotated intermittently every half rotation. In order to maintain the sample introduction path 2 and the sample delivery path 6 in different atmospheres, they must not be short-circuited.
It is necessary that the non-opening distance S between the sample storage sections 6 is larger than the opening distance R of the sample storage sections 6 . In addition, the gap 10 substantially restricts the flow of fluid from the sample introduction path 2 side to the sample delivery path 6 side,
It should be possible to maintain a high vacuum by suction on the sample delivery path 6 side.

FIG. 4 and FIG. 5 each show a modification of the rotating body,
(a) is a plan view, (b) is a front view, and (C) is a side view. In FIG. 4, the upper part of the sample storage section 6 in FIG. 5 is open, making it easy to introduce the sample, but reducing the exhaust resistance. The one shown in FIG. 5 is an independent circular one, which is suitable for transferring liquids and the like.

FIG. 6(a) is a cutaway plan view of the casing part showing another embodiment, and FIG. 6(b) is a cutaway side view of the casing part. The rotating body 5 is formed in the shape of a drum, and the height of the sample storage section 6 is increased, so that the sample 11 can be introduced or sent out by rolling. Figures 7 and 8 show the rotating body in this embodiment, and respectively (a
) is a plan view, (b) is a front view, and (C) is a top view of the Tsukuda. Since the tops of both are not open, the exhaust resistance is large.

FIGS. 9 to 11 are respectively cutaway plan views of the casing portion of other embodiments. In FIG. 9, one sample storage section 6 is provided on the rotating body 5, and the structure is simple. In FIG. 10, four sample storage sections 6 are provided, and the sample storage section 6 located perpendicularly to the sample introduction path 2 and the sample delivery path 6 is connected to the intermediate suction path 12 so that it can be sucked into the intermediate pressure between the sample introduction path 2 and the sample delivery path 6. Connected. In this case, intermediate suction path 1
2 communicates with the sample storage section 6 on the opposite side at the upper part of the casing 1. In this example, since intermediate suction is possible, the pressure difference between the sample introduction path 2 and the sample delivery path 6 can be increased. In FIG. 11, two intermediate suction passages 12.13 are opened between the sample introduction passage 2 and the sample delivery passage 6, so intermediate suction can be performed in two stages, and the pressure difference can therefore be further increased. I can do it.

FIGS. 12 to 15 are vertical cross-sectional views and FIG. 16(a) showing another embodiment using inclination, respectively.

(b) is a vertical cross-sectional view of yet another embodiment, in which two units are connected and are suitable for reducing the pressure in stages. In FIG. 12, the sample 11 slides down the sample introduction path 2, the communication path 14, and the sample delivery path 6, and is transferred by the rotating body 5. In Figure 15, rollers 9 descend down a similar path. FIG. 14 is the same as FIG. 13 except that the rotating body 5 is directly connected. In FIG. 15, the sample 11 slides down where the rotating body 5 is directly connected. FIG. 16 shows an example in which the two rotating bodies 5 and 5a overlap, and (a) shows the rotating body 5.
．． 5a shows a state in which the sample 11 is being loaded, and (b) shows a state in which the rotating body 5a is transporting the sample 11.

FIG. 17 (a) is a vertical sectional view showing another embodiment, (b)
is a BB sectional view, and 15 is a fork for loading the sample 11 between the sample introduction path 2 and the sample storage section 6 and between the sample storage section 6 and the sample delivery section 6. 18th
The figure is a horizontal sectional view of another embodiment, in which 16 is a rotating arm, and the sample 11 is placed in the same position as in FIG. 17 by rotation.
Perform loading.

An electric motor can be used as the rotating device [8, but FIG. 19 shows an embodiment in which the rotating body 5 is rotated by a magnet.
20 is a vertical sectional view, FIG. 20 is a horizontal sectional view, and FIG. 20 is a vertical sectional view showing a modification of the bearing portion.

In FIG. 19, the rotating body 5 is completely housed within the casing 1. A rotating device 8 is provided outside the casing 1 to rotate the magnet 17. A magnetic body 18 is provided on the rotating body 5 facing this magnet, and the rotating body 5 is mounted on the casing 1 by a rolling bearing 7a.
is rotatably supported on the peripheral wall of the In FIG. 20, the rotating body 5 is supported by bearings 7 on the upper and lower walls of the casing 1. In FIG. In these devices, by rotating the rotating device 8, the rotating body 5 rotates and transfers the sample 11, but since the rotating shaft does not protrude to the outside, it is easy to maintain the pressure difference.

FIG. 21(a) is a plan view showing a modification of the rotating device, and FIG. 21(b)
) is shown in a vertical cross-sectional view, and is rotated intermittently by a Geneva mechanism. That is, it consists of a rotating arm 20 having a Geneva gear 18 connected to the rotating body 5 and a retaining part 19 that meshes with the Geneva gear 18.
By rotating the gear 0, the Geneva gear 18 rotates by 1/4, and the rotating body 5 rotates intermittently. Therefore, time can be taken for loading the sample 11.

FIG. 22 is a plan view showing another modification, and FIG. 23 is an operation diagram thereof. In this example, two Geneva gears 18a, 18
b are connected in two so that they can be rotated by one rotating arm 20, and are suitable for creating a pressure difference by intermediate pulling. In FIG. 25, the Geneva gear 18a rotates as the rotary arm rotates 200 times.

This diagram schematically shows a state in which the sample 11 is moved by the rotating bodies 5 and 5a directly connected to the rotating body 18b, and since a 90° phase difference occurs in the rotation of the rotating bodies 5° and 5a, the sample 11 is moved from the first stage to the second stage. Convenient for transporting samples. The numbers at the left end of FIG. 23 indicate the rotation cycles of the rotary arm 20.

Figures 24 and 25 show vertical cross-sections of an embodiment for connecting multiple casings, respectively casing 1. I
a, 1b, and 1c are connected through communication paths 14° and 14a, 14b, and the intermediate suction path 12 is connected from the communication path 14 to a rotary pump (not shown) for intermediate suction, and the suction path 21 is connected from the casing 1C to the differential. It is connected to a knee pump (not shown) and is sucked into a high vacuum. In FIG. 24, an intermediate suction path 16 having exhaust resistance from the communication path 14a is shown.
is connected to the suction path 21, and the degree of vacuum is adjusted by its conductance. Further, in FIG. 25, the exhaust resistance of the gap 10b is smaller than that of the gap 10a, and the degree of vacuum is adjusted by its conductance. In this way, each casing 1, 1a,
The degree of vacuum in Ib and 1c increases successively.

FIG. 26 and FIG. 27 are horizontal sectional views showing an embodiment in which suction is performed in stages in one casing;
In the figure, the intermediate suction path 12 is connected to a rotary pump,
The intermediate suction path 16 is provided with an evacuation resistance and is connected to a deflation pump via the sample delivery path 6 to adjust the degree of vacuum in stages.

Further, in FIG. 27, the intermediate suction paths 12, 16 are connected to the same rotary pump, the gap 10b is made larger than the gap 10a, and the degree of vacuum is gradually increased by the conductance thereof.

In the above description, the structure of each component, the method of loading a sample, the method of maintaining a different atmosphere, etc. are not limited to those shown in the drawings, and can be changed as desired. The above explanation is
Using C wafer as an example, we have explained an atmosphere with a pressure difference as a different atmosphere, but there are no restrictions on the type or shape of the sample, and the same applies to atmospheres other than pressure, such as the type of gas. can.

In summary, according to the present invention, a sample can be continuously transferred between different atmospheres by rotating a rotating body having a sample storage part within a casing connected to a different atmosphere, and automation is also possible. It is possible. For this reason, if applied to the semiconductor manufacturing process, it is possible to avoid cutting the automation chain due to processing, etc., and streamline the manufacturing process.
It is possible to improve quality.

[Brief explanation of drawings]

FIG. 1 is a vertical cross-sectional view showing a sample transfer device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line A-A, and FIGS. Showing a modified example,
(,) is a plan view, (b) is a front view, (C) is a side view, and FIG. 6(a) and FIGS. 9 to 11 are respectively cutaway plan views of the casing part of other embodiments. , 6th
Figure fb) is a cutaway side view of the casing part in (a), Figures 12 to 15, Figures 16 (al, (b), Figure 17 (a), Figure 19 (a), Figure 20). 24 and 25 are vertical cross-sectional views of other embodiments, and FIG.
7(b) is a BB sectional view of (a), FIG. 19(b) is a horizontal sectional view of (a), FIG. 21(at) and FIG. 22 are a plan view showing a modified example, Figure (b) is a vertical sectional view of (a), Figure 23 is an operation diagram, and Figures 26 and 27 are horizontal sectional views showing different embodiments. In each figure, the same reference numerals are the same or The corresponding parts are shown: 1 is the casing, 2 is the sample introduction path, 6 is the sample delivery path, 5 is the rotating body, 6 is the sample storage section, 8 is the rotating device, and 11 is the sample. (Method) 1. Indication of the case Patent Application No. 34617 of 1983 3. Person making the amendment Relationship to the case Patent applicant 4/Agent 105 Telephone 436-4
700 Address: 3-15-8 Nishi-Shinbashi, Minato-ku, Tokyo
Insert "Figure 18."

Claims (1)

[Scope of Claims] (1) A casing in which a sample introduction path and a sample delivery path each connected to a different atmosphere are open; a rotating body that rotates within the casing while maintaining sufficient exhaust resistance; A sample transfer device (2) characterized by comprising a sample storage section provided on the front rotating body so as to receive the sample from the sample introduction path and send the sample to the sample delivery path (2) The sample storage section is rotatable. The sample transfer device (3) according to claim 1, which is open in the circumferential direction of the body, is provided with means for forming an atmosphere intermediate between the atmospheres of both the sample introduction path and the sample delivery path. Sample transfer device (4) according to claim 1 or 2 A plurality of casings each having a rotating body are connected, and an atmosphere intermediate between the sample introduction path and the sample delivery path is formed in the intermediate portion thereof. Claim 1 comprising means
Sample transfer device according to any one of Items 6 to 6