JPS61246359A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS61246359A
JPS61246359A JP8657785A JP8657785A JPS61246359A JP S61246359 A JPS61246359 A JP S61246359A JP 8657785 A JP8657785 A JP 8657785A JP 8657785 A JP8657785 A JP 8657785A JP S61246359 A JPS61246359 A JP S61246359A
Authority
JP
Japan
Prior art keywords
crucible
thin film
filament
film forming
filaments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8657785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0359984B2 (enExample
Inventor
Eisaku Mori
森　栄作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8657785A priority Critical patent/JPS61246359A/ja
Publication of JPS61246359A publication Critical patent/JPS61246359A/ja
Publication of JPH0359984B2 publication Critical patent/JPH0359984B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8657785A 1985-04-24 1985-04-24 薄膜形成装置 Granted JPS61246359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8657785A JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8657785A JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS61246359A true JPS61246359A (ja) 1986-11-01
JPH0359984B2 JPH0359984B2 (enExample) 1991-09-12

Family

ID=13890859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8657785A Granted JPS61246359A (ja) 1985-04-24 1985-04-24 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS61246359A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719664B1 (ko) 2005-08-30 2007-05-17 삼성에스디아이 주식회사 도가니를 채용한 증발원

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719664B1 (ko) 2005-08-30 2007-05-17 삼성에스디아이 주식회사 도가니를 채용한 증발원

Also Published As

Publication number Publication date
JPH0359984B2 (enExample) 1991-09-12

Similar Documents

Publication Publication Date Title
KR100517255B1 (ko) 유기 발광소자 박막 제작을 위한 선형 노즐 증발원
US8143557B2 (en) Plane heater
CN101097880A (zh) 带有衬底涂敷用载具的涂敷设备
JP2020002436A (ja) 加熱装置，蒸発源及び蒸着装置
JPS61246359A (ja) 薄膜形成装置
JP4246828B2 (ja) 真空蒸着装置におけるマスキング装置
WO2025098118A1 (zh) 一种支撑框架及真空设备
KR100315982B1 (ko) 측면 순간 증발기
KR102157476B1 (ko) 진공 증발원용 히터 및 절연체 어셈블리
CN212247180U (zh) 蒸发源的加热装置和蒸镀设备
CN102017788A (zh) 发热体单元及加热装置
TW200839926A (en) Susceptor structure in large area substrate processing system
JPH043005Y2 (enExample)
JP2002289962A (ja) 相変化を利用した熱伝達媒体を備えた光素子モジュール
KR970001024Y1 (ko) 플라즈마 표시소자의 게터구조
JP3102586B2 (ja) ボート用テーブル
JP4565722B2 (ja) 真空蒸着用るつぼ
JPH0326563Y2 (enExample)
US3940621A (en) Heat transfer device
KR100396092B1 (ko) 카본 발열체 및 그 제조 방법
JPS61130480A (ja) 蒸着用マスク
JPH03177565A (ja) 蒸発源用坩堝
CN118099024A (zh) 基板热处理用板状加热器
JPH04356914A (ja) 分子線セル
JPH0531096U (ja) チタンサブリメーシヨンポンプ