JPH04200892A - Laser beam transmitting device in laser beam machine - Google Patents

Abstract

PURPOSE:To reduce an optical axis adjusting time by curving and guiding an incidental laser beam to the object optical axis through mirrors arranged on an incident laser beam and on an object optical axis. CONSTITUTION:A laser beam machine composed of a laser beam oscillator 19 and a laser beam transmitting device is such constructed that a rotation adjusting axis wherein a 1st mirror 1 can rotate around an axis contained in the laser reflecting area and a straight motion adjusting axis which can move straightly in the direction orthogonal to that axis are included ion the 1st mirror 1 and mirror 2, too, has the same structure, the rotation adjusting axes of both mirrors are orthogonally crossed and the projected laser beam from the 1st mirror is made incident directly on the 2nd mirror 2. In this way, it is possible to reduce the time for adjusting the optical axis of the laser beam.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides optical axis value -I in a laser processing device.
−? AP relates to a laser beam transmission device that is fully compatible.

[Conventional Method] Usually, a laser processing device reflects a laser beam emitted from a laser oscillator by several mirrors and guides it to a workpiece processing section. Misalignment of the laser beam in the workpiece processing section can be caused by the attachment of the laser oscillator body and mirror to the laser processing equipment.
It is greatly affected by the size J difference. The allowable range of deviation of the laser beam in the workpiece processing section is very narrow, and if the allowable range is exceeded, processing becomes difficult. In order to keep the deviation of the laser beam in the workpiece processing section within an allowable range, the laser beam transmission system needs an optical axis adjustment function to accurately guide the laser beam to the target optical axis. Adjusting the mounting position and angle of the mirror is effective for adjusting the optical axis. In order to adjust the mounting position and angle of the mirror, usually each mirror mounting 1
The unit is equipped with an adjustment mechanism for two rotating axes and two linear axes (1). Conventionally, the laser beam was guided to one desired optical axis by adjusting this adjustment mechanism to guide the laser beam to the center of the next incident mirror.

[Problems to be Solved by the Invention] According to the conventional method, the operator has to adjust the adjustment axes, which have three to four degrees of freedom per mirror, for all the mirrors arranged in the transmission system. Must be.

Adjustment work is extremely difficult because the behavior of the laser beam is complicated as each adjustment axis of the mirror is adjusted.

In particular, it is difficult to align the optical axes of laser beams reflected by multiple mirrors by adjusting the mirrors closer to the oscillator. For this reason, the degree of freedom is usually reduced by adjusting the mirror closer to the workpiece processing area in order than the mirror closer to the oscillator.

For the above reasons, optical axis adjustment has become a very time-consuming task. Further, this work requires a skilled worker, and it takes time for a beginner to master the adjustment technique.

[Means for Solving the Problems] The present invention is a laser beam transmission device that changes the direction of one laser beam using two mirrors and accurately guides it to a target optical axis.

The angle of incidence of the incident laser beam on the mirror is approximately perpendicular to the target optical axis, and the incident laser beam is made incident at a position where the target optical axis does not intersect.

Each mirror has two adjustments: a rotational adjustment axis that can rotate around an axis included in the laser reflection surface of the mirror, and a linear adjustment axis that can move linearly in a direction perpendicular to the rotational adjustment axis. Provide an axis.

The two mirrors are placed on an axis that intersects with both the incident laser beam axis and the target optical axis and is perpendicular to both axes, one at a point of intersection with both axes.

The laser reflecting surface of the mirror placed on the incident laser beam forms an angle of approximately 45 degrees with the incident laser beam axis, and is oriented so that the laser beam is reflected in one direction by the mirror placed on the target optical axis. The rotation adjustment axis of the mirror is oriented almost parallel to the target optical axis. The mirror's linear adjustment axis is
If the angle is other than parallel to the laser reflection surface, the optical axis can be adjusted in any direction, but it is preferable to make the angle approximately parallel to the incident laser beam axis.

The laser reflection surface of the mirror placed on the target optical axis makes an angle of approximately 45 degrees with the laser beam emitted from the mirror placed on the incident laser beam, and reflects the laser beam in the direction of the target optical axis. direction. The rotation adjustment axis of the mirror is oriented substantially parallel to the incident laser beam axis. The linear adjustment axis of the mirror has the function of adjusting the optical axis in any direction as long as it has an angle other than parallel to the laser reflecting surface, but it is preferable to orient it almost perpendicular to the desired optical axis.

The rotation adjustment axes of the two mirrors are arranged so that they are exactly at right angles.

[Operation] By arranging the incident laser beam and the two mirrors as described above, the incident laser beam is separated by approximately 90 degrees between the mirror placed on the incident laser beam and the mirror placed on the target optical axis. The beam is bent one by one and guided near the target optical axis.

The deviation between the laser beam emitted from the mirror disposed on the target optical axis and the target optical axis can be completely removed by adjusting the four adjustment axes described below. The rotational adjustment axis of the mirror placed on the incident laser beam corrects the angular deviation component in the direction parallel to the rotational adjustment axis of the mirror placed on the target optical axis. The linear adjustment axis of the mirror placed on the incident laser beam corrects a positional deviation component in a direction parallel to the rotational adjustment axis of the mirror placed on the target optical axis. The rotational adjustment axis of the mirror placed on the target optical axis corrects the angular deviation component in the direction perpendicular to the coaxial axis. The linear adjustment axis of the mirror placed on the target optical axis corrects the position error component in the direction perpendicular to the rotational adjustment axis of the mirror.

By adjusting each adjustment axis, the direction in which the mirror moves and the direction in which the laser beam moves coincide with each other.

Since the rotation adjustment axes of the two mirrors are exactly at right angles, the direction of correcting the misalignment between the target optical axis and the laser beam by adjusting each adjustment axis is perpendicular to the adjustment axis of each mirror and does not interfere with each other.

In actual work, after adjusting the rotation adjustment axis and linear adjustment axis of one mirror so that the laser beam is on the same plane as the target optical axis, the rotation adjustment axis and linear adjustment axis of the other mirror are adjusted. Adjust the adjustment axis. At this time, the order of adjustment does not matter.

The permissible range of incidence of the incident laser beam on the mirror placed in the second position depends on the distance between the two mirror units and the area of the reflecting surface of the mirror. There is no problem as long as it does not deviate from the reflection range of the reflection surfaces of the two mirrors.

[Example] Embodiments according to the present invention will be described with reference to the drawings.

The laser oscillator 19 is fixed to the laser processing device main body 18. The intermediate block 3 is a laser processing device main body 18
is fixed. The mirror block A1 is attached to the intermediate block 3 by a linear guide rail A16. The mirror block A1 is linearly movable along the linear motion guide rail A16 by turning the linear motion fine adjustment screw AIO. The mirror white 6 is located one inch on the mirror block A1 with the rotation axis A12. The mirror white 6 can be rotated about the rotation axis A12 by turning the rotation fine adjustment screw A8.

The mirror A4 is fixed to the mirror stand A6 at a position where the reflective surface includes the rotation axis AI2. The mirror block B2 is spaced one inch from the intermediate block 3 by a linear guide rail B17. The mirror pro-nk B2 can be moved linearly along the linear motion guide rail B17 by turning the linear motion fine adjustment screw Bll.

Mirror stand B7 is rotation axis B ], 3 is mirror block B
It's 1 in 2. Mirror stand B7 has rotation fine adjustment screw B
By turning 9, it is possible to rotate around the rotating shaft 813. The mirror B5 is fixed to the mirror stand B7 at a position where the reflective surface is included in the rotation axis 813. The rotation axis A17 and the rotation axis 813 are exactly at right angles.

The incident laser beam 14 is reflected by mirror A4 and mirror B5 and guided to the target optical axis 5.

The behavior of the laser beam emitted from the mirror block B2 according to the adjustment of each fine adjustment screw is described below. When the rotation fine adjustment screw A8 is moved, the beam angle changes in a direction parallel to the rotation axis B13. When the linear fine adjustment screw A10 is moved, the beam is translated in a direction parallel to the rotation axis 813. When the rotation fine adjustment screw B9 is moved, the beam angle changes in a direction perpendicular to the rotation axis 813. Moving the linear fine adjustment screw 81.1 translates the beam in a direction perpendicular to the axis of rotation 81.3.

[Effects of the Invention] Since the present invention is configured as explained above, it produces the effects as described below.

The incident laser beam can be accurately guided to the target optical axis by adjusting the four axes using two mirrors.

It is no longer necessary to adjust the optical axis of the laser beam before it enters the mirror. The number of adjustment axes is reduced compared to the conventional 3 to 4 axes per mirror. For the above reasons, it has become possible to shorten the optical axis adjustment work time.

Since only two adjustment axes are required for each mirror, the structure of the mirror mounting part can be simplified. Since the two mirrors can be integrated into an optical axis correction unit, the degree of freedom in designing the laser processing device is increased.

Since the direction in which the mirror moves due to adjustment of the four adjustment axes matches the direction in which the laser beam moves accordingly, even beginners can easily perform adjustment work.

The direction of correcting the misalignment between the target optical axis and the laser beam by adjusting the adjustment axes of the two mirrors is independent of each other's adjustment axes and does not interfere with each other, so the order of adjustment should be from which mirror. You may go.

Therefore, the degree of freedom in adjustment work is increased, and work efficiency is improved.

[Brief explanation of the drawing]

- Figure 1 is a perspective view of a laser processing device having a laser beam transmission device, Figure 2 is a perspective view of the laser beam transmission device,
FIG. 3 is a front view of the laser beam transmission device, and FIG. 4 is a side view of the laser beam transmission device.゛ 1... Mirror block A 2... Mirror block B 3... Intermediate block 4... Mirror A 5... Mirror B 6... Mirror stand A 7... Mirror stand B 8... Fine rotation Adjustment screw A 9... Rotation fine adjustment screw B 10... Linear motion fine adjustment screw A 11. Linear motion fine adjustment screw B 12... Rotation axis A 13... Rotation axis B 14... Incident laser beam axis 15... Target optical axis 16... Linear motion guide rail A 17... Linear motion guide rail B 18... One laser processing device main body... Laser oscillator

Claims (1)

[Claims] In a laser processing device that includes a laser oscillator and a laser beam transmission device that guides a laser beam emitted from the laser oscillator to a workpiece processing section using a plurality of mirrors, the first mirror is included in the laser reflection surface of the mirror. The second mirror is also provided with a rotational adjustment shaft that is rotatable around the shaft and a linear adjustment shaft that is movable linearly in a direction perpendicular to the rotational adjustment shaft. the rotation adjustment axis of the first mirror and the rotation adjustment axis of the second mirror have a perpendicular positional relationship, and the laser beam emitted from the first mirror directly hits the second mirror. a laser beam transmission device configured to be incident;