JPS61240548A - 電子顕微鏡像記録読取装置 - Google Patents
電子顕微鏡像記録読取装置Info
- Publication number
- JPS61240548A JPS61240548A JP60081800A JP8180085A JPS61240548A JP S61240548 A JPS61240548 A JP S61240548A JP 60081800 A JP60081800 A JP 60081800A JP 8180085 A JP8180085 A JP 8180085A JP S61240548 A JPS61240548 A JP S61240548A
- Authority
- JP
- Japan
- Prior art keywords
- image
- light
- electron microscope
- reading
- dimensional sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 67
- 238000010894 electron beam technology Methods 0.000 claims abstract description 41
- 230000005284 excitation Effects 0.000 claims abstract description 41
- 238000001000 micrograph Methods 0.000 claims description 37
- 230000003287 optical effect Effects 0.000 claims description 35
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000009825 accumulation Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000004020 luminiscence type Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 230000005855 radiation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 206010047571 Visual impairment Diseases 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- -1 silver halide Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081800A JPS61240548A (ja) | 1985-04-17 | 1985-04-17 | 電子顕微鏡像記録読取装置 |
| US06/804,775 US4851677A (en) | 1984-12-07 | 1985-12-05 | Apparatus for recording and reproducing image produced by an electron microscope including an optical filter and a deflecting element |
| DE8585115557T DE3583994D1 (de) | 1984-12-07 | 1985-12-06 | Aufzeichnungs- und wiedergabegeraet von mittels eines elektronenmikroskops erzeugten bildern. |
| EP85115557A EP0184792B1 (en) | 1984-12-07 | 1985-12-06 | Apparatus for recording and reproducing images produced by an electron microscope |
| US07/267,736 US4866274A (en) | 1984-12-07 | 1988-11-03 | Apparatus for recording and reproducing images produced by an electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081800A JPS61240548A (ja) | 1985-04-17 | 1985-04-17 | 電子顕微鏡像記録読取装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61240548A true JPS61240548A (ja) | 1986-10-25 |
| JPH0552627B2 JPH0552627B2 (enrdf_load_stackoverflow) | 1993-08-05 |
Family
ID=13756560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60081800A Granted JPS61240548A (ja) | 1984-12-07 | 1985-04-17 | 電子顕微鏡像記録読取装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61240548A (enrdf_load_stackoverflow) |
-
1985
- 1985-04-17 JP JP60081800A patent/JPS61240548A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0552627B2 (enrdf_load_stackoverflow) | 1993-08-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |