JPS61244435A - 薄帯板の保持及び送り装置 - Google Patents
薄帯板の保持及び送り装置Info
- Publication number
- JPS61244435A JPS61244435A JP60085268A JP8526885A JPS61244435A JP S61244435 A JPS61244435 A JP S61244435A JP 60085268 A JP60085268 A JP 60085268A JP 8526885 A JP8526885 A JP 8526885A JP S61244435 A JPS61244435 A JP S61244435A
- Authority
- JP
- Japan
- Prior art keywords
- band
- drum
- holding
- substrate drum
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 44
- 230000002093 peripheral effect Effects 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims description 49
- 238000005520 cutting process Methods 0.000 abstract description 12
- 238000003825 pressing Methods 0.000 abstract description 3
- 230000002040 relaxant effect Effects 0.000 abstract 2
- 238000000926 separation method Methods 0.000 abstract 1
- 238000007639 printing Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000007646 gravure printing Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000005284 excitation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60085268A JPS61244435A (ja) | 1985-04-19 | 1985-04-19 | 薄帯板の保持及び送り装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60085268A JPS61244435A (ja) | 1985-04-19 | 1985-04-19 | 薄帯板の保持及び送り装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61244435A true JPS61244435A (ja) | 1986-10-30 |
| JPH0464815B2 JPH0464815B2 (enExample) | 1992-10-16 |
Family
ID=13853823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60085268A Granted JPS61244435A (ja) | 1985-04-19 | 1985-04-19 | 薄帯板の保持及び送り装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61244435A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04269163A (ja) * | 1991-02-18 | 1992-09-25 | Noritake Co Ltd | 極薄金属板の超仕上研磨装置 |
| JP2023049756A (ja) * | 2021-09-29 | 2023-04-10 | 東京エレクトロン株式会社 | 基板保持機構及びこれを用いた基板処理装置、並びに基板交換方法 |
-
1985
- 1985-04-19 JP JP60085268A patent/JPS61244435A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04269163A (ja) * | 1991-02-18 | 1992-09-25 | Noritake Co Ltd | 極薄金属板の超仕上研磨装置 |
| JP2023049756A (ja) * | 2021-09-29 | 2023-04-10 | 東京エレクトロン株式会社 | 基板保持機構及びこれを用いた基板処理装置、並びに基板交換方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0464815B2 (enExample) | 1992-10-16 |
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