JPS61245128A - Mirror rocking device - Google Patents

Abstract

PURPOSE:To perform positioning with high precision by fixing a mirror which reflects laser light after adjusting finely the fitting angle of the mirror around a rotating shaft which is parallel to the mirror surface and crosses the 2nd control shaft at right angles when reflected light is positioned at a target on a surface to be worked by rocking the mirror. CONSTITUTION:A position rocking device for the mirror 1 which reflects the incident laser light 10 at a specific angle to illuminate the target position on the surface to be worked consists of the 2nd control shaft housing 8 which contains the mirror 1 and the 1st control shaft housing 15 linked with its its reverse surface, and the housings 8 and 9 are coupled. In this constitution, the housing 8 positioned at an upper part is formed in a U shape, a mirror fitting plate 21 to which the mirror 1 is stuck is put in the housing, and a shaft projecting from the reverse surface is coupled with a mirror holder 2 coupling with the 2nd control shaft 3 provided both side walls of the housing 8. Further, a compression coil spring 24 and an adjusting spring 23 are provided on the reverse surface of the fitting plate 21 and associated operatively with the shaft 3, thereby directing the surface of the mirror 1 in a desired direction.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a mirror swinging device, in particular, to swinging a mirror that reflects a laser beam, and directing the reflected light from the mirror to a target on a workpiece surface. This invention relates to a mirror swinging device for positioning.

[Conventional technology]

Many methods have been proposed for cutting cloth or thin plates by positioning a laser beam. A typical example is when cutting a workpiece, such as cloth, with a laser, the laser beam is fixed vertically downward so that the laser beam hits the cloth perpendicularly, and the X-axis is moved perpendicular to the cloth. There is a method in which the table is supported on a table and the positioning of this X-axis and Y-axis moving table is controlled.

Another method is to set a mirror supported by a swinging mechanism above the cloth while fixing the cloth as the workpiece on a flat surface, and to reflect the laser beam on the mirror and shake the mirror. There is a mirror oscillation method in which the mirror is moved to position the reflected laser light on the cloth.

This latter mirror swinging method allows the movable part to be made lightweight and compact, and is advantageous for high-speed positioning using laser light. However, it magnifies various errors and affects positioning accuracy, making it difficult to perform high-precision positioning. There is also the aspect that it is extremely difficult to realize this.

FIG. 4 is a sectional view showing a mirror rocking device in the mirror rocking method described above, and in FIG. 4, (1) is a mirror;
(2) is a mirror holder that supports this mirror (1), (
3) is a second control shaft that rotates this mirror holder (2), (4) is a bearing that supports this second control shaft (3), (5a), (5b), (6a), (6b), and (7)
is a motor rotor, a motor stator, a tachogenerator rotor, a tachogenerator stator, and an encoder for rotationally controlling the second control shaft (3).

(8) is the bearing (4), the motor stator (s
b) A second control shaft housing that supports the stator (6b) and encoder (7) of the tachogenerator.

(9) has this second control shaft housing (8) attached to one end, and is a first control shaft that is perpendicular to the second control shaft (3) and coaxial with the incident laser beam (10). shaft,(
11) is a bearing that supports this first control shaft (9);
(12a), (12b), (13a), (13b) and (14) are for controlling the rotation of the first control shaft (9);
These are a motor rotor, a motor stator, a tacho generator rotor, a tacho generator stator, and an encoder.

(15) is the bearing (11), the motor stator (12b), and the tachogenerator stator (13b).
) and the encoder (14). The incident light (10) is installed at a predetermined height in a coaxial state and parallel to the surface to be processed, and the first
By controlling the rotation of the control shaft (9) and the second control shaft (3), the reflected light of the laser light by the mirror (1) is positioned on the surface to be processed.

Now, in order to position one reflected light at the target position on the workpiece surface, the rotation angles of the first control axis and the second control axis (θ1 and θ, respectively) and the rotation angle of the reflected light on the workpiece surface must be adjusted. position (x
, y), that is, it is necessary to create a coordinate transformation formula. This coordinate transformation formula can be created by geometric considerations as shown in FIG. 5, and is expressed by the following formula.

[Problem that the invention seeks to solve]

Since the conventional mirror rocking device is configured as described above, in order to position the reflected light at the target position (X, Y), the rotation axes of the first control axis and the second control axis must be rotated as described above. It is sufficient to perform positioning at the value of the rotation angle (θ3.θ,) determined by the coordinate transformation formula.

However, actual equipment has various errors due to mechanical precision, and the target position (X, Y) and rotation angle (θ1
．． Strictly speaking, the relationship with θ, ) is different from the above coordinate transformation formula. For example, the first control axis and the second control axis cannot be strictly orthogonal. Therefore, there was a problem in that the reflected light deviated from the target position.

This invention was made to solve the above-mentioned problems, and provides a mirror swinging device that can position reflected light at a target position on a workpiece surface with high precision by adjusting the mechanism according to the procedure in advance. The purpose is to obtain.

[Means for solving problems]

The mirror rocking device according to the present invention is parallel to the mirror surface,
Further, a rotation fine adjustment mechanism is provided around a rotation axis perpendicular to the second control axis for fixing the mirror after fine adjustment of the angle.

[For production]

The rotational fine adjustment mechanism in the present invention finely rotates and adjusts the mirror so that its surface is perpendicular to the rotation center of the first control shaft. At this time, the rotation angle θ of the second control axis is also uniquely determined, and the value of this rotation angle θ is set to θ! = 0. This means that the mirror surface is perpendicular to the rotation center of the first control axis, which means that when using an autocollimator, the position of the reflected light by the mirror of the autocollimator will change even if the first control axis is rotated. This means that it does not change and can be adjusted.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG. 1, in which the same members as in FIG. 4 are given the same reference numerals.

In Figure 1, (21) is the mirror mounting plate to which mirror (1) is attached, and (22) is this mirror mounting plate (21).
and the mirror holder (2), and attach the mirror mounting plate (
21) is orthogonal to the second control axis (3), and the mirror (1
) is a rotation axis for fine adjustment around an axis parallel to the mirror surface, (23) is an adjustment bolt for rotating the mirror mounting plate (21) around the rotation axis (22), (2
4) is the rotation axis (22) of the mirror mounting plate (21).
It is a compression coil spring to fix the rotation angle around.

The mirror mounting plate (21), the rotation shaft (22), the adjustment pole (23)% and the compression coil spring (24) are arranged so that the mirror mounting plate (21) is orthogonal to the first control axis (9), and
A rotational fine adjustment mechanism is configured for fine rotational adjustment around an axis (22) parallel to the mirror surface.

Next, the operation will be explained. The mirror mounting plate (21) is pressed and fixed against the adjustment pole (23) by a compression coil spring (24). Adjust in this state)
When (23) is moved back and forth, the mirror mounting plate (21) rotates around the rotation axis (22) of the rotation fine adjustment mechanism provided in the mirror holder (2).

The rotation axis (22) of this rotational fine adjustment axis mechanism is perpendicular to the second control axis (3) and parallel to the mirror surface, so that the above-mentioned adjustment pole (23) can be adjusted forward or backward. With this, the mirror surface can be rotated and finely adjusted around the rotation axis, and as described above, using an autocollimator, it is possible to set φ, +φ, = 00 state.

In order to explain the effect of fine adjustment of the mirror mounting angle by the rotational fine adjustment mechanism, the following mechanical errors due to mechanical accuracy are shown below: -We introduced a φ goose and conducted a simulation. However, R represents the height of the first control axis from the surface to be processed.

e, 20, =O0θ, error in the height of the second control axis when = 0 (see Figure 2) φ1: Angle from the right angle of the second control axis to the first control axis Error (see Figure 3) e,: Distance of the mirror surface to the second control axis (see Figure 3) φ,: Angular error of the mirror surface to the second control axis (3rd
(See figure) Regarding the error of the reflected light from the target position, the following three items can be said from the simulation results.

■ The influence of only el and the influence of only 62 have similar trends.

■ The influence of only φ and the influence of only φ are similar in tendency.

■ The influence of φ and φ is larger than the influence of el and e.

From the above, we now have a mechanism for varying the value of φ,
That is, by using the rotational fine adjustment mechanism of the present invention, φ
, +φ,=0, the signs of φ and φ will be reversed, and it can be seen from the above item (2) that the errors are in the direction of canceling each other out. Also, from item (2) above, the influence of φ1 and φ is greater than the influence of 88 and e, so a great effect on error reduction can be expected.

Furthermore, if we realize φ, +φ, = 0 as above, then θ, =
0, it goes without saying that the mirror surface and the rotation center of the first control axis are perpendicular.

In the above embodiment, the rotation fine adjustment device includes a mirror mounting plate (21), a rotation shaft (22), and an adjustment bolt (2).
3) and a compression coil spring (24), but the configuration is not limited to this, and the mirror can be rotated and finely adjusted around an axis that is parallel to the mirror surface and orthogonal to the second control axis. The device may have any configuration as long as it is a device.

〔Effect of the invention〕

As described above, according to the present invention, parallel to the mirror surface,
In addition, a rotational fine adjustment mechanism is provided to fix the mirror after finely adjusting its mounting angle around the rotation axis perpendicular to the second control axis. This has the effect of providing a mirror swinging device that can position the mirror at a target position on the workpiece surface with high precision.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a mirror swinging device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram for explaining the meanings of R and el, and FIG. 3 is φIgf3z*φ. In order to explain the meaning of
, = 0, and Figures 1 and 4 are cross-sectional views showing a conventional mirror rocking device, and Figure 5 is an explanatory diagram for deriving the coordinate transformation formula of the mirror rocking device. . (1) is the mirror, (3) is the second control axis, (5a) e(s
b) is the servo actuator, (rotor and stator of the motor), (6a), (6b) * (7) is the detector (rotor and stator of the tacho generator, encoder), (9) is the first control axis, (10 ) is laser light, (12
a), (12b) are servo actuators (motor rotor and stator), (13a), (13b), (14
) [Detector (rotor and stator of tacho generator, encoder'> (21), (22), (23),
(24) is a rotational fine adjustment mechanism (mirror mounting plate, rotation shaft, adjustment bolt, compression coil spring). In the drawings, the same reference numerals indicate the same or equivalent parts. Agent: Patent attorney Masuo Oiwa (and 2 others) Figure 1 24: Squeezing coil lt Figure 2 Figure 4 Procedural amendment (voluntary) 1985 'L enemy 6 Day 2, name of invention mirror A column for the rocking device 3, the representative of the person making the amendment, Moriya Shiki 5, and a detailed description of the invention in the scope of the amendment. 6. Contents of amendment

Claims (1)

[Claims] In a mirror swinging device that swings a mirror that reflects laser light and positions the reflected light from the mirror at a target position on the workpiece surface, the mirror is rotated around a rotation axis parallel to the mirror surface. a rotation fine adjustment mechanism that is fixed after fine adjustment; and a servo for controlling the rotation of the mirror and rotation fine adjustment mechanism with a rotation axis that is parallel to the mirror surface and orthogonal to the rotation axis of the rotation fine adjustment mechanism. A second control axis equipped with an actuator and a detector, and a rotation axis that is orthogonal to the second control axis and coaxial with the incident light of the laser beam, controls the rotation of the mirror, the rotation fine adjustment mechanism, and the second control axis. 1. A mirror swinging device comprising: a servo actuator and a first control axis equipped with a detector.